JPS581960Y2 - Sample equipment for scanning electron microscopes, etc. - Google Patents

Description

[Detailed description of the invention] The present invention relates to a sample apparatus for a scanning electron microscope, etc. More specifically, the present invention relates to a sample device for a scanning electron microscope, etc., and more specifically, to improve resolution, the sample is tilted and placed close to the final stage focusing lens (hereinafter referred to as objective lens). The present invention relates to a device that limits horizontal movement and prevents a sample stage or the like from coming into contact with the objective lens.

Generally, in a scanning electron microscope, in order to enable observation and analysis of a sample from all directions, the sample is tilted and rotated in addition to the normal horizontal movement.

Furthermore, in order to perform high-resolution observation, it is desired that the sample surface be placed as close as possible to the main surface of the objective lens.

Therefore, in order to increase the resolution, if the sample placed near the objective lens is tilted and moved horizontally, the sample holder etc. may collide with the objective lens, causing damage to the sample moving mechanism, objective lens, etc. occurs.

In order to solve this problem, in the past, the sample micro-motion system for placing the sample and driving the micro-movement was grounded via an ammeter, and the primary electron beam incident on the sample was passed through the ammeter, and this current was It was designed to detect that the sample micro-motion system had come into contact with the lens and generate an alarm.

However, in such a configuration, the safety system can only operate when the electron beam is not being generated, so for example, in order to protect the sample that is easily degraded by the electron beam, the sample position must be moved or tilted before electron beam irradiation. In cases where it is necessary to move or tilt the sample, the sample cannot be moved or tilted with confidence.

The present invention is aimed at solving such inconveniences, and will be explained in detail below based on embodiments shown in the drawings.

FIG. 1 is a plan sectional view showing an embodiment of the present invention, and FIG. 2 is a view taken along the line A-A in FIG. An inclined cylinder 3 is rotatably fitted to the outer periphery of the shaft.

The center of rotation of the tilted tube (the axis of the shaft 2) is placed perpendicular to the optical axis, and the tilted tube is prevented from moving in the axial direction by a holding plate 4.

Furthermore, a protrusion 5 having a flat surface 5a is provided at the lower part of the open end of the inclined cylinder.

A sample stage 6 is placed on the plane of the protrusion via a ball or the like, and is held between guide plates 7a and 7b, so that the sample stage is perpendicular to the center of rotation of the inclined cylinder. direction (hereinafter this direction will be referred to as the X direction).

Although not shown, it goes without saying that a drive mechanism for moving the sample stage in the X direction from the outside and a drive mechanism for driving the sample stage in the Y direction are also provided.

Further, a sample holder 9 holding a sample 8 is removably mounted on the sample stage 6.

The surface of the sample 8 is placed to coincide with the axis of the inclined tube 3.

10 is a drive shaft rotatably passing through the side wall of the sample chamber;
A gear 11 is attached to one end (vacuum side), and this gear meshes with a gear 12 provided on the outer periphery of the inclined cylinder 3.

Therefore, when the gear 11 is rotated by operating the heir 13 provided on the drive shaft 10, the inclined tube 3 is rotated clockwise or counterclockwise, so that the sample 8 is tilted.

Reference numeral 14 denotes a first microswitch for electrically detecting the sample position when the sample 8 is moved in the X direction, and is attached to the protrusion 5. When 15 is touched, it turns on.

16 is a second microswitch for electrically detecting the rotation angle of the tilted tube 3, that is, the tilt angle of the sample (see FIG. 2), and this switch is connected to an arc-shaped cam 17 attached to the outer periphery of the tilted tube. The switch turns on when touched, and the switch is attached to the inner wall of the sample chamber 1.

Reference numeral 18 denotes a warning lamp placed near the tilting heir 13, and the lamp is connected to a power source 19 as shown in FIG.
The configuration is such that current from the microswitches 14 and 16 is supplied via the two microswitches 14 and 16 connected in series.

Incidentally, in order to perform high-resolution observation, the surface of the sample 8 is placed close to the objective lens 20.

