JPS58182565A - Indicating device of inspection - Google Patents

Abstract

PURPOSE:To display a necessary additional operation and to indicate adequately to each number of operation automatically by reading information on the inspection procedure of an object to be inspected, etc., and making a decision on an inspected result. CONSTITUTION:When the bar code BCD of an optional inspection unit IU is read by an input device 20 by the intervention of an operator, a control processor 40 reads relative operation history information out of a storage device to detect uninspected operations and also select an operation to be done firstly, and further displays the contents of the corresponding inspection procedure on a display 11 in selection format through a display controller 16. The operator confirms it through the transparent panel 12 of a touch panel type tablet to perform input operation as reguired. The control processor 40 indicates the addition of an inspection procedure, etc., according to the input data. Thus, this device indicates adequately to each operation number operating different inspection.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an inspection work instruction device for instructing an operator on an appropriate inspection procedure in an inspection process that requires complicated lot processing.

For example, inspection work for semiconductor products that requires complex 1/β work procedures will require different answers depending on the product name, inspection items, or work history of the target lot (inspection lot). .

In addition, since this type of inspection work is often carried out by the sampling transverse strain method, it is based on the detailed results and the number of measurements per sample (number of points). The quality must be changed sequentially based on the estimated average quality.

Therefore, for this type of inspection work, accurate work instructions are strongly required from the viewpoint of improving work efficiency and preventing work errors.

For this reason, various inspection work result instruments have been developed and put into practice, and these can be roughly divided into those that use work instruction sheets, CII that uses only work procedures, and T (cathode ray tube).
There are two methods of instruction, one by display and one by voice output, but both require the number of saturations, the number of measurements per sample (score), and the unit of inspection work (the unit of inspection object determined by sampling, etc.). 1-!
The criteria for determining the processing (pass/fail, etc.) of a product (or a plurality of items to be inspected) are fixed in advance, are inflexible, and are not necessarily accurate.

In addition, in the instruction method using a work instruction sheet, the product name.

Since it is necessary to search for procedure charts created for each inspection item or work history, read the contents, and carry out only a part of the procedure, there is a problem that work efficiency is low and there are many errors in work.

In addition, with the instruction method using Cfl, T display, and voice output for only work procedures, depending on the judgment of the test results up to that point, it may be necessary to skip the display screen or listen to the voice instructions as appropriate, or it may be necessary to judge the test results. may have to be done by the worker himself.

1 - Therefore, if the work efficiency is low and abnormal data such as one of the measured data is far away from the other data is observed, if a judgment is made using that abnormal data, the There is a risk that the processing (pass/fail, etc.) of a unit of inspection work will be determined incorrectly, or that the results will differ greatly from the previous results, making it impossible to make a determination.

An object of the present invention is to eliminate the drawbacks of the prior art as described above, and to provide an inspection method that can provide appropriate instructions to each worker who performs different inspection tasks to improve work efficiency and prevent work errors. The objective is to provide a work instruction device.

The present invention is characterized by a storage device that stores inspection procedure information of the inspection target, work B history information of each inspection work unit, and other company information, and a human ability to read each selection identification information display given to each inspection work unit. a display device capable of displaying the inspection procedure information and work history information and inputting the results of inspection work performed based on the display of the unstarted inspection procedure information; According to the selection identification information of the inspection work unit, the relevant lateral strain procedure information and the relevant work history information are read from the storage device, the unstarted inspection procedure information of the relevant inspection unit is calculated and output to the display device, and the unstarted inspection procedure information of the relevant inspection work unit is By inputting the results of the calibration work performed based on the inspection procedure information into the display device, the work history information is updated and the test result is judged. If the results do not meet the judgment criteria, repeat the addition of the calibration procedure. and a control processing device for instructing, determining processing for the inspection task unit, and outputting it to the display device.

Embodiments of the present invention will be described below based on the drawings.

FIG. 1 is a block diagram of an embodiment of the inspection work instruction apparatus according to the present invention, and the second figure is a flowchart thereof.

Here, 10 is a display device, 11 is a display thereof (for example, a CRT display device), and 12 is a transparent panel panel 13 constituting a touch panel type tab V. Each end of the transparent panel 12 is connected to the display 11. The cantilever 14 has its other end fixed to the fixed part R()D in order to provide movable three-point support to the front surface. When pressure is applied to an arbitrary point, the pressure point and the cantilever 13
15 is an A/D converter that performs analog/digital (A/D) conversion of the detection output from each strain gauge 14, and 16 is Similarly, the display control device 20 that controls the display 11 uses human power to read the selected identification information display (for example, the printing of barcode BCI) attached to the inspection work unit IU itself or its container. Equipment (? Barcode reader), 3
0 is a storage device that stores inspection procedure information of the inspection target, work history information of each inspection work unit, and other company information (program information necessary for the operation of the inspection work instruction device, etc.);
40 is a control processing device. Note that the display device 10. A plurality of input devices 20 are provided corresponding to a plurality of transverse strain devices TST that perform specific inspections for each of a plurality of inspection work units IU, but in this figure, only one set is represented by 7. It is.

