JPS58189385A - Manufacture of metallic plate having very small pore - Google Patents

Manufacture of metallic plate having very small pore

Info

Publication number
JPS58189385A
JPS58189385A JP7185382A JP7185382A JPS58189385A JP S58189385 A JPS58189385 A JP S58189385A JP 7185382 A JP7185382 A JP 7185382A JP 7185382 A JP7185382 A JP 7185382A JP S58189385 A JPS58189385 A JP S58189385A
Authority
JP
Japan
Prior art keywords
plate
wires
metal
wire
nozzle plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7185382A
Other languages
Japanese (ja)
Other versions
JPS6150156B2 (en
Inventor
Shigeru Nagai
永井 繁
Yasuo Kawabuchi
河渕 泰郎
Akira Kasuya
糟谷 明良
Shigeru Yamamoto
繁 山本
Yuuzou Kaniko
可児子 祐三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7185382A priority Critical patent/JPS58189385A/en
Publication of JPS58189385A publication Critical patent/JPS58189385A/en
Publication of JPS6150156B2 publication Critical patent/JPS6150156B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE:To make mass production of a metallic plate having very small pores with good accuracy, by disposing and fixing wire rods for forming the very small pores on a base plate of a dissimilar metal, electroforming a metallic ingot thereon, cutting the same in the direction at a right angle to the wire rods to form a plate-like material and melting away the wire rods. CONSTITUTION:A prescribed number of phosphor bronze wires 13 having the same outside diameter as the bore of the nozzle holes of a nozzle plate are arranged at a prescribed pitch on a stainless steel base plate 11, and are stuck by means of a plastic adhesive agent 14, thereby forming a material 10 to be electrodeposited. Said material 10 is put in an electrolytic cell, where an electroformed ingot 31 of Ni is deposited on the plate 11 and the wires 13 by electrodeposition. After the same is rinsed and dried, the material is cut to a rectangular parallel piped 32 which is further cut to a prescribed thickness (t) by machining in the direction at a right angle to the wires 13 by electrospark machining for wire cutting or the like to form a rectangular parallelepiped thereby forming a member 1a for nozzle plate. Such member 1a is subjected to finishing and is then immersed for about 10-30min at about 20-25 deg.C in a chemical polishing material of a copper alloy contg. hydrogen peroxide, to dissolve away the wires 13 and to form the pores, whereby the desired nozzle plate is produced.

Description

【発明の詳細な説明】 県)発明の技術分野 本発明は複数個の微小孔を有する金属板の製造方法に係
り、特に多数の微小孔を有する場合において、高精度で
量産に好適な製造方法の提供に関する。
[Detailed Description of the Invention] Technical Field of the Invention The present invention relates to a method for manufacturing a metal plate having a plurality of microscopic holes, and particularly in the case of having a large number of microscopic holes, the manufacturing method is highly accurate and suitable for mass production. Regarding the provision of

(′b)従来の技術と問題点 最近無音プリンタの1つとして、インクジェットプリン
タ、特にドロップオンデマンド方式のインクジェットプ
リンタが盛に開発、Ij!用化されている。
('b) Conventional technology and problems Recently, inkjet printers, especially drop-on-demand type inkjet printers, have been actively developed as one of the silent printers. It is put to practical use.

コノ方式のインクジェットヘッドには例えば直径0.0
5■、深さ0.2− 程度の孔を一定間隔で多数個配設
した金属薄板をインク吐出部に固定し、インクノズル板
として使用するのが一般的である。
For example, the Kono type inkjet head has a diameter of 0.0
Generally, a thin metal plate in which a number of holes of about 5 mm and depth of 0.2 mm are arranged at regular intervals is fixed to the ink ejection section and used as an ink nozzle plate.

上記微小孔の加工法については、従来から放電加工法、
マイクロドリル法、或いはレーザービーム法などがある
Conventionally, the methods for machining the above-mentioned microholes include electrical discharge machining,
Examples include the micro-drill method and the laser beam method.

