JPS58178578A - Laser oscillator - Google Patents

Abstract

PURPOSE:To obtain a laser oscillator which has small size and large output by stereoscopically flowing a light between resonators, extending the length of the resonators and forming a structure that an anode produces a turbulent flow in the laser gas passing through a discharging region, thereby equalizing the gas temperature of the discharging region. CONSTITUTION:Laser gas which is introduced from a hole 19 is exhausted from an exit 21 through a cathode tube 9, an anode ring 11 or between the ring 11 and an outer tube 25. Laser output is obtained by generating glow discharge and amplifying the light via the resonator which reaches from an output mirror 1 through annular mirrors 17-1, 17-2 to a rear mirror 3. The gas between the tube 25 and the ring 11 is flowed through the radial groove of the insulating ring to between the tube 9 and the ring 11, thereby cooling the tube 11, turning the flowing gas, and equalizing the temperature, velocity and density of the gas of the glow discharge region. Accordingly, the decrease in the inversion distribution rate due to thermal excitation of the CO2 molecules in the gas to the lower laser level can be suppressed. According to this structure, the laser output can be increased without increasing the size.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a discharge motive circulation type carbon dioxide laser oscillator, particularly a three-axis rectangular oscillator, and more particularly to a laser oscillation device that increases the laser output without increasing the size of the laser oscillator.

Discharge-excited circulating carbon dioxide laser oscillator with three intersecting axes (
As shown in FIG. 1, in the resonance path of light between the output mirror 1 and the rear mirror 3, for example, the 2 spherical mirrors 5-1 and 5-2 are arranged, and carbon dioxide gas (CO
When a discharge is generated while a laser gas containing (2 gas) is flowing at high speed in the direction of the arrow, the light emitted by the discharge (1) hits the first spherical mirror 5 in the mutual light path. -1
and the second spherical minnow 5-2, a plurality of 1 DIs are returned, so that the resonant light beam between the output mirror 1 and the rear mirror 3 can be substantially extended.
The purpose is to improve laser output.

However, since the light is folded between the first spherical mirror and the second spherical mirror almost on one plane, it is necessary to increase the number of times the light is folded in order to direct the laser output. In this case, it is necessary to increase the size of the first and second spherical mirrors, which causes the problem that the structure of the laser oscillator becomes large.In addition, the temperature of the laser gas is lower than that of the CO2 laser. G-J in the oscillator
The laser gas tends to rise from the upstream side of the circulation (solid line arrow in Figure 1) to the downstream side of the circulation (dotted line arrow in Figure 1), and due to the heat caused by the temperature increase, the temperature rises, especially on the downstream side of the circulation. If the 002 molecules in the discharge region are thermally excited to the lower laser level, 1. There is a problem in that the inversion rate in the discharge region is low, resulting in a decrease in laser output.

This invention has been made in view of the above, and the object of the invention is to improve the laser output of a three-axis orthogonal electromotive circulation type laser oscillator without enlarging the configuration of the laser beam oscillator. In order to achieve the stated purpose of
This invention is a discharge-excited circulating laser IJ'' that generates laser output by stimulating the laser gas flowing inside the laser oscillator.
In the 51 shaker, the cylindrical conductor part and the cylindrical insulating ring with a 1-shaped groove formed on the end surface are connected to each other at an angle of φ 17.
a second electrode having a cylindrical shape smaller in diameter than the first electrode and disposed so as to pass through a ring of the first electrode; A second resonator is provided in the optical path of the resonator and includes a first and second mirror that three-dimensionally returns the light of the resonator. By bending the light, the length of the resonator is extended, and furthermore, turbulence is generated in the laser gas flowing through the discharge region.

Hereinafter, a first example of the present invention will be described with reference to the drawings.

2(a) and (b) show an embodiment of the present invention. First, the configuration of the C02 laser oscillator 7 will be explained. A cathode pipe 4 constituting the second electrode arranged approximately on the central axis; reference numeral 11 denotes a thin ring-shaped conductor ring 13 (see FIG. 3) made of epoxy containing carbon fiber; and the conductor ring 11. The cathode pipe 9 is formed by overlapping an insulating ring 15 (see FIG. 3), which has almost the same shape as the cathode pipe 9 and has rings 15-a formed radially toward the center on the end face of the moon (see FIG. 3). 17-1.17-2 is an anode ring 4 constituting a first electrode arranged so as to pass through the ring (see Fig. 4), 17-1. (not shown)
Provided in the optical path of the resonator of the O2 laser oscillator 7,
As shown in the figure, a ring mirror 1 constitutes a second resonator that three-dimensionally returns the light passing between the output mirror 1 and the rear mirror 3 to substantially extend the resonator length.
9 is a laser gas inlet for introducing laser gas containing GO2 residue into the laser beam oscillator 7; 21 is a port for exhausting the laser gas introduced from the laser gas inlet 19 and flowing through the laser oscillator 7; 23 is a shielding plate that guides the laser gas to the laser gas υ] air port 21, 25 is a laser chive, 27 is an output mirror adjustment unit, and 29 is a GO
This is a bracket for attaching the 21-noise oscillator 7 to, for example, a machine body or a device. Note that cooling fins 31 are formed on the laser chive 1-25, and
02 laser oscillator 7 is introduced from the cooling air introduction 1133, guided by the guide root 35, and moved along the cooling fin 31 indicated by τF C'! 4. It is cooled H1 by the flowing air.