First, when a worker inserts the barcode BCI of an arbitrary inspection work unit IU from the input device 20, the control processing device 40 retrieves the work history information related to this from the storage device 30, and In addition to detecting inspection work,
Select the first task from among these, and then display the contents of the inspection procedure on the display 1 via the display control device 16.
1 is displayed in an option format.

The operator uses the transparent panel 12 of the touch panel tablet to follow the inspection procedures that are sequentially displayed on the screen of the display 11.
The inspection work will be carried out in accordance with the above.
The results are displayed by pressing the corresponding part of the above-mentioned option display on the transparent panel 12, and if it is necessary to enter numerical values such as the measurement data, press the numeric keypad-like part (for example, numbers 0 to 9). By sequentially pressing the display area),
The data is sent to the control processing device 4 via the A/D converter 15.
It is taken into 0.

The control processing device 40 has 1. The above-mentioned input data is identified, and in response to the input data, other different inspection procedure powerful instructions or processing (pass/fail, etc.) of the inspection work unit IU is displayed on the display 11. Further, each time the valley inspection work is completed, the storage device 30 is accessed to update the work history of the inspection target. By repeating this, the next work kr to be inspected on the mold can be carried out.

Next, an example of the control processing device of the control processing device 40 is
This will be explained in more detail based on the chart 70 in FIG.

First, all the measurement data taken into the control processing device 40 as measurement results regarding the inspection work unit IU are examined for their magnitude relationship, and the minimum value S and maximum value are determined (process 110 in FIG. 2). ), and further the average value M,
The standard deviation V is lengthened (pre-processing 120).

Next, calculate each deviation from the average value M for the minimum value S and the maximum value, set the larger value as the range IL (preprocessing 130), and calculate the value of the ratio between this and the above standard deviation V. Compare the size with the abnormal value judgment reference value G (same judgment 1)
40).

Here, the abnormal value determination reference value G is determined for each failure, tightening, and number of measurements (scores), and is stored in the storage device 30 and read out by the control processing device 40 as necessary. It is something.

As a result of the above judgment, the abnormal value judgment reference value G is the above ratio/V
If it is larger than , it means that there is no abnormality in each measurement data, so the range R2 average value M, standard deviation V
The processing of the inspection work unit IU stored in advance in the storage device 30 is read out for each value of
1 (pre-processing 150).

In addition, if the abnormal value judgment reference value G is less than or equal to the above ratio R/V, each measurement data is an abnormal value, so it is removed from the measurement data so as not to be used in subsequent judgment processing (same as above). After displaying on the display 11 an additional inspection work instruction to compensate for the lack of data (process 160), the process returns to process 110 described above (previous process 170).

By repeating the above process 2 judgment, the inspection work instruction can be repeatedly issued until the process of the inspection work unit IU is determined, and the desired inspection work can be completed.

In this way, the inspection procedure for each product type, inspection item, 2 tasks, and vaginal history is automatically displayed for each inspection work unit, and while checking the instructions and performing the inspection work, the specified part of the display screen is displayed automatically. The measurement results can be determined by touching the surface directly.

Judgment of measurement results and processing decisions for each inspection work unit are automatically, quickly and reliably performed by the control processing device, and the control processing device is also capable of issuing inspection work instructions for multiple inspection devices at the same time. It is economical because it can be done.

As described above in detail, according to the present invention, it is possible to realize an economical inspection work instruction device that gives accurate instructions for each number of different inspection tasks. In an inspection process that requires extensive lot processing (for example, a semiconductor horizontal placement process), significant effects can be obtained in improving the efficiency of the inspection work, improving reliability, and improving economic efficiency.

[Brief explanation of drawings]

FIG. 1 is a block diagram of an embodiment of an inspection work instruction device according to the present invention, and FIG. 2 is a flowchart thereof. 10...Display device, 11...Display, 12.
...Transparent panel, 13...Canchin bar, 14...
Strain gauge, 15... A/D converter, 16...
・Dispenser control device, 20...input device, 30・
...Storage device, 40...Control processing device. Agent Patent attorney Kosaku Fukuda (and 1 other person) Hana I U No. 22

Claims (1)

[Claims] 1. A storage device for storing inspection procedure information of the inspection object and work history sentiment and other proprietary information for each inspection work unit, an input device for reading the selection identification information display given to each inspection work unit, and the above-mentioned inspection. A display device capable of displaying procedure information and work history information and inputting the results of inspection work performed based on the display of the unstarted inspection procedure information, and selection of an inspection work unit read by the input device. Reads the inspection procedure information and the work information from the storage device according to the identification information, calculates the unstarted inspection procedure information of the inspection work unit and outputs it to the display device, and based on the unstarted inspection procedure information By inputting the inspection work results to the display device, the work history information is updated and the inspection work results are judged. If the inspection results do not meet the criteria, an instruction is given to repeat the addition of the inspection procedure 2. An inspection work instruction device comprising: a control processing device that determines a treatment for each work unit and outputs the determined treatment to the display device.