放電加工法においては、放電電極に使う金属細線が曲り
易くその安定保持が難しいので1寸法のバフツキが多い
上に、孔内の面が粗く、量産性も低いという欠点がある
In the electrical discharge machining method, the fine metal wire used for the discharge electrode is easily bent and it is difficult to maintain it stably, so there is a lot of buffing in one dimension, and the inside surface of the hole is rough, making it difficult to mass-produce.

マイクロドリル法では、トリμ直径が小さいのの照射部
を溶解して加工するので、孔内の表面の凹凸が多く、又
孔断面の形が不揃いになり易い欠点がある、 以上の様に従来の微小孔加工法にはそれぞれの欠截があ
り特に精度と量産性に問題があった。
In the micro-drill method, the irradiated part of the hole having a small diameter is melted and processed, so there are many irregularities on the surface inside the hole, and the cross-sectional shape of the hole tends to be irregular. Each of the microhole machining methods had its own shortcomings, especially in terms of accuracy and mass production.

(・)兄明の目的 本発明は前述の点に鑑みなされたもので、電鋳法を用い
て、微小孔を成形することにより、l16M笈で電量に
好適なl11!遣方法を提供することを目的としたもの
である。
(・) Purpose of the present invention was made in view of the above-mentioned points, and by forming micropores using an electroforming method, a l11! The purpose is to provide a method for sending information.

(1(発明の構成 上記の目的を達成するために、本発明は鎖車孔径と)ム
j−の外形の線材を、該線材とは異なる材質の斂属基板
上に所定の位置を保って配役固定し、電膚法によって該
線材と金属基板を一体に電鋳しその電鋳金属塊を線材と
直角の方向に切断して所だ厚さの板状となし、然かる後
かかる金属板の内部の線材を除去することにより所望の
微小孔を当該金属板に形成するようにしたことを特徴と
するものである。
(1) (Constitution of the Invention In order to achieve the above object, the present invention provides a wire rod having a diameter of a chain wheel hole and an outer shape of 0.5 mm, held in a predetermined position on a mating substrate made of a material different from that of the wire rod. The wire rod and metal substrate are fixed in place, electroformed together using the electrode method, the electroformed metal block is cut in a direction perpendicular to the wire rod to form a plate of a certain thickness, and then the metal plate is cut. The metal plate is characterized in that a desired microhole is formed in the metal plate by removing the wire inside the metal plate.

(θ)発明の実施例 以F本発明の好ましい実施例につき、図面を参Nして説
明する。
(θ) Preferred embodiments of the invention will now be described with reference to the drawings.

第1図は前記インクジェットヘッドのインクノズル板l
の一例を概念的に示す斜視図で、該ノズル板は厚さtの
金属薄板2にニア個の内径dの孔3をピッチpで一列に
配設している。これ等の寸法の一例を挙げると、T、 
x 0.2 m 、α=0.05閣、p=0.4瞳であ
る。
Figure 1 shows the ink nozzle plate l of the inkjet head.
This is a perspective view conceptually showing an example of the nozzle plate, in which a near number of holes 3 having an inner diameter d are arranged in a row at a pitch p in a thin metal plate 2 having a thickness t. Examples of these dimensions are T,
x 0.2 m, α=0.05 pupil, p=0.4 pupil.

第2図〜第7図は、本発明による前記ノズル板l用の多
数の微小孔を有する金属板の製作工程を工程順に従って
示す概念的な略示図および斜視図である。
FIGS. 2 to 7 are conceptual schematic diagrams and perspective views illustrating the manufacturing process of a metal plate having a large number of microholes for the nozzle plate 1 according to the present invention in accordance with the process order.

