JPH03239316A - Method and apparatus for confirmation of operation - Google Patents

Abstract

PURPOSE:To eliminate an erroneous operation with reference to a product and to prevent a defective product from being produced by a method wherein a bar code on a document which has been conveyed together with a product to be operated is read out by using a bar-code reader and information which specifies an operation corresponding to it is displayed. CONSTITUTION:A bar code which prescribes an operation is written on a document 10; bar-code readers 6a to 6n and indicators 7a to 7n are installed at arrangement positions of individual operation facilities 2a to 2n. The bar code on the document 10 is read out by using the bar-code readers 6a to 6n; information which specifies an operation corresponding to the read-out bar code is displayed on the indicators 7a to 7n; the operation of a product 3, to be operated, which has been conveyed together with the document 10 is confirmed by its display content. Thereby, a misjudgment by erroneously reading the document is eliminated, and it is possible to prevent a defective product from being produced.

Description

[Detailed Description of the Invention] [Industrial Field of Application] The present invention relates to a method for checking work in the production process of products such as semiconductor products that are produced by successively undergoing processing in various devices, and a method for use in the implementation thereof. related to a device for

[Conventional technology]

In the manufacturing process of semiconductor products, processes such as oxidation, photolithography, diffusion epitaxial growth, and ion implantation are performed one after another or repeatedly. In order to carry out these treatments, raw materials or semi-finished products are moved between processing devices or work facilities.

For this reason, in order to avoid processing under incorrect conditions, semi-finished products, etc. are moved together with information that identifies them and documents (work instructions 3) that describe the work such as processing details. . Workers at each work facility check the work instructions sent to them against the items, confirm that the items and work instructions correspond, and then carry out the work described in the work instructions. We are planning to do so.

[The invention tries to solve i! l! Problem] If workers are inattentive, they may make incorrect decisions due to misreading of work instructions. If a misjudgment is made, the wrong work will be performed on the article, resulting in the production of defective products.

The present invention has been made in view of such problems, and includes a bar code that specifies the work written on documents such as work instructions, and a bar code that is installed at the location of each work equipment.
A method of confirming work that is read by the league and displays information identifying the work on a similarly installed display to ensure verification and to prevent problems due to mismatching of goods and work. The purpose is to provide equipment for implementing the same.

[Means to solve the problem]

In the work confirmation method according to the present invention, information for identifying the work is written in documents such as work instructions using barcodes, and barcode readers and indicators are installed at the locations of each work equipment, A barcode reader reads the barcode of a document sent with an item, and information identifying the corresponding work is displayed on a display.

Further, the confirmation device according to the present invention includes a barcode storage section that stores information for identifying work and a barcode corresponding thereto, and the above-mentioned barcode reader and display, and includes the barcode reader and display device described above. Information specifying the workpiece corresponding to the barcode read from the barcode is retrieved from the barcode storage section and displayed on the display.

[Effect]

The worker uses a barcode reader to read the barcode (1) sent to the work equipment he is in charge of. Then, information specifying the work corresponding to that barcode is read from the barcode storage section and displayed on the display. Therefore, the work can be confirmed not only on documents but also on the display.

〔Example〕

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below with reference to drawings showing embodiments thereof. FIG. 1 is a schematic diagram showing the overall configuration of a work confirmation device according to the present invention. In l'a, 1 is a computer, which has various information about the workpiece 3 to be sent to the work equipment 2a+2b+...2n, and the barcode storage unit 1a provided as its memory contains information about the work equipment 2a+2b+...2n. 2a+
Information specifying the work at 2b+...2n and the corresponding barcode are stored in association with each other. Terminals a4a, 4b, . . . 4n are installed at the positions of the respective work equipment 2a+ 2b+ . . . 2n. These terminals 4a, 4b, . . . 4n are configured using personal computers, and have interfaces 5a, 5b, . , CRT displays 7a, 7b, . . . 7n.

Further, part or all of the terminal device is equipped with an input section 8 consisting of a keyboard and a printer 9. In this embodiment, it is provided only in the terminal 4a. The input unit 8 and the printer 9 are used to issue documents 10 such as work instructions that describe the information to specify the workpiece 3 and the work contents of each work equipment. This information or this input is sent to the computer 1, and the accumulated information sent from there is printed out on a document loaded in the printer 9.

In addition, the information on the work content inputted from the input section 8 is sent to the computer 1, and the computer 1 receives the barcode storage section 1a.
Access the corresponding barcode on terminal 4a.
The interface 5a that receives this prints it out in the form of a bar code on the printer 9's loaded document.

The barcode for @neck may be written on the terminal side as described above, but it may also be written on the computer 1 side. In this case, the input section 8. It is not necessary to provide a printer 9. Furthermore, a sticker containing a barcode prepared separately from other information written on the three cheeks may be attached.

Note that the input section 8 may be provided in all the terminals so that production management information, that is, the workpieces, their number, the time required for the work, the name of the worker, etc., can be input to the computer 1.

Document 1 with the above information and barcode written on it
0 is the work equipment 2a together with the corresponding workpiece 3.

2b, . Read.The read signal is from the interface 5.
8 etc., and from here it is sent to the computer 1, and the computer 1 accesses the barcode storage unit 1a to search for information specifying the corresponding work based on the read barcode, and sends this to the interface 58 etc. return. The interface 58 etc. provides this to the display 7a etc. for display.

The operator can read the information displayed on the display 78, etc., as well as the
The suitability of the combination of the work and the workpiece 3 is determined by comparing the confirmation with the workpiece 3, and if the combination is correct, this work is performed.

〔Effect of the invention〕

As described above, the present invention can display the work specific information, which is the main information written in the document IO, on the display and check it with the workpiece, thereby eliminating misjudgment due to misreading of the document. This will prevent the occurrence of defective products. Even when a document is dirty and the written contents cannot be determined, or there is a misreading, the correct work can be determined from the barcode.

[Brief explanation of drawings]

FIG. 1 is a model of the device of the present invention (FIG. 2 is a flowchart schematically showing its operation. 1. Computer (a. Barcode storage unit 6a)
, 6b...6n...Barcode reader 7a, 7
b...7n...Display device In the figures, the same reference numerals indicate the same or equivalent parts.

Claims (2)

[Claims] (1) In a production process in which a workpiece and a document containing information identifying the workpiece and information on the work to be performed on the workpiece are sequentially sent to multiple work equipment, the document is A barcode that specifies the work is written down, a barcode reader and a display are installed at the location of each work equipment, and the barcode of the document is read by the barcode reader. A work confirmation method characterized by displaying information specifying the work corresponding to the work on a display, and confirming the work on the workpiece sent together with the document based on the displayed content. (2) Confirm the work in the production process by sequentially sending the workpiece, information identifying the workpiece, and documents containing information on the work to be performed to multiple work equipment. The device comprises: a barcode storage unit that stores information that identifies the work in association with barcodes corresponding to the information; the document that has barcodes that identify the work written thereon; and each work. The apparatus comprises a barcode reader and a display provided at a location of the equipment, retrieves information specifying the work corresponding to the barcode read by the barcode reader from the barcode storage unit, and displays the information on the display. A work confirmation device characterized by the fact that it has been done as expected.