JPS58172513A - Sensor for measuring instrument - Google Patents
Sensor for measuring instrumentInfo
- Publication number
- JPS58172513A JPS58172513A JP5619882A JP5619882A JPS58172513A JP S58172513 A JPS58172513 A JP S58172513A JP 5619882 A JP5619882 A JP 5619882A JP 5619882 A JP5619882 A JP 5619882A JP S58172513 A JPS58172513 A JP S58172513A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- sensor
- tube
- wire
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/16—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Abstract
Description
【発明の詳細な説明】
本発明者はさきに実願昭56−19805において第1
図に示す如くスパイラル状抵抗IN8!I(1)の両鴻
をリード線(匂、C2)の一端に夫々接続し友ものをセ
ラミック管6)内に挿通し、セラミック管銘)とm(L
休)、(2)との空隙にセラミックパウダ一体)を充
填して焼結し一体的に成形してなる計淘器用センサーを
提案し九。DETAILED DESCRIPTION OF THE INVENTION The present inventor previously filed the first Utility Application in 19805,
As shown in the figure, the spiral resistance IN8! Connect both wires of I (1) to one end of the lead wire (C2) and insert them into the ceramic tube 6).
We proposed a sensor for a meter that is made by filling the gap between (2) and (2) with ceramic powder, sintering it, and molding it integrally.9.
この計−器用センサーを製造するにはセラミック管(3
)内にセラ之ツタパウダーの泥漿を充填し乾燥した後セ
ラミック管体)の両端に低融点セラミックの泥漿を追加
充填して焼結し、中央部のセラ電ツク焼結体(4)と両
端部のセラきツク焼結体(41L)。To manufacture this instrument sensor, a ceramic tube (3
) is filled with slurry of cera-ivy powder and dried, then additionally filled with low-melting point ceramic slurry at both ends of the ceramic tube body ( ) and sintered, forming a ceramic electric sintered body (4) in the center and both ends. Ceramic sintered body (41L).
(411とが一体的にセラミック管体)内に充填さ−を
製造する場合、両端部のセラミック焼結体(4m)、(
4亀)の外面を軸に対して対称に且つ平滑な面にするこ
とが困離で小さい凹凸を生じま九は非対称になることが
あり、ま九焼結後リード線(り、(鴫にステムと々るリ
ード!1I(2IL)、 (21)を溶接する際セラ
ミック焼結体(4m)の外面にクラックが入るととがあ
シ、何れの場合においてもセンサーに当る流体の流れに
不均一な乱れを生じさせる丸め測定精度を低下させる欠
点があった。(411 is integrally filled in the ceramic tube body), when manufacturing the ceramic sintered body (4 m) at both ends, (
It is difficult to make the outer surface of the lead wire (4) symmetrical with respect to the axis and smooth, resulting in small irregularities. When welding Stem Totoru Lead! 1I (2IL), (21), cracks may occur on the outer surface of the ceramic sintered body (4 m), and in either case, the flow of fluid hitting the sensor will be disrupted. There was a drawback that rounding caused uniform disturbances and reduced measurement accuracy.
本発明は上記の欠点を改良するもので、実施例を図面に
ついて説明すれば一
実施例1
舖
落2図に示す如く径20ミクロンの白金線線を径約0.
35 ml鳳の螺旋状に巻いた抵抗細線((転)の両端
に径約0.トIの白金リード線(2)、斡)を電気溶接
等によって接続し、アルきす、アルミナルマグネシアま
たはシリカルアルミナその他適宜材質よりなる外径Q、
’F ml! 、内径0.5 am のセラミック管
(3)にリード線(2)、(2)と抵抗細線(1)との
溶着部が納まるよう該白金抵抗細線d(□を挿通し、竜
ラミック管(荀と白金M (1) 、■)、(2)との
空隙にセラミック泥漿たとえば直径2ミクロン以下のア
ルミナの微粉末95〜60−と直径2ミクロン以下の硬
質ガラスの微粉末5〜40慢とを微粉末90〜80対水
lO〜200割合で練つ九均質混合物(4)を密に充填
して常温減圧の雰囲気で24〜48時間乾燥し微粉末に
加えた水分を殆んど蒸発させる。ついでPK入れ、常温
より約1時間で約400℃に昇−(荀を焼結ま九は焼成
した後常iiLまで約10時間かけて徐冷する1次にセ
ラミック管(3)の両端面にアルミナルガラス粉末混合
物を水で練つ九泥漿状接着剤(7)を塗布し、セラミッ
ク管(場の層面と同一輪廓を有しリード線(功挿通用孔
(5)を設けたアルミナその他適宜材質のセラミック蓋
(6) 、 (6)をリード4m(11)K挿通し接着
剤(ηによってセラミツタ管(勾の両端mK接着する。The present invention aims to improve the above-mentioned drawbacks, and an embodiment will be described with reference to the drawings.As shown in Embodiment 1 and Figure 2, a platinum wire with a diameter of 20 microns is made of a platinum wire with a diameter of about 0.
