JPS5818083U - 圧電振動子ポンプ - Google Patents

圧電振動子ポンプ

Info

Publication number
JPS5818083U
JPS5818083U JP1981113602U JP11360281U JPS5818083U JP S5818083 U JPS5818083 U JP S5818083U JP 1981113602 U JP1981113602 U JP 1981113602U JP 11360281 U JP11360281 U JP 11360281U JP S5818083 U JPS5818083 U JP S5818083U
Authority
JP
Japan
Prior art keywords
piezoelectric
piezoelectric vibrator
pair
pump
vibrator pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1981113602U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6135747Y2 (enrdf_load_stackoverflow
Inventor
成宮　宏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1981113602U priority Critical patent/JPS5818083U/ja
Publication of JPS5818083U publication Critical patent/JPS5818083U/ja
Application granted granted Critical
Publication of JPS6135747Y2 publication Critical patent/JPS6135747Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
JP1981113602U 1981-07-30 1981-07-30 圧電振動子ポンプ Granted JPS5818083U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981113602U JPS5818083U (ja) 1981-07-30 1981-07-30 圧電振動子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981113602U JPS5818083U (ja) 1981-07-30 1981-07-30 圧電振動子ポンプ

Publications (2)

Publication Number Publication Date
JPS5818083U true JPS5818083U (ja) 1983-02-03
JPS6135747Y2 JPS6135747Y2 (enrdf_load_stackoverflow) 1986-10-17

Family

ID=29907898

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981113602U Granted JPS5818083U (ja) 1981-07-30 1981-07-30 圧電振動子ポンプ

Country Status (1)

Country Link
JP (1) JPS5818083U (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6017279A (ja) * 1983-07-11 1985-01-29 Tamagawa Seiki Kk 電歪振動子を用いる気体ポンプ
JPH0237187A (ja) * 1988-07-27 1990-02-07 Nippon Keiki Seisakusho:Kk 圧電ポンプ
JP2010249658A (ja) * 2009-04-15 2010-11-04 Tokkyokiki Corp 圧電型加速度センサ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6017279A (ja) * 1983-07-11 1985-01-29 Tamagawa Seiki Kk 電歪振動子を用いる気体ポンプ
JPH0237187A (ja) * 1988-07-27 1990-02-07 Nippon Keiki Seisakusho:Kk 圧電ポンプ
JP2010249658A (ja) * 2009-04-15 2010-11-04 Tokkyokiki Corp 圧電型加速度センサ

Also Published As

Publication number Publication date
JPS6135747Y2 (enrdf_load_stackoverflow) 1986-10-17

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