SU911631A1 - Thermistor and method of manufacturing same - Google Patents

Description

(54) THERMISTOR AND METHOD OF ITS MANUFACTURE

The invention relates to electronic engineering and can be used in the manufacture of thermistors in temperature measuring devices.

Known thermistor containing temperature-sensitive element and conclusions. It is made by forming a thermosensitive element from a single crystal of a composite oxide and applying pins 1.

The disadvantages of the known thermistor are low sensitivity and speed.

The closest to the proposed technical entity is a thermistor, which contains a temperature-sensitive single-crystal diamond element placed in a housing, a collector connected to it and conclusions. This thermistor is made by attaching a collector to a t: sensitive element of single-crystal diamond, followed by drawing leads (-2.

A disadvantage of the known thermistor is the low speed.

The purpose of the invention is to increase speed.

 This goal is achieved by the fact that in a known thermistor containing: a temperature-sensitive element placed in a housing from a monocrystal tayplic diamond connected to it / collector and conclusions, the collector is made from a polycrystalline diamond psiac.

Method of making thermistor

10 is characterized by the fact that, before attaching a polycrystalline diamond powder collector, a mono15 crystalline diamond is placed on a thermosensitive element of a mono-crystalline diamond, and a collector is attached to a monocrystalline diamond temperature-sensitive element by sintering polycrystalline alumina powder and

20 monocrystalline diamond at 1500-2000 ° С and pressure of 70-80 kbar for 15-30 s.

The figure shows a schematic sectional thermistor.

25

The thermistor contains a monocrystalline diamond thermosensitive element 1, located in a collector 2 of a sintered powder of polycrystalline diamond, conclusions 3, metallized areas 4 for 30

connections of conclusions 3 and heat-resistant coating 5, Thermistor is placed in a case of quartz C7 VC (not shown).

Thermistor works as follows.

Using terminals 3, the thermistor is connected to the object to be measured. Measuring bridge. Resistance is measured by the resistance of the thermistor. According to the calibration curve of the dependence of the thermistor resistance on the object temperature. When the object temperature changes, the thermistor changes its resistance. This change is recorded and the corresponding change in temperature of the measured volume at a given time is estimated from the calibration curve.

A thermistor is fabricated as follows.

Monocrystalline diamond is placed in the central part of the mold with diamond # 4 powder and withstand loading in a high-pressure chamber of a hydraulic press, such as a toroid at a pressure of 45 kbar and for 20 s, resulting in sintering of polycrystalline diamond powder with a monocrystalline diamond. Then the temperature is lowered to room temperature, and the pressure to atmospheric. The obtained sample is removed from the press molding unit, polished until the monocrytal is opened, and then subjected to chemical treatment in order to degrease and clean the surface of the specimen. Then, a contact metal coating of Ti-Ni is deposited on the surface of the collector with an active element of monocrystalline diamond in it by sputtering a metal in vacuum. With the help of the photolithography method, spaced contact pads are obtained, to which conclusions from tungsten are attached to the atmosphere of hydrogen at. The thermistor is placed in a quartz glass shell.

Sintered diamond composition has a thermal conductivity exceeding several times the thermal conductivity.

collectors of known thermistors; A diamond single crystal is pressed into a sintered diamond composition under conditions of high pressures and temperatures, as a result of which the diamond single crystal grows into a polycrystalline diamond to form a monolithic body. Under these conditions, a strong thermal contact of a single crystal of diamond with a polycrystalline diamond is created, which, together with the higher thermal conductivity of polycrystalline diamond, increases the response time of the {1) torus.

In addition, the thermistor is more resistant to aggressive environments, such as high humidity.

Claims (2)

1. Thermistor containing size-. A thermosensitive element made of monocrystalline diamond, connected to it, a collector and leads, characterized in that, in order to increase its speed, the collector is made of polycrystalline gshmaz powder. 2, A method of manufacturing a tee according to Claim 1, comprising attaching a collector to a thermosensitive element of monocrystalline diamond, which is also so that before attaching a collector of polycrystalline diamond powder to a thermosensitive element of a single crystal diamond to powder polycrystalline diamond commemorated single crystal diamond, and the connection of the collector to the thermo-sensitive element from Mrnokr steel oshmaza is carried out by sintering a prlicris powder of allyc diamond at 150b -2000 ° C and a pressure of 70-80 kbar for 15-30 s. Sources of information taken into account in the examination 1. Authors certificate of the USSR 491163, Cl. H 01 C-7/04, 1973.. 2. Patent of Great Britain W1168133, 0 CL. H 01 C 7/04, 1969 (prototype).