Connect a 35 ml spirally wound resistance wire (platinum lead wire (2) with a diameter of about 0.0 mm to both ends of the wire) by electric welding, etc. Outer diameter Q made of aluminum oxide or other appropriate material;
'Fml! , insert the thin platinum resistance wire d (□) into the ceramic tube (3) with an inner diameter of 0.5 am so that the welded part of the lead wires (2), (2) and the thin resistance wire (1) fit into the ceramic tube (3), Ceramic slurry, for example, 95 to 60 microns of alumina fine powder with a diameter of 2 microns or less and 5 to 40 microns of hard glass powder with a diameter of 2 microns or less, is placed in the gaps between the Xun and platinum M (1), ■), and (2). A homogeneous mixture (4) made by kneading the fine powder at a ratio of 90 to 80 lO to 200 lO of water is densely packed and dried in a reduced pressure atmosphere at room temperature for 24 to 48 hours to evaporate most of the water added to the fine powder. Next, PK is added, and the temperature is raised from room temperature to about 400°C in about 1 hour. A slurry-like adhesive (7) made by kneading an alumina glass powder mixture with water is applied to the ceramic tube (alumina or other ceramic tube having the same circumference as the layer surface and having a lead wire (adjustable insertion hole (5)). Insert the lead 4m (11)K through the ceramic lid (6), (6) made of an appropriate material, and glue both ends of the ceramic ivy tube (mK) with adhesive (η).
得られた成形品を約5時間常温乾燥後再び炉に入れ、常
温より約1時間で約400℃に昇温し、約400℃に2
時間維持し、約3時間で約1200℃に昇温し、約12
00℃に30分間維持して接着剤(7)を焼結してセラ
ミックl1(6)、(6)を竜ラミック管(3)K完全
に接着し、常温まで約10時間かけて徐冷することKよ
シ白金抵抗細!I((転)をセラミック管G5)内に焼
結セラミック(4)およびセラミック蓋(6) 、 (
6) Kよって固定してなる計渕器用竜ンサーを得る。After drying the obtained molded product at room temperature for about 5 hours, it was placed in the oven again, and the temperature was raised from room temperature to about 400°C in about 1 hour, and then heated to about 400°C for 2 hours.
The temperature was maintained at approximately 1,200°C in approximately 3 hours, and the temperature increased to approximately 12
Maintain the temperature at 00℃ for 30 minutes to sinter the adhesive (7) to completely bond the ceramic l1 (6), (6) to the dragon ramic tube (3)K, and slowly cool it to room temperature for about 10 hours. KotoK, platinum resistance thin! Place the sintered ceramic (4) and ceramic lid (6) in the ceramic tube G5.
6) Obtain a dragon sensor for a metering device which is fixed by K.
実論例鴬
第3図および第4図に示す如く2本の透孔を穿つ九セラ
ミック製円柱体(3a)を用意し、タングステンリード
線(2)、(2)を両端に電気溶接したタングステン抵
抗細線(1)を前記2本の透孔に溶着部が納まるよう挿
通し、セラミック製円柱体(31)とタングステン線α
L(2)、(匂との空m部を填めるようセチンツク泥漿
九とえばアルミナ黴粉末を10〜30−O水で練った泥
漿状均質混合物(4)を充填し、泥漿a)を常温乾燥後
セラミック製円柱体(Sa)の両端部にセラミック泥漿
(4)と焼成時において相溶性のある、たとえばアルミ
ナルガラス粉末混合物を水で練つ九接着剤(グ)を塗布
してタングステン抵抗細線(ト)の露出部を履め、空洞
部を有するセラミック蓋(61)を抵抗縁1!(1)の
あられれてい友@0円柱体(3a)端面に接着剤(7)
Kよって接着し、2本のリード線挿通用孔(6)を設け
たセラミック蓋(6b)の孔(5)Kリード線仲)を通
し、セラきツク蓋(6b)を接着剤(7)によって円柱
体(31)端面に接着する。得られた成形品を約6時間
常温乾燥し、次いでアルゴンガス9δ−1水素ガス5−
椙変の雰囲気に保った炉に入れ、常温より約1時間で約
400’Cに昇温し、約400℃に約2時間維持し、約
3時間で約1200℃に昇温し、約1200℃に約30
分関繍持してセラミック混合物(4)を焼成または焼結
するとともに−にラミック接着剤←)を鵠結し、タング
ステン抵抗細線α)をセラミック管(3a)内に焼結セ
ラミック(4)および竜ラミック蓋(sa)、(ah)
によって固定し九計欄器用センナ−を得る。Practical example As shown in Figures 3 and 4, a ceramic cylinder (3a) with two through holes is prepared, and tungsten lead wires (2), (2) are electrically welded to both ends. Insert the thin resistance wire (1) into the two through holes so that the welded part fits, and connect the ceramic cylinder (31) and the tungsten wire α.