先ず第2図のf#+硯図で示すように、ステンレス綱(
Su8804)の基板11の上に前記ノズル板1のノズ
ル孔8の内径dと同一の外形寸法でかつノズル孔8の個
数と同数の燐青銅線18′tノズル孔3のピッチpと同
一ピッチで配列してからアラルダイトなどの合成樹脂接
着剤14を用いて固着し、被電着物lOを形成する。
First, as shown in the f# + inkstone diagram in Figure 2, stainless steel (
On the substrate 11 of Su8804), phosphor bronze wires 18't having the same external dimensions as the inner diameter d of the nozzle holes 8 of the nozzle plate 1 and the same number as the number of nozzle holes 8, and the same pitch as the pitch p of the nozzle holes 3 are placed. After arranging them, they are fixed using a synthetic resin adhesive 14 such as Araldite to form an electrodeposited object IO.

人かこ一雇の11!処理工程に移る。すなわち金属基板
11と寛鋳塊31(第5図参照)とけ十分に密唐ζごる
為に十分な浄化処理が必要で、本実施例の場合、脱脂液
として水酸化ナトリウム309r、/(2゜仄酸ナトリ
ウム309 r/’l 、硅酸ナトリウム209r//
!。
11 with only one person! Move on to the processing step. In other words, a sufficient purification treatment is required to ensure that the metal substrate 11 and the ingot 31 (see Fig. 5) melt together in a sufficiently dense manner.In the case of this embodiment, sodium hydroxide 309r,゜Sodium peroxide 309 r/'l, sodium silicate 209 r//
! .

W4i活性剤19r、/1(7)混合液を用イテ70°
(:、lO分間脱脂の後、水洗、酸処理、水洗の諸工程
を紅でニツケルストライクメッキヲ施す。
Use W4i activator 19r,/1(7) mixture at 70°
(After degreasing for 10 minutes, the process of washing with water, acid treatment, and washing with water is performed with red nickel strike plating.

欠に第31Aの略示回および第4図の斜視図に示すよう
に、8jJ処理を終った被電着物IOを陰極ハノガー2
2に固定し、同時に電着の厚さの不均一にす定さ1する
t鋳塊の厚さの2〜3倍が適当である。−・方wLMし
ようとする金属、この場合には二ノゲルの曽属塊會陽極
24とし、直流電源25に恢枕する。
As shown in the schematic diagram of No. 31A and the perspective view of FIG.
2 and at the same time to make the thickness of the electrodeposition non-uniform, it is appropriate to set the thickness to 1 to 2 to 3 times the thickness of the ingot. The anode 24 is made of the metal to be LMed, in this case Ninogel, and is connected to the DC power supply 25.

この実施例の場合のメッキ液の組成と電着条件eユ第1
表の通りである。
The composition of the plating solution and the electrodeposition conditions in this example
As shown in the table.

第1表 前記の電着により第5図に示すように基板11の上に析
出したニッケル電鋳塊81t−水洗乾燥後、切削加工に
より第6図のような直方体32に加工し、更に第7図に
示すようにワイヤカット放電加工等により厚さtに切断
して、ノズル板l用の部材1at得る。
Table 1: 81t of electroformed nickel ingots deposited on the substrate 11 by the electrodeposition described above as shown in FIG. As shown in the figure, a member 1at for the nozzle plate 1 is obtained by cutting to a thickness t by wire cut electrical discharge machining or the like.

これをフッピング加工により所定の寸法と面粗さに仕上
げ、過酸化水素を含有した銅合金化学研磨剤に20〜2
5℃にて10〜80分間浸漬して、埋めこまれた燐青銅
線18を溶解除去して孔とすれば、ノス′ル板lが完成
する。
This was finished to the specified dimensions and surface roughness by flapping processing, and then coated with a copper alloy chemical polishing agent containing hydrogen peroxide for 20 to 2 hours.
The nozzle plate 1 is completed by dipping at 5 DEG C. for 10 to 80 minutes to dissolve and remove the embedded phosphor bronze wire 18 to form a hole.