Therefore, the sample stage 6 is moved to the right with respect to the plane of the paper in FIG. When the sample holder 8 is tilted in the direction of the arrow C in the same figure, the sample holder 9 approaches the objective lens 20 very closely, as shown in FIG. 3, and eventually collides with the objective lens 20.

Therefore, in the present invention, while the sample 8 is moved to the right around the Y-axis shown in FIG. (see figure), the second microswitch 16 is turned on by the engagement of the cam IT attached to the inclined cylinder, and the sample 8 is turned on.
When the center O of is located on the right side of the Y-axis in FIG. 1, the first microswitch 14 is turned on by engagement of the protruding surface 15a of the cam 15.

In this embodiment, when the center O of the sample 8 is located on the optical axis or on the left side of the Y axis in FIG.
The sample holder 9 is configured so as not to come into contact with the objective lens 20 even if the sample 8 is tilted 90 degrees in the direction of arrow C.

Therefore, when the sample 8 is tilted within the tilt angle α with the center O of the sample 8 positioned to the right with respect to the Y axis in FIG. 18 does not turn on.

When the sample 8 is tilted at the inclination angle α, the second microswitch 16 is also turned on, so that the lamp 18 lights up, indicating that the sample holder 9 has come very close to the objective lens 20.

In addition, even if the sample is tilted by an angle of inclination α or more when the center O of the sample 8 is located on the left side in FIG. , observation can be performed with the sample tilted at 90 degrees.

However, when the sample 8 is moved to the right in FIG. 1 under the lever condition (the sample is tilted at 90 degrees) and the center O of the sample passes over the Y axis, the first microswitch 14 is also turned on. Therefore, the lamp 18 is turned on, and collision of the sample holder 90 with the objective lens 20 can be avoided.

As mentioned above, in the present invention, the first. Using the second microswitch, these first. The configuration is such that an alarm is generated when the second microswitch performs detection at the same time, so the sample can be moved and rotated with peace of mind even when no electron beam is generated, allowing you to locate a specific observation position on the sample. Depending on the angle, the sample can be observed at a large angle, such as 90°.

It should be noted that the above-mentioned embodiments are merely illustrative of the present invention, and many modifications may be made to its implementation.

Although a lamp is used in the example, any alarm device such as a buzzer may be used.

Alternatively, instead of the alarm device, an electromagnetic brake may be attached to the tilting and sample moving drive shaft to lock the operation of the drive shaft.

Further, although the drive shafts for tilting and moving the sample are configured to be operated manually, they may be driven by an electric motor.

In this case, when using an electromagnetic brake on the drive shaft, it is advantageous to intercept the current to the motor so that it is simultaneously cut off when the drive shaft is locked.

[Brief explanation of the drawing]

FIG. 1 is a plan sectional view showing an embodiment of the present invention, FIG. 2 is a view taken along the line A--A in FIG. 1, and FIG. 3 is an explanatory diagram of the operation of the present invention. In the figure, 1 is a sample chamber, 2 is a shaft, 3 is an inclined cylinder, 4 is a holding plate, 5 is a protrusion, 6 is a sample stage, 7a and 7b are guide plates, 8 is a sample, 9 is a sample holder, and 10 is a drive shaft,
11 and 12 are gears, 13 is the legitimate child, 14 and 16 are the first
and a second microswitch, 15 and 17 are cams, 1
8 is a lamp, 19 is a power supply, and 20 is an objective lens.

Claims (1)

[Scope of utility model registration request] An apparatus comprising: a tilting body mounted close to an electron lens so as to be tiltable about an axis perpendicular to the optical axis; and a sample stage mounted to the tilting body so as to be movable in a direction perpendicular to the tilting axis. a first detection means attached to the tilting body for detecting that the sample stage has moved by a predetermined amount or more with respect to the tilting body; and a first detection means for detecting that the tilting body has been tilted by a predetermined angle or more. a second detection means for the first detection means; A sample device for a scanning electron microscope or the like, comprising means for issuing an alarm or locking the driving of the tilting body when the second detection means performs the detection at the same time.