L (2), fill the empty space (m) with a slurry-like homogeneous mixture (4), for example, alumina mold powder kneaded with 10-30-O water, and leave the slurry a) at room temperature. After drying, a tungsten resistance adhesive is applied to both ends of the ceramic cylinder (Sa) by applying an adhesive (g), which is compatible with the ceramic slurry (4) during firing, such as a mixture of alumina glass powder mixed with water. Attach the exposed part of the thin wire (G) and attach the ceramic lid (61) having a cavity to the resistance edge 1! (1)'s hail friend @0 Cylinder body (3a) Adhesive (7) on the end surface
Glue the ceramic cover (6b) with the adhesive (7) and pass it through the hole (5) between the two lead wires (6) in the ceramic cover (6b), which has two lead wire insertion holes (6). It is adhered to the end face of the cylindrical body (31). The obtained molded product was dried at room temperature for about 6 hours, and then argon gas 9δ-1 hydrogen gas 5-
Placed in a furnace maintained at a temperature of 120°C, the temperature was raised from room temperature to about 400°C in about 1 hour, maintained at about 400°C for about 2 hours, and raised to about 1200°C in about 3 hours. about 30℃
The sintered ceramic (4) and Dragon lamik lid (sa), (ah)
Fix it to obtain a senner for a nine-meter column.
上記実施例において抵抗11111線(1)Kは白金、
タングステンを使用したが、それ以外にもニッケル、ス
テンレス鋼、洋銀、燐青銅等抵抗の温度係数の大きい任
意の導線を使用することができる。但し高温腐蝕性のあ
る金属細線の場合は炉内を窒素、アルゴン、水素勢のガ
スで充満し九雰囲気中で焼成する。−にラミック管(勾
の材料としてはムライト、ジ羨コエア等のセラミックあ
るいは金属を使用することができ、セラミックパウダー
(荀の材料としてはアルミナ、シリカ、マグネシア、石
英ガラス等またはその混和物を使用し得るが、竜うミッ
ク管伜)と焼結セラミック(4)と抵抗線(ホ)とは膨
張係数が可及的等しくなるように夫々の材料を選定し組
合わせる必要がある。In the above embodiment, the resistor 11111 wire (1) K is platinum,
Although tungsten is used, any conductive wire with a large temperature coefficient of resistance, such as nickel, stainless steel, nickel silver, or phosphor bronze, can be used. However, in the case of thin metal wires that are corrosive at high temperatures, the furnace is filled with nitrogen, argon, or hydrogen gas and fired in an atmosphere of 9. - For the lamic tube (ceramic or metal such as mullite or quartz glass can be used as the material of the gradient, and ceramic powder (the material of the material can be alumina, silica, magnesia, quartz glass, etc. or a mixture thereof) However, it is necessary to select and combine the materials of the sintered ceramic tube (2), the sintered ceramic (4), and the resistance wire (5) so that their coefficients of expansion are as equal as possible.
本発明は上記の如くセラミック管(5)の開口端に予め
成形した竜ラミック蓋(6)を取付けたので、従来法の
充填セラミック←)がセラミック管両端部に露出してそ
の端面形状が歪みあるいはリードlII■)にステふと
なるリード!!(jl a )を溶接する際充填セラミ
ック←)の露出部にクラックを生じて測定種度を低下さ
せるおそれなく、流速針用センサー、測温抵抗体、温度
補償用センナ−として長期に1って正確に迅j1に温度
または流速を画定し得る効果を有するものである。In the present invention, as described above, the pre-formed dragon ramic lid (6) is attached to the open end of the ceramic tube (5), so the filled ceramic ←) of the conventional method is exposed at both ends of the ceramic tube and the end face shape is distorted. Or a lead that becomes a step to lead l II■)! ! When welding (jl a), there is no risk of cracking in the exposed part of the filled ceramic←) and reducing the measurement accuracy, so it can be used as a sensor for flow rate needles, resistance temperature detectors, and temperature compensation sensors for a long time. This has the effect of accurately and quickly defining the temperature or flow rate.