以上に説明した工程は実施例の一例であって、線材18
の材質は燐青銅合金に限らず、金属基板11の材質との
組み合わせで、最後のノズル板用部材1aより線材のみ
が化学的に溶解できるような組合わせであれば、何でも
よい。更に燐青銅線18は合成樹脂線例えばナイロン線
でもよい。この壕にはノズル板用部材1aより線材を除
去するには、電気炉で加熱するだけでよく、例えばナイ
ロン#11を使用する場合は、電気炉内で800’D、
80分加熱すれば十分である。
The process described above is an example of an embodiment, and the wire rod 18
The material is not limited to phosphor bronze alloy, but any material may be used as long as it is combined with the material of the metal substrate 11 so that only the wire can be chemically dissolved from the last nozzle plate member 1a. Furthermore, the phosphor bronze wire 18 may be a synthetic resin wire, for example a nylon wire. To remove the wire from the nozzle plate member 1a in this groove, it is only necessary to heat it in an electric furnace. For example, when using nylon #11, 80'D
Heating for 80 minutes is sufficient.

尚、iiI紀の実施例の最初の工程の燐青銅線13を金
属基板11に固定する方法について述べる。
The method of fixing the phosphor bronze wire 13 to the metal substrate 11, which is the first step in the third embodiment, will now be described.

第8図に示す方法は金属基板を2板合わせて図には示し
ていないチャックで小形捲線機に収りつけ、χ−Xを軸
として回転し、燐青銅線18を所定ピッチpで捲取った
後、合成樹脂接着剤14を点綴で示し九位[14aに堕
布する方法である。この方法は図より想像し得るように
量産性の優れた方法で容易に多数個数りに拡張できる、
第9図に示す方法は、ノズル孔8のピッチpの精度が厳
しく要求される場合、治具41の両端部に高い精度でピ
ッチpのガイド溝42を設け、これを案内として燐青銅
線18を展張したもので、金属基板11は、この線と治
具41の間Aに挿入され、該燐青銅線113ft接着剤
14で金属基板と11に固定し念後、治具41より切り
離す。従ってこの場合治具は反覆して使用できる。
The method shown in FIG. 8 is to fit two metal substrates together and fit them into a small winding machine using a chuck (not shown), and rotate the machine around χ-X to wind up the phosphor bronze wire 18 at a predetermined pitch p. After that, the synthetic resin adhesive 14 is dotted and applied to the ninth position [14a]. As you can imagine from the figure, this method is excellent in mass production and can be easily expanded to a large number of pieces.
In the method shown in FIG. 9, when the precision of the pitch p of the nozzle holes 8 is strictly required, guide grooves 42 with a pitch p are provided at both ends of the jig 41 with high precision, and the phosphor bronze wire 18 is The metal substrate 11 is inserted into the space A between this wire and the jig 41, and the phosphor bronze wire 113ft is fixed to the metal substrate 11 with an adhesive 14, and then separated from the jig 41. Therefore, in this case, the jig can be used repeatedly.

ノズル板lのノズル孔8が2列に配列されている場合は
、金属基板11の厚さを、両孔列間の寸法と同一とし、
燐青銅線18を基板の両面に固定して前記の工程に従え
ばよい。ノズル孔8が3列1以上の場合には、燐青銅線
を空間に治具を用いて所定相対位置に展張すれば容易に
目的を達することができる。
When the nozzle holes 8 of the nozzle plate 1 are arranged in two rows, the thickness of the metal substrate 11 is the same as the dimension between both hole rows,
The phosphor bronze wires 18 may be fixed to both sides of the substrate and the process described above may be followed. When the nozzle holes 8 are arranged in three rows or more, the purpose can be easily achieved by stretching the phosphor bronze wire in the space at a predetermined relative position using a jig.

以上の説明では線の材質例として燐青銅St−採りあげ
ているが、他の種類の金属線あるいは合成樹脂線でもよ
い。
In the above description, phosphor bronze St- is used as an example of the wire material, but other types of metal wires or synthetic resin wires may be used.

