JPS58184115A - Phase difference microscope - Google Patents

Abstract

PURPOSE:To resolve the trouble of replacement of an object lens unit incorporating a phase plate, by providing a transmission type electrochromic device instead of an absorbing film on the phase plate. CONSTITUTION:An absorbing film 33 consisting of an electrochromic device (ECD) is formed on a phase film 32 on a glass substrate 31, and a variable driving means 34 is provided. Since the transmittivity of the absorbing film 33 of the phase plate is changed by varying the applied voltage, the trouble of replacement of the object lens unit incorporating the phase plate is resolved.

Description

[Detailed description of the invention] The present invention focuses on phase difference mold.

As shown in Figure 1, the 4t1 runner wM Minato was Motoshin Kamei (
1) ct), j: vCIL* Jt't j/a 1
1 J6 h b id m Rase b A phase plate with I & convergence (3) is inserted to change the phase angle (2) and the strong axillary of this 1st tangent to change the contrast of the image. . (
In some cases, the transparent substrate (1) may also serve as a lens. ) A phase difference objective lens incorporating a phase plate is
Depending on the type of phase film, it is roughly divided into K for light contrast (dark field) and K for dark contrast (bright field).
Aw), I A %, (Memum), 7% C
Hlgh) It is divided into two parts, and objective lens units corresponding to these are prepared. For example, as a 10X dark contrast objective lens, DL (
Dark: *7) Last 1. Low), DM, DH
That's why there are so many types.

Check it out! skin σ, versus A18 depending on the amount of phase difference of the specimen
I select and use the 1V unit TA.

If I make the wrong choice, things that should look dark may end up looking bright. I'm struggling with how to adjust the amount of phase difference within the sample, but is it a pigeon? 14 horns 7 and 4
There is a very good reason why the required amount to be prepared is 69 and the phase difference amount tl1m is 1 which is pushed into the preparedness ratio.

Therefore, one object of the present invention is to provide an objective raise unit that incorporates and incorporates 11 phase plates in accordance with the amount of phase difference of the sample.
Tonioru who replaces & eliminates @.

Therefore, the present invention uses K, 4-type electrochrominography device (
(hereinafter abbreviated as F%kCD). I! Make it moldy.

Since hcD can be colored and decolored with low driving voltage and power consumption, it is being actively researched as a substitute for the present crystal-carrying crystals. The present invention is an E.O.
Among D, the one with the highest transmittance is to be used as a filter. Advance/retreat ggcp can be determined by adjusting the magnitude of the voltage applied between the electrodes.
can be changed. (21-Waku. If, - Collection L
/J kL If the IFF imaginary reduction is not the best in OD, then the hODf module 1-1 of the story is also good. This overgrowth
t'L;L)'s preferred pumpkin is Mufutsu transparent electric pigeon, (B) Ton7c chromogenic gOfi-1 (0) transparent ion →
The electric layer consists of (L) a photochromic A Cf- and a (Kon opposing transparent electrode layer).

(Xiong, (E) turtle am toshi'ta, Nesa (#31103
), ITO (51j11 extreme 8n on indium oxide)
(O1 is mixed in, so the brightness is good), dundium oxide (1110B), iodide steel, tray, aluminum, badge 9, aluminum, oxidized resin, etc. are used. A thickness of 0.01 to 0.5 μm is sufficient for the electrode layer.

- (B) As the reduction color-forming Be material for the layer, tungsten trioxide is preferable, including tungsten trioxide and molybdenum trifilament.

(0) The transparent ionic conductor of the layer contains a small amount of water and therefore exhibits ionic conductivity, such as tantalum halide oxide (LTkaOs), di,1 oxide (Nbzoh), zirconium oxide (zr1J2), Tetane oxide (τIQ
z >, oxidized haf 29m (jifol), oxidized (7)
Chromium (!aos), oxidized lens y (La, Oj), silicon oxide fi (1:'1 oa), fluoride zirconium, phosphorus zirconium, or water content is 1 ounce and 11 fat solid. It is convenient IL.

(C) The increase exists in the form of a sandwich between the (@ layer and (1 layer), but in the case of water- or ion-rich synthetic-fat solids, (
By using both a homogeneous layer and an adhesive layer of
Details are in the book No. ll311ll. In this case, the thickness of the 0 layer is approximately 0,1-5-iooυμ.

(3) It is preferable to use a non-masu electric body for the purpose of showing off the skin, and in this case, the thickness of Kti is 0, OO1
It is possible to make ~10μ chicken.