第1図は従来の計測器用センサーの一例を示す断面図、
第2図および第3図は本発明Oli演1器用センサーの
例を示す断面図、第4図は第3図のA−五線断面図であ
る。
図中((1)は抵抗細線、(2)はり一ト°線、(勾は
セラミック管、(4)は焼結セラミック、(6)はセラ
ミック管を示す。
代還人 井 手 観
第3目
7
L・−A
ffiJ呂Figure 1 is a cross-sectional view showing an example of a conventional sensor for measuring instruments.
2 and 3 are cross-sectional views showing an example of the Oli performance sensor of the present invention, and FIG. 4 is a cross-sectional view taken along the line A-5 in FIG. 3. In the figure ((1) is a thin resistance wire, (2) is a beam wire, (gradient is a ceramic tube, (4) is a sintered ceramic, and (6) is a ceramic tube. Eye 7 L・-A ffiJro
Claims (1)
一端に夫々接続しえものをセラミック管(場内に挿通し
、セラきツク管(3)と線(υ、(至))l)と09!
−にセラミクパウダー(4を充填して該噌ラミックパウ
ダー(4)を焼成し、セラミック管(S)の開口端にリ
ード* (2)挿通用孔(6)を設ゆたセラミック管(
6)をセラミック質接着剤(’/)Kよ如接着し、セラ
ミック質接着剤())を焼結し一体的に成形してなる計
測器用センサー。 8、セラ之ツタパウダー(4)の焼成とセラミック質接
着剤(→O焼結とを最終工@において一緒に行なつ九特
許請求の範囲第1項記載O計掬器用センサ*
zr:n、2’!’!3
、計槻器が流速針である特許請求の範@l11項。 記載の計IIl1gjI用七ンナー。 6、計測(転)用センサーが温度補償用センサーであま
た1プ秀2、 特許請求の範囲第11[F*の計測器用センサー。 ハ[Claims] 1. Connect both ends of the resistor thin wire (1) to one end of the lead wire (2), respectively, and insert the wire into the ceramic tube (3). Line (υ, (to))l) and 09!
- filled with ceramic powder (4), fired the ceramic powder (4), and provided a lead* (2) insertion hole (6) at the open end of the ceramic tube (S).
6) is bonded with a ceramic adhesive ('/)K, and the ceramic adhesive ()) is sintered and integrally formed. 8. A sensor for an O meter scooper as described in claim 1, in which the firing of Cera no ivy powder (4) and the ceramic adhesive (→O sintering are performed together in the final process @9)
zr:n, 2'! '! 3
, Claim @l11 in which the meter is a flow rate needle. 7-ner for total IIl1gjI as described. 6. The measurement (conversion) sensor is a temperature compensation sensor. 2. Claim 11 [F* sensor for measuring instrument] Ha
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5619882A JPS58172513A (en) | 1982-04-03 | 1982-04-03 | Sensor for measuring instrument |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5619882A JPS58172513A (en) | 1982-04-03 | 1982-04-03 | Sensor for measuring instrument |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58172513A true JPS58172513A (en) | 1983-10-11 |
JPH0211850B2 JPH0211850B2 (en) | 1990-03-16 |
Family
ID=13020416
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5619882A Granted JPS58172513A (en) | 1982-04-03 | 1982-04-03 | Sensor for measuring instrument |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58172513A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61154536U (en) * | 1985-03-16 | 1986-09-25 | ||
JP2003254799A (en) * | 2002-03-01 | 2003-09-10 | Yokogawa Electric Corp | Vortex flowmeter |
-
1982
- 1982-04-03 JP JP5619882A patent/JPS58172513A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61154536U (en) * | 1985-03-16 | 1986-09-25 | ||
JP2003254799A (en) * | 2002-03-01 | 2003-09-10 | Yokogawa Electric Corp | Vortex flowmeter |
Also Published As
Publication number | Publication date |
---|---|
JPH0211850B2 (en) | 1990-03-16 |
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