JPS58191533U - Gate valve to shut off vacuum passage including optical path - Google Patents
Gate valve to shut off vacuum passage including optical pathInfo
- Publication number
- JPS58191533U JPS58191533U JP8817282U JP8817282U JPS58191533U JP S58191533 U JPS58191533 U JP S58191533U JP 8817282 U JP8817282 U JP 8817282U JP 8817282 U JP8817282 U JP 8817282U JP S58191533 U JPS58191533 U JP S58191533U
- Authority
- JP
- Japan
- Prior art keywords
- optical path
- gate valve
- vacuum passage
- valve
- shut
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図はこの考案のゲート弁の１実施例の構成要素の構
成を実質的に第５図の折曲線Ａ−Ａに沿つて矢印方向に
見た断面で示した前記ゲート弁の１作動位置を示す図、
第２図はゲート弁の第２作動位置を示す第１図に対応す
る図、第３図はゲート弁の第３作動位置を示す第１図お
よび第２図に対応する図、第４図は第５図のＢ−Ｂ線に
沿って矢印方向に見たゲート弁の拡大部分断面図、第５
図はゲート弁の軸線を通る部分垂直断面図、第６図はゲ
ート弁を取付けた実験装置を線図的に略示する図である
。
図面において、１０はゲート弁、１７は弁座、２０は弁
板、２６は窓部分、２９は窓部分に設けた透明な材料の
板、３４は真空通路を囲むダクト、３７は光路を示す。FIG. 1 shows the structure of the constituent elements of one embodiment of the gate valve of the present invention in a cross section taken substantially along the fold line A-A in FIG. 5 in the direction of the arrow, and shows one operating position of the gate valve. A diagram showing
Figure 2 is a diagram corresponding to Figure 1 showing the second operating position of the gate valve, Figure 3 is a diagram corresponding to Figures 1 and 2 showing the third operating position of the gate valve, and Figure 4 is a diagram corresponding to Figure 1 showing the third operating position of the gate valve. An enlarged partial sectional view of the gate valve as seen in the direction of the arrow along line B-B in FIG.
The figure is a partial vertical cross-sectional view passing through the axis of the gate valve, and FIG. 6 is a diagram schematically showing the experimental apparatus to which the gate valve is attached. In the drawings, 10 is a gate valve, 17 is a valve seat, 20 is a valve plate, 26 is a window portion, 29 is a transparent plate provided in the window portion, 34 is a duct surrounding a vacuum passage, and 37 is an optical path.
Claims (1)
、真空通路を環状に包囲する弁座と、並びに閉弁位置で
弁座に気密接触して真空通路を気密的に遮断する弁板と
を有し、弁板が前記光路を進行させるべき光線の波長に
対して透明または実質的に透明な材料で形成された窓部
分を備え、よって閉弁時にも前記光路に沿って前記光線
が遮断されることなく進行できることを特徴とするゲー
ト弁。A gate valve for blocking a vacuum passage including an optical path, which has a valve seat that annularly surrounds the vacuum passage, and a valve plate that hermetically contacts the valve seat in a closed position and hermetically blocks the vacuum passage. and the valve plate includes a window portion formed of a material that is transparent or substantially transparent to the wavelength of the light beam to be transmitted through the optical path, so that the light beam is blocked along the optical path even when the valve is closed. A gate valve that is characterized by being able to proceed without any problems.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8817282U JPS58191533U (en) | 1982-06-15 | 1982-06-15 | Gate valve to shut off vacuum passage including optical path |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8817282U JPS58191533U (en) | 1982-06-15 | 1982-06-15 | Gate valve to shut off vacuum passage including optical path |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58191533U true JPS58191533U (en) | 1983-12-20 |
| JPH0522834Y2 JPH0522834Y2 (en) | 1993-06-11 |
Family
ID=30096859
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8817282U Granted JPS58191533U (en) | 1982-06-15 | 1982-06-15 | Gate valve to shut off vacuum passage including optical path |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58191533U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0444000A (en) * | 1990-06-11 | 1992-02-13 | Soltec:Kk | Radiant light transmission window |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4935475A (en) * | 1972-08-09 | 1974-04-02 | ||
| JPS5279325A (en) * | 1975-11-08 | 1977-07-04 | Leybold Heraeus Verwaltung | Oscillation slide valve |
| JPS5414018A (en) * | 1977-07-01 | 1979-02-01 | Kouenerugii Butsurigaku Kenkiy | Gate valve |
| JPS5686268A (en) * | 1979-11-24 | 1981-07-13 | Vat Ag | Full metallic slide valve for high vacuum device |
-
1982
- 1982-06-15 JP JP8817282U patent/JPS58191533U/en active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4935475A (en) * | 1972-08-09 | 1974-04-02 | ||
| JPS5279325A (en) * | 1975-11-08 | 1977-07-04 | Leybold Heraeus Verwaltung | Oscillation slide valve |
| JPS5414018A (en) * | 1977-07-01 | 1979-02-01 | Kouenerugii Butsurigaku Kenkiy | Gate valve |
| JPS5686268A (en) * | 1979-11-24 | 1981-07-13 | Vat Ag | Full metallic slide valve for high vacuum device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0444000A (en) * | 1990-06-11 | 1992-02-13 | Soltec:Kk | Radiant light transmission window |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0522834Y2 (en) | 1993-06-11 |
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