これ迄は、専らインクジェットヘッドのインク吐出ノズ
ル板の製作方法を例として説明してきた〃・、本宛1は
他の用途に使用される、飯小孔を有5°る金属板の製作
にひろく適用できる。
Up to this point, we have mainly explained the manufacturing method of the ink ejection nozzle plate of an inkjet head as an example.This article is also applicable to the manufacturing of metal plates with 5° holes that are used for other purposes. Applicable.

(↑’I  +e明の効果 微小孔例えば0.05u程度の孔を有する金属板全知+
lr6に6たり、本発明′に通用すれば従来の加工i−
,fム一こ比べ、逸かに高い精度で、内面の滑かな高品
買の微小孔を加工することができる上に、該加工り法は
又極めて量産性に冨み、高い歩留りを与んI足側を低減
させるという幼果かりる。
(↑'I + e Light effect: A metal plate with micro holes, for example, about 0.05 u omniscient +
If it is applicable to lr6 or the present invention, conventional processing i-
In addition to being able to machine high-quality micro-holes with smooth inner surfaces with much higher precision than other machines, this processing method is also extremely suitable for mass production and provides high yields. It is a young fruit that reduces the foot side.

【図面の簡単な説明】[Brief explanation of drawings]

−A1図はイ/クシエノトフ′リノグにおけるイノ2吐
出部のノズル板を示す斜視図、第2図〜第7凶シーよ+
発明vl簀施例に基づく工程を工程11′@に示しr’
cもので、第2凶は被″#を盾部の斜視図、第3図は電
7#稜盾の略月く図、第4図は陰極の構成を示す祠悦図
、第す図は電着完了後の鋳塊、第6図は切削加工にまり
鋳塊より切り出した長り形のノズル板;」材を下す!=
I+M、図、第7図はノズル板用部材のvJ断の状況を
示す斜視図である。第8図と第9図はtA青青銅全全金
属基板固定する方法についての変形例を示す斜視図でお
る。図において、lはツメ′ル板、iaは7式′p板用
W、材、8はノズル孔、10は被[盾部分の組立、11
は金属基板、12は陰極ハンガーへの取付は用孔、I8
は燐ilv銅線、14は固定用合成耐脂、21はメッキ
槽、22は陰極ハンガー、23は電着遮蔽板、24は電
着せんとする金属よりなる陽極、25は電層用電源、2
6は絶縁被覆層、31は電着された鋳塊、32は長方体
、41は治具、42はピッチのガイド溝をそれぞれ示す
。 第8図 第9図
-Figure A1 is a perspective view showing the nozzle plate of the Ino2 discharge part in the I/Kushienotof'rinog, Figures 2 to 7
The process based on the embodiment of the invention is shown in step 11'@r'
The second figure is a perspective view of the shield part, the third figure is a schematic diagram of the 7# ridge shield, the fourth figure is a diagram showing the configuration of the cathode, and the second figure is a perspective view of the shield part. The ingot after electrodeposition is completed. Figure 6 shows the long nozzle plate cut out from the ingot after being cut. =
FIG. 7 is a perspective view showing the vJ section of the nozzle plate member. FIGS. 8 and 9 are perspective views showing a modification of the method for fixing the tA bronze all-metal board. In the figure, l is the claw plate, ia is the type 7'p plate W, material, 8 is the nozzle hole, 10 is the assembly of the shield part, 11
is a metal board, 12 is a hole for attaching to a cathode hanger, I8 is
14 is a synthetic grease-resistant fixing wire, 21 is a plating bath, 22 is a cathode hanger, 23 is an electrodeposition shielding plate, 24 is an anode made of the metal to be electrodeposited, 25 is a power source for the electrodeposition, 2
Reference numeral 6 indicates an insulating coating layer, 31 an electrodeposited ingot, 32 a rectangular parallelepiped, 41 a jig, and 42 a pitch guide groove. Figure 8 Figure 9

