JPS58191533U - 光路を含む真空通路を遮断するためのゲ−ト弁 - Google Patents

光路を含む真空通路を遮断するためのゲ−ト弁

Info

Publication number
JPS58191533U
JPS58191533U JP8817282U JP8817282U JPS58191533U JP S58191533 U JPS58191533 U JP S58191533U JP 8817282 U JP8817282 U JP 8817282U JP 8817282 U JP8817282 U JP 8817282U JP S58191533 U JPS58191533 U JP S58191533U
Authority
JP
Japan
Prior art keywords
optical path
gate valve
vacuum passage
valve
shut
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8817282U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0522834Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
市原　藤三郎
Original Assignee
日本真空技術株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本真空技術株式会社 filed Critical 日本真空技術株式会社
Priority to JP8817282U priority Critical patent/JPS58191533U/ja
Publication of JPS58191533U publication Critical patent/JPS58191533U/ja
Application granted granted Critical
Publication of JPH0522834Y2 publication Critical patent/JPH0522834Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Spectrometry And Color Measurement (AREA)
  • Particle Accelerators (AREA)
JP8817282U 1982-06-15 1982-06-15 光路を含む真空通路を遮断するためのゲ−ト弁 Granted JPS58191533U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8817282U JPS58191533U (ja) 1982-06-15 1982-06-15 光路を含む真空通路を遮断するためのゲ−ト弁

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8817282U JPS58191533U (ja) 1982-06-15 1982-06-15 光路を含む真空通路を遮断するためのゲ−ト弁

Publications (2)

Publication Number Publication Date
JPS58191533U true JPS58191533U (ja) 1983-12-20
JPH0522834Y2 JPH0522834Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-06-11

Family

ID=30096859

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8817282U Granted JPS58191533U (ja) 1982-06-15 1982-06-15 光路を含む真空通路を遮断するためのゲ−ト弁

Country Status (1)

Country Link
JP (1) JPS58191533U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0444000A (ja) * 1990-06-11 1992-02-13 Soltec:Kk 放射光透過窓

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4935475A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-08-09 1974-04-02
JPS5279325A (en) * 1975-11-08 1977-07-04 Leybold Heraeus Verwaltung Oscillation slide valve
JPS5414018A (en) * 1977-07-01 1979-02-01 Kouenerugii Butsurigaku Kenkiy Gate valve
JPS5686268A (en) * 1979-11-24 1981-07-13 Vat Ag Full metallic slide valve for high vacuum device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4935475A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-08-09 1974-04-02
JPS5279325A (en) * 1975-11-08 1977-07-04 Leybold Heraeus Verwaltung Oscillation slide valve
JPS5414018A (en) * 1977-07-01 1979-02-01 Kouenerugii Butsurigaku Kenkiy Gate valve
JPS5686268A (en) * 1979-11-24 1981-07-13 Vat Ag Full metallic slide valve for high vacuum device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0444000A (ja) * 1990-06-11 1992-02-13 Soltec:Kk 放射光透過窓

Also Published As

Publication number Publication date
JPH0522834Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-06-11

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