The cathode pipe 9 is formed of, for example, a water-cooled oxygen-free copper pipe, and the surface of the pipe is coated with aluminum or copper metal by plasma spraying. Note that cooling water or insulating oil is always allowed to flow inside the cathode pipe 9, especially when the
Cooling is performed to prevent the temperature of the molecules from rising.

The ring mirror 17 (17-1, 17-2>, as shown in FIG. The ring mirrors 17 (17-1, 17-2) are fixed to four water jacks 1 to 410 arranged to prevent heat effects. As shown in the figure, there are two cooling water inlets 43 and two cold UL water drains/I bars, and two water jackets where the cooling water flows from the cooling water inlets 43 to the cold N1 water outlet 45. 41 to be cooled.

In operation, the laser gas introduced from the laser gas inlet 19 passes through the passage between the cathode pipe 9 and the anode link 11 or between the 7-node ring 11 and the laser tube 25 and reaches the laser gas exhaust port 21. . In such a state, the C02 laser oscillator 7 applies a high voltage to the laser gas flowing between the cathode pipe 9 and the anode link 11 to generate a glow discharge and remove CO2 molecules in the laser gas. is pumped, and optical amplification is performed by a resonator extending from the output mirror 1 to the rear mirror 3 via the ring mirror 17-1.172, and when a predetermined threshold value is exceeded, a rape is output.

On the other hand, a part of the laser gas that has entered the passage between the anode ring 11 and the laser tube 1-725 passes through the radial ring 15-a formed in the insulating ring 15 and enters the cathode pipe 9.
and the anode ring 11, cools the anode ring 11, mixes with the laser gas flowing through the passage, and acts as fresh laser gas. 1. Generates a swirling flow in the flowing laser gas. As a result, the temperature, flow rate, and density of the laser gas in the dark ring-shaped glow discharge region of the cathode pipe 9 and anode ring 11 are made uniform, and the CO2 molecules in the laser gas are Being thermally excited at the laser level (decreasing of the inversion force due to J) is suppressed.

Therefore, according to the present invention, the light from the laser oscillator is three-dimensionally folded back by the second resonator in the optical path of the resonator, thereby suppressing the enlargement of the laser oscillator. The resonator length of the laser oscillator is increased by increasing the number of times, and the anode of the laser oscillator is configured to generate turbulence in the laser gas flowing through the discharge region. ! Since we tried to make the melons uniform, the thief output could be increased in the direction of 1.1 without increasing the size of the laser oscillator. T can.

[Brief explanation of the drawing]

Fig. 1 shows principle II of a 3-axis orthogonal type discharge motor circulation type carbon dioxide laser excavator, Fig. 2 (a) and (b) show an embodiment of the present invention, and Fig. 3 (a) J3 and ( b) shows the configuration of the conductor ring and insulating ring, respectively, Fig. 4 shows the arrangement of the anode ring and the quad-pino, Fig. 5 shows the outline of the folding of the light passing through the second resonator, Fig. 6 7 shows the structure of the ring mirror, and FIG. 7 shows the main diagram of the ring mirror cooling method I11 (explanation of symbols representing one important part of the figure) 7...C
O2 laser oscillator 13... Conductor ring 15-a...
・Full 15...Insulation ring 11...
7 node ring 9... Ka-1 hepai/17,
17-1.17-2...Ring mirror patent applicant
Stocks, association? l −t′ Mata Special Applicant
Co., Ltd. 1] Kyoudenki Seihakusho Figure 3 Figure 4 Figure 1 1 No) Figure 5 - "Continuation?...1" Cocoon (Method) August 6, 1981 Meto ¥ + Agency official Kazu Sugisugi Inu Tono 1, Display of $ Patent Application No. 571-60948 2
, Title of the invention Representative review of laser oscillation device Tenro 1 Yu 6, Subject of amendment (1) Drawing 7, Contents of amendment (1) In the drawing, there is a red mark (a) in Figure 3 as shown in the attached sheet.
>, add (b). 8. List of attached documents

Claims (1)

[Claims] This is a discharge-excited circulation laser oscillator that outputs a laser beam by electrically exciting the laser gas flowing through the laser oscillator, and is a cylindrical insulator in which an RLI groove is formed in a cylindrical conductor and an end surface. The first ring consists of alternating rings.
a second electrode having a cylindrical shape smaller in diameter than the first electrode and disposed so as to pass through the ring of the first electrode, and a second electrode disposed in the optical path of the resonator in the laser oscillator. and a second resonator made of gAl and a second mirror that performs three-dimensional folding of light from the resonator.