JPS58175635U - wafer holder - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of the drawing]

FIG. 1a is a plan view showing an embodiment of a conventional wafer holder, FIG. Fig. 2 is a BB sectional view of Fig. 2 a, Fig. 3 a, b, c
4 is a perspective view showing an embodiment of the present invention, and FIG. 4 is a cross-sectional view taken along the line XX of FIG. In the figure, 1 is the wafer, 6 is the wafer holder □Main body, 601 is the wafer mounting surface, 602
603 is a support plane, 603 is a clamping portion, and 7 is a horseshoe-shaped spring.

Claims (1)

[Scope of utility model registration request] There is a stepped annular wafer mounting surface on which the outer peripheral edge of the wafer is placed to prevent the wafer from shifting in the radial direction, a support plane that is larger than the outer diameter of the wafer and slightly shallower than the wafer mounting surface, and A donut-shaped wafer holder body including a horseshoe-shaped spring clamping part with a tapered peripheral edge, and a thin plate-like elastic body formed in a horseshoe shape, the outer peripheral edge of which is elastically connected to the horseshoe-shaped spring clamping part. A wafer holder characterized by comprising a horseshoe-shaped spring with a small hole at the tip of the image for engagement and attachment/detachment.