JPS58178943A - イオン源 - Google Patents

イオン源

Info

Publication number
JPS58178943A
JPS58178943A JP57061808A JP6180882A JPS58178943A JP S58178943 A JPS58178943 A JP S58178943A JP 57061808 A JP57061808 A JP 57061808A JP 6180882 A JP6180882 A JP 6180882A JP S58178943 A JPS58178943 A JP S58178943A
Authority
JP
Japan
Prior art keywords
ion
cathode
anode
insulator
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57061808A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0131657B2 (enrdf_load_stackoverflow
Inventor
Kazuo Takayama
一男 高山
Katsuhiko Sunago
砂子　克彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokai University
Ulvac Inc
Original Assignee
Tokai University
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokai University, Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Tokai University
Priority to JP57061808A priority Critical patent/JPS58178943A/ja
Publication of JPS58178943A publication Critical patent/JPS58178943A/ja
Publication of JPH0131657B2 publication Critical patent/JPH0131657B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/04—Ion sources; Ion guns using reflex discharge, e.g. Penning ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP57061808A 1982-04-15 1982-04-15 イオン源 Granted JPS58178943A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57061808A JPS58178943A (ja) 1982-04-15 1982-04-15 イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57061808A JPS58178943A (ja) 1982-04-15 1982-04-15 イオン源

Publications (2)

Publication Number Publication Date
JPS58178943A true JPS58178943A (ja) 1983-10-20
JPH0131657B2 JPH0131657B2 (enrdf_load_stackoverflow) 1989-06-27

Family

ID=13181754

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57061808A Granted JPS58178943A (ja) 1982-04-15 1982-04-15 イオン源

Country Status (1)

Country Link
JP (1) JPS58178943A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0131657B2 (enrdf_load_stackoverflow) 1989-06-27

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