(D) Layer identification For color development, σ, 1-lydium hydride, 7-layer M-nickel, 9-ruthenium hydroxide, rhodicum hydroxide, chromium hydroxide, etc. are used, but especially water Preferred are iridine-2 and hydride-2. These water #1 Shichi directly go to g! Drifting ashore rAm 6
Therefore, I vapor-deposited the corresponding Buddha Tachibana T-odor, and in response to the request, I made a patter. Even if I say I want to hire C, I won't stop - it's a book.
1υwI is discouraged by applying an alternating current voltage to the atmosphere +1, and the water is removed.

<st layer and (D) 1 rhinoceros a% Tsutomi 001 to several μm are sufficient.

(N~(E)) The 9 layers are made of 6 layers of sweet, sour, 11 fat.

Next, the non-invention will be specifically explained with reference to the first page [Example].

Figure 1 shows a nine phase plate tm built into a conventional objective lens unit, where υ is a transparent substrate of glass (
In the case of lenses, 6)% (2) i is a phase film formed on (1), and (3) is further formed on (2), for example, the transmittance is 25 whispers (at 546) 4MK It is an absorbent membrane.

This phase plate a1 is placed at the focal point of the objective lens, and the image is delayed by λ/4 at this position, and the image is converged. 4) 156 I@21fga, maD applied voltage and transmittance This is a diagram of the relationship between applied voltage +1. av -a~-1
, 4V 1, the transmittance is 4s correspondingly.
It can be seen that it changes arbitrarily up to 62%.

Figure 3 is the diagram #4 of the phase value used in the embodiment of the invention, where 6 is 0υ, 4 is the glass substrate and phase film as described above, - is the same as in Figure 2. An absorbing film made of ECD with special characteristics is provided by the variable driving means of the ROD provided inside or outside the mirror. EOD can be used with a single piece of light attenuation that cannot be achieved continuously, or it can be used with an expensive absorbing film (transmittance unchanged). It is also possible to use a layer (A), (0) or (E) of OD grain material with a low thickness. ECD's @according to Lord and phase error (2)
and! It is also good to reverse the LL @ music part of t. On top of the ECD, there may be a transparent layer or glass layer.

Be careful here, f'L will not be a%EOL) It is possible that some of the pigeons in the middle will cause a phase difference, and which of the phases Ist 凇CD A, which is important for health and running. It may also be used as this layer (the layer is 8i0. in the (C) layer) or the homengi. 17t% IN exhibition-and GCU slaves-
In combination with 1, it is possible to provide several pairs of acupuncture rings on the substrate in a ring shape, and to select the size of the acupuncture ring to be used.

This phase plate is often incorporated into the objective circle, and this situation is shown in FIG. 4 as a tWh-direction view. The wheel is Revol I (KDD drive power supply fixed in the value),
- is the outer cylinder of the objective lens unit -σ] It is installed in F111 and rotates in contact with the nine resistors, maotg, predetermined cAT
Set the voltage at 1fffi to apply variable pressure. Electric (II
The helmet is installed at the outer edge of the mirror by +11%, in which case a manual electrode is installed on a part of the objective lens unit and νσ is ↓
Since it is possible to set the voltage like this, apply the voltage 01' to 11.0L while rotating the ring and the ECD
The solution is to change the transmittance of the VC to a free VC quality.

As described above, according to the present invention, by increasing the applied voltage it1, the absorption film of the phase plate can be made transparent to JL4, and if IIL1! ! Since the IjIt degree can be changed freely, it is possible to freely change the angle of the image and perform a uniform inspection of the specimen.

- Benefit from the advantages of ! 9 Phase plates with different transmittances t-M
If you prepare an objective lens and change it according to the specimen, it will be 1m11%.

4 A simple conclusion of evil Figure 1 shows a clear view of the phase plate of the company.

Figure 2 is a graph showing the characteristics of ROD.
FIG. 2 is a perspective view of a phase plate according to an embodiment of the present invention.

FIG. 4 is a portion #l1 of an objective lens incorporating a phase value according to an embodiment of the present invention.

[King 1! Part code between stations] 1, Sl...Transparent 2! ＆叡2.52... Phase error 5... Absorption film 53... 1 (CD 34... IECDllj'i drive means output person Hifukakuji Kogyo Co., Ltd. Daishioto Isobe Figure 1

Claims (1)

[Claims] In place of the absorption film on the phase value, a Liao-hyukou electrochromic device is provided, and 1! The 9th modification of the device was set up as a phase difference mirror.