JPS5819243U - Leak test equipment - Google Patents

Leak test equipment

Info

Publication number
JPS5819243U
JPS5819243U JP11405181U JP11405181U JPS5819243U JP S5819243 U JPS5819243 U JP S5819243U JP 11405181 U JP11405181 U JP 11405181U JP 11405181 U JP11405181 U JP 11405181U JP S5819243 U JPS5819243 U JP S5819243U
Authority
JP
Japan
Prior art keywords
vacuum side
leak test
detection gas
test object
leak
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11405181U
Other languages
Japanese (ja)
Inventor
横山　佳興
河原　高志
Original Assignee
株式会社島津製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社島津製作所 filed Critical 株式会社島津製作所
Priority to JP11405181U priority Critical patent/JPS5819243U/en
Publication of JPS5819243U publication Critical patent/JPS5819243U/en
Pending legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来のリーク試験装置による試験説明用の図、
第２図はこの考案によるリーク試験装置の要部を示す断
面図、第３図はこの考案の他の実施例を示す図である。 １：被検体、２：バッキング、３：基台、４：蔽い、５
：排気管路、６：リークガス検出器、７：被検体受け、
８：空気管路、９：空気室。Figure 1 is a diagram for explaining a test using a conventional leak test device.
FIG. 2 is a sectional view showing the main parts of the leak test device according to this invention, and FIG. 3 is a diagram showing another embodiment of this invention. 1: Subject, 2: Backing, 3: Base, 4: Covering, 5
: Exhaust pipe line, 6: Leak gas detector, 7: Subject receiver,
8: Air pipe line, 9: Air chamber.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 被検体の開口にバッキングを圧着させて被検体の内、外
いづれかを真空に保持し、他方非真空側にリーク検出用
ガスの雰囲気を生成させて前記真空側にリークした検出
用ガスを検出するようにして被検体のリークの有無を検
査するようにしたリーク試験装置において、前記開口と
バッキングとの圧着部に沿い前記非真空側に形成される
空気室と、この空気室に空気を吹き込みこの室を前記非
真空側空間より高圧にするための空気管路とを設け、前
記圧着部より前記検出用ガスの前記真空側への漏洩を防
止するようにしたことを特徴とするリーク試験装置。A backing is crimped onto the opening of the test object to maintain a vacuum inside or outside the test object, and an atmosphere of leak detection gas is generated on the non-vacuum side to detect the detection gas leaked to the vacuum side. In the leak test device which tests for the presence or absence of leaks in a test object in this way, an air chamber is formed on the non-vacuum side along the crimped portion between the opening and the backing, and air is blown into this air chamber. A leak test device comprising: an air pipe line for making the pressure of the chamber higher than that of the non-vacuum side space to prevent the detection gas from leaking from the crimp portion to the vacuum side.
JP11405181U 1981-07-30 1981-07-30 Leak test equipment Pending JPS5819243U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11405181U JPS5819243U (en) 1981-07-30 1981-07-30 Leak test equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11405181U JPS5819243U (en) 1981-07-30 1981-07-30 Leak test equipment

Publications (1)

Publication Number Publication Date
JPS5819243U true JPS5819243U (en) 1983-02-05

Family

ID=29908338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11405181U Pending JPS5819243U (en) 1981-07-30 1981-07-30 Leak test equipment

Country Status (1)

Country Link
JP (1) JPS5819243U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5525709U (en) * 1978-08-07 1980-02-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5525709U (en) * 1978-08-07 1980-02-19

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