JPS58186105A - 強誘電体薄膜素子 - Google Patents
強誘電体薄膜素子Info
- Publication number
- JPS58186105A JPS58186105A JP57070047A JP7004782A JPS58186105A JP S58186105 A JPS58186105 A JP S58186105A JP 57070047 A JP57070047 A JP 57070047A JP 7004782 A JP7004782 A JP 7004782A JP S58186105 A JPS58186105 A JP S58186105A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- ferrodielectric
- single crystal
- ferroelectric
- lead titanate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 11
- 239000013078 crystal Substances 0.000 claims description 23
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 claims description 12
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 5
- 239000000395 magnesium oxide Substances 0.000 claims description 4
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 description 13
- 229910052573 porcelain Inorganic materials 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000002003 electron diffraction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Inorganic Insulating Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57070047A JPS58186105A (ja) | 1982-04-26 | 1982-04-26 | 強誘電体薄膜素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57070047A JPS58186105A (ja) | 1982-04-26 | 1982-04-26 | 強誘電体薄膜素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58186105A true JPS58186105A (ja) | 1983-10-31 |
| JPH0311487B2 JPH0311487B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-02-18 |
Family
ID=13420260
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57070047A Granted JPS58186105A (ja) | 1982-04-26 | 1982-04-26 | 強誘電体薄膜素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58186105A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6083387A (ja) * | 1983-10-14 | 1985-05-11 | Hitachi Ltd | アレー圧電変換器 |
| JPS61274342A (ja) * | 1985-05-29 | 1986-12-04 | Ube Ind Ltd | 強誘電体素子およびその製造法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56138813A (en) * | 1980-03-31 | 1981-10-29 | Fujitsu Ltd | Method of forming lead titanate thin film |
-
1982
- 1982-04-26 JP JP57070047A patent/JPS58186105A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56138813A (en) * | 1980-03-31 | 1981-10-29 | Fujitsu Ltd | Method of forming lead titanate thin film |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6083387A (ja) * | 1983-10-14 | 1985-05-11 | Hitachi Ltd | アレー圧電変換器 |
| JPS61274342A (ja) * | 1985-05-29 | 1986-12-04 | Ube Ind Ltd | 強誘電体素子およびその製造法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0311487B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-02-18 |
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