Claims (1)

【特許請求の範囲】[Claims] 罎小孔を有する金属板の製作において、f!1小孔の内
径と同一の外形を有する線材を、該線材の材質とは真な
る材質の金属基板に所定の位置を保って配設固定し、次
いで前記線材の材質とは異なる材質の金属を基板上に厚
く電着してその電鋳金属塊により611記線材と金属基
板を一体となし、次いで該電鋳金属塊を線材と直角方向
に所定の寸法に板状に切断し、次いで切断により形成さ
れた金属作方法。
In the production of metal plates with small holes, f! 1. A wire rod having the same outer diameter as the inner diameter of a small hole is placed and fixed in a predetermined position on a metal substrate made of a material different from that of the wire rod, and then a metal made of a material different from the material of the wire rod is placed and fixed. The wire rod No. 611 and the metal substrate are integrated by thick electrodeposition on the substrate and the electroformed metal lump is then cut into a plate shape with a predetermined size in the direction perpendicular to the wire rod, and then by cutting. Formed metal making method.
JP7185382A 1982-04-28 1982-04-28 Manufacture of metallic plate having very small pore Granted JPS58189385A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7185382A JPS58189385A (en) 1982-04-28 1982-04-28 Manufacture of metallic plate having very small pore

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7185382A JPS58189385A (en) 1982-04-28 1982-04-28 Manufacture of metallic plate having very small pore

Publications (2)

Publication Number Publication Date
JPS58189385A true JPS58189385A (en) 1983-11-05
JPS6150156B2 JPS6150156B2 (en) 1986-11-01

Family

ID=13472505

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7185382A Granted JPS58189385A (en) 1982-04-28 1982-04-28 Manufacture of metallic plate having very small pore

Country Status (1)

Country Link
JP (1) JPS58189385A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2579472Y2 (en) * 1993-11-12 1998-08-27 セイレイ工業株式会社 Swiveling excavator

Also Published As

Publication number Publication date
JPS6150156B2 (en) 1986-11-01

Similar Documents

Publication Publication Date Title
JP4744790B2 (en) Deposition mask, deposition mask frame assembly, and manufacturing method thereof
US3853714A (en) Process for electroforming microparts having hollow interiors
US4343684A (en) Method of electroforming and product
EP0222528A1 (en) Electroforming process
US3574075A (en) Method of producing an electrode for use in electro machining
JPS58189385A (en) Manufacture of metallic plate having very small pore
JPH0665779A (en) Method for electrodepositing metal
JP2529512B2 (en) Method for manufacturing porous mold by electroforming
US2846378A (en) Electrode and its manufacture
US5385660A (en) Dendritic growth assisted electroform separation
US20090277794A1 (en) Dimensional control in electroforms
US7097754B2 (en) Continuous electroforming process to form a strip for battery electrodes and a mandrel to be used in said electroforming process
JP3779145B2 (en) Manufacturing method of high-precision sleeve having gap in bus-line direction
JP3724364B2 (en) Manufacturing method of metal products
JP2002097591A (en) Method for manufacturing metal powder
JP2716324B2 (en) Method for manufacturing porous mold by electroforming
JP2009101441A (en) Electrocast carrier and method of manufacturing the same
JP2003340648A (en) Electrochemical machining electrode and dynamic pressure bearing manufactured using the electrode
US20240030583A1 (en) Electrochemical method for fabrication of high-purity, high-conductivity corrugated waveguides
JPH0688285A (en) Electrodeposition method of metal
JP4342066B2 (en) Core wire holder
KR101906782B1 (en) Method for manufacturing beauty file
JP4357061B2 (en) Porous metal cylinder used for electroforming
JPS5842784A (en) Formation of micro-holes and core wire rods used for said
JP2962662B2 (en) Method for producing electroformed body having micro holes