JPS58184763U

JPS58184763U - Parallel plate electrostatic analyzer with added ion source function

Info

Publication number: JPS58184763U
Application number: JP8282482U
Authority: JP
Inventors: 正敏安武
Original assignee: セイコーインスツルメンツ株式会社
Priority date: 1982-06-03
Filing date: 1982-06-03
Publication date: 1983-12-08

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of the drawing]

第１図および第２図はこの種装置の構成を示すための構
成図、第３図はこの考案による静電アナライザを示す斜
面図、第４図は第３図のＪ−Ｊ’線による断面図、第５
図は第３図のＩ−１′線による断面図である。 ■・・・・・・ターゲット、■・・・・・・試料、■・
・・・・・平台平板型静電アナライザ、■・・・・・・
四重極質量分析計、■・・・・・・二次イオン入射アパ
ーチャー、■、■・・・・・・平行平板電極、■・・・
・・・二次イオン出射アパーチャー、■・・・・・・イ
オン収束電極、［有］・・・・・・イオン収束電極、０
．＠・・・・・・電磁石、［相］・・・・・・電子入射
穴、■・・・・・・電子トラップである。Figures 1 and 2 are block diagrams showing the configuration of this type of device, Figure 3 is a perspective view showing the electrostatic analyzer according to this invention, and Figure 4 is a cross section taken along line J-J' in Figure 3. Figure, 5th
The figure is a sectional view taken along line I-1' in FIG. 3. ■・・・Target, ■・・・Sample, ■・
・・・・・・Flat bed type electrostatic analyzer, ■・・・・・・
Quadrupole mass spectrometer, ■... Secondary ion incidence aperture, ■, ■... Parallel plate electrode, ■...
...Secondary ion exit aperture, ■...Ion focusing electrode, [Yes]...Ion focusing electrode, 0
．． @... Electromagnet, [phase]... Electron incidence hole, ■... Electron trap.

Claims

[Scope of utility model registration request]

A parallel plate type electrostatic analyzer installed in an analysis chamber body having a certain volume, a sample installed adjacent to this parallel plate type electrostatic analyzer, and an analysis chamber for generating ions to be irradiated to the sample. an ion source attached to the upper part of the body;
A quadrupole mass spectrometer for inputting secondary ions emitted from the parallel plate electrostatic analyzer, and an electron generation source provided on the side of the parallel plate electrostatic analyzer, A parallel plate electrostatic analyzer with an added function of an ion source, characterized in that it is configured so that electrons are incident from a direction different from the direction in which ions pass.