JPS58175635U - ウエハホルダ− - Google Patents

ウエハホルダ−

Info

Publication number
JPS58175635U
JPS58175635U JP7215182U JP7215182U JPS58175635U JP S58175635 U JPS58175635 U JP S58175635U JP 7215182 U JP7215182 U JP 7215182U JP 7215182 U JP7215182 U JP 7215182U JP S58175635 U JPS58175635 U JP S58175635U
Authority
JP
Japan
Prior art keywords
wafer
horseshoe
peripheral edge
shaped spring
wafer holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7215182U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6141235Y2 (show.php
Inventor
道夫 栗林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP7215182U priority Critical patent/JPS58175635U/ja
Publication of JPS58175635U publication Critical patent/JPS58175635U/ja
Application granted granted Critical
Publication of JPS6141235Y2 publication Critical patent/JPS6141235Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7215182U 1982-05-18 1982-05-18 ウエハホルダ− Granted JPS58175635U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7215182U JPS58175635U (ja) 1982-05-18 1982-05-18 ウエハホルダ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7215182U JPS58175635U (ja) 1982-05-18 1982-05-18 ウエハホルダ−

Publications (2)

Publication Number Publication Date
JPS58175635U true JPS58175635U (ja) 1983-11-24
JPS6141235Y2 JPS6141235Y2 (show.php) 1986-11-25

Family

ID=30081725

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7215182U Granted JPS58175635U (ja) 1982-05-18 1982-05-18 ウエハホルダ−

Country Status (1)

Country Link
JP (1) JPS58175635U (show.php)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006339181A (ja) * 2005-05-31 2006-12-14 Nec Electronics Corp ウエハ保持治具

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006339181A (ja) * 2005-05-31 2006-12-14 Nec Electronics Corp ウエハ保持治具

Also Published As

Publication number Publication date
JPS6141235Y2 (show.php) 1986-11-25

Similar Documents

Publication Publication Date Title
JPS58175635U (ja) ウエハホルダ−
JPS6114262U (ja) 球接手のダストカバ−
JPS5826295U (ja) ボイスコイルユニツトの組込み用治具
JPS5873829U (ja) 手摺のエンドキヤツプ
JPS587503U (ja) 耕耘軸における耕耘爪の取付装置
JPS60108206U (ja) 雌スナツプ
JPS5851964U (ja) 研磨治具
JPS63105955U (show.php)
JPS58127096U (ja) 汎用ジヤツキ
JPS5884828U (ja) 心出し及び固定装置
JPS60145777U (ja) スピ−カ−装置
JPS6041630U (ja) 自在継手の軸受押え装置
JPS5969858U (ja) 指輪型ナツトソケツト
JPS5911109U (ja) バルブロツカ−ア−ム
JPS5968403U (ja) ハトメ取付具
JPS612451U (ja) 基板ホルダ装置
JPS6057131U (ja) 保持治具
JPS59109849U (ja) 回り縁
JPS5931719U (ja) モ−ルドブツシング
JPS58139733U (ja) ラジオ等におけるダイヤル装置
JPS59103907U (ja) 軸固定装置
JPS5978602U (ja) 電子部品
JPS589793U (ja) 万能製図機の破線付製図定規
JPS60151795U (ja) ゴムボ−ト
JPS588178U (ja) 分針歯車のスリップ装置