JPS58173417A - 干渉による面形状の測定方法 - Google Patents

干渉による面形状の測定方法

Info

Publication number
JPS58173417A
JPS58173417A JP57057080A JP5708082A JPS58173417A JP S58173417 A JPS58173417 A JP S58173417A JP 57057080 A JP57057080 A JP 57057080A JP 5708082 A JP5708082 A JP 5708082A JP S58173417 A JPS58173417 A JP S58173417A
Authority
JP
Japan
Prior art keywords
face
inspected
interference
light
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57057080A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0447243B2 (enrdf_load_stackoverflow
Inventor
Junpei Tsujiuchi
辻内　順平
Toshio Honda
本田　捷夫
Jun Ishikawa
純 石川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP57057080A priority Critical patent/JPS58173417A/ja
Publication of JPS58173417A publication Critical patent/JPS58173417A/ja
Publication of JPH0447243B2 publication Critical patent/JPH0447243B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP57057080A 1982-04-05 1982-04-05 干渉による面形状の測定方法 Granted JPS58173417A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57057080A JPS58173417A (ja) 1982-04-05 1982-04-05 干渉による面形状の測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57057080A JPS58173417A (ja) 1982-04-05 1982-04-05 干渉による面形状の測定方法

Publications (2)

Publication Number Publication Date
JPS58173417A true JPS58173417A (ja) 1983-10-12
JPH0447243B2 JPH0447243B2 (enrdf_load_stackoverflow) 1992-08-03

Family

ID=13045495

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57057080A Granted JPS58173417A (ja) 1982-04-05 1982-04-05 干渉による面形状の測定方法

Country Status (1)

Country Link
JP (1) JPS58173417A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010197281A (ja) * 2009-02-26 2010-09-09 Japan Aerospace Exploration Agency 対向面内所定位置における対向面間距離測定装置及び方法、及びそれらを用いた高平面度加工方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010197281A (ja) * 2009-02-26 2010-09-09 Japan Aerospace Exploration Agency 対向面内所定位置における対向面間距離測定装置及び方法、及びそれらを用いた高平面度加工方法

Also Published As

Publication number Publication date
JPH0447243B2 (enrdf_load_stackoverflow) 1992-08-03

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