JPH0211850B2 - - Google Patents
Info
- Publication number
- JPH0211850B2 JPH0211850B2 JP5619882A JP5619882A JPH0211850B2 JP H0211850 B2 JPH0211850 B2 JP H0211850B2 JP 5619882 A JP5619882 A JP 5619882A JP 5619882 A JP5619882 A JP 5619882A JP H0211850 B2 JPH0211850 B2 JP H0211850B2
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- sensor
- measuring instrument
- manufacturing
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000919 ceramic Substances 0.000 claims description 67
- 239000000843 powder Substances 0.000 claims description 18
- 239000000853 adhesive Substances 0.000 claims description 12
- 230000001070 adhesive effect Effects 0.000 claims description 12
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 5
- 238000005245 sintering Methods 0.000 claims description 4
- 238000010304 firing Methods 0.000 claims description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 11
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 8
- 239000000463 material Substances 0.000 description 6
- 239000002002 slurry Substances 0.000 description 6
- 229910052697 platinum Inorganic materials 0.000 description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 5
- 229910052721 tungsten Inorganic materials 0.000 description 5
- 239000010937 tungsten Substances 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- PQZSQOYXZGDGQW-UHFFFAOYSA-N [W].[Pb] Chemical compound [W].[Pb] PQZSQOYXZGDGQW-UHFFFAOYSA-N 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- UAMZXLIURMNTHD-UHFFFAOYSA-N dialuminum;magnesium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[Mg+2].[Al+3].[Al+3] UAMZXLIURMNTHD-UHFFFAOYSA-N 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000008240 homogeneous mixture Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000010956 nickel silver Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/16—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Description
【発明の詳細な説明】
本発明者はさきに実願昭56−19805において第
１図に示す如くスパイラル状抵抗細線１の両端を
リード線２，２の一端に夫々接続したものをセラ
ミツク管３内に挿通し、セラミツク管３と線１，
２，２との空隙にセラミツクパウダー４を充填し
て焼結し一体的に成形してなる計測器用センサー
を提案した。DETAILED DESCRIPTION OF THE INVENTION The present inventor previously proposed in Utility Model Application No. 56-19805 that a ceramic tube 3 was constructed by connecting both ends of a spiral resistance thin wire 1 to one end of lead wires 2, 2, respectively, as shown in FIG. Insert the ceramic tube 3 and wire 1 into the
We have proposed a sensor for a measuring instrument in which ceramic powder 4 is filled in the gap between two parts, sintered, and integrally molded.
この計測器用センサーを製造するにはセラミツ
ク管３内にセラミツクパウダーの泥漿を充填し乾
燥した後セラミツク管３の両端に低融点セラミツ
クの泥漿を追加充填して焼結し、中央部のセラミ
ツク焼結体４と両端部のセラミツク焼結体４ａ，
４ａとが一体的にセラミツク管３内に充填された
状態に仕上げるのであるが、測定時における応答
時間を0.1〜１秒程度の極めて短い時間にするた
め管３の外径を0.5〜１mm程度の極めて小さいセ
ンサーを製造する場合、両端部のセラミツク焼結
体４ａ，４ａの外面を軸に対して対称に且つ平滑
な面にすることが困難で小さな凹凸を生じまたは
非対称になることがあり、また焼結後リード線
２，２にステムとなるリード線２ａ，２ａを溶接
する際セラミツク焼結体４ａの外面にクラツクが
入ることがあり、何れの場合においてもセンサー
に当る流体の流れに不均一な乱れを生じさせるた
め測定精度を低下させる欠点があつた。 To manufacture this measuring instrument sensor, the ceramic tube 3 is filled with ceramic powder slurry, dried, and then low melting point ceramic slurry is additionally filled at both ends of the ceramic tube 3 and sintered. body 4 and ceramic sintered bodies 4a at both ends,
4a is integrally filled into the ceramic tube 3, but in order to make the response time during measurement extremely short, about 0.1 to 1 second, the outer diameter of the tube 3 is set to about 0.5 to 1 mm. When manufacturing extremely small sensors, it may be difficult to make the outer surfaces of the ceramic sintered bodies 4a, 4a at both ends symmetrical with respect to the axis and smooth, resulting in small irregularities or asymmetrical surfaces. When welding the lead wires 2a, 2a, which will become the stem, to the lead wires 2, 2 after sintering, cracks may occur on the outer surface of the ceramic sintered body 4a, and in either case, the flow of fluid hitting the sensor may be uneven. This method had the disadvantage of reducing measurement accuracy due to the generation of disturbances.
本発明は上記の欠点を改良するもので、抵抗細
線１の両端をリード線２，２の一端に夫々接続し
たものをセラミツク管３内に挿通し、セラミツク
管３と線１，２，２との空隙にセラミツクパウダ
ー４を充填して該セラミツクパウダー４を焼成
し、セラミツク管３の開口端にリード線２挿通用
孔５を設けたセラミツク蓋６をセラミツク質接着
剤７により接着し、セラミツク質接着剤７を焼結
し一体的に成形することにより計測器用センサー
を得るものである。実施例を図面について説明す
れば、
実施例 １
第２図に示す如く径20ミクロンの白金細線を径
約0.35mmの螺旋状に巻いた抵抗細線１の両端に径
約0.2mmの白金リード線２，２を電気溶接等によ
つて接続し、アルミナ、アルミナ〜マグネシアま
たはシリカ〜アルミナその他適宜材質よりなる外
径0.7mm、内径0.5mmのセラミツク管３にリード線
２，２と抵抗細線１との溶着部が収まるよう該白
金抵抗細線１を挿通し、セラミツク管３と白金線
１，２，２との空隙にセラミツク泥漿たとえば直
径２ミクロン以下のアルミナの微粉末95〜60％と
直径２ミクロン以下の硬質ガラスの微粉末５〜40
％とを微粉末90〜80対水10〜20の割合で練つた均
質混合物４を密に充填して常温減圧の雰囲気で24
〜48時間乾燥し微粉末に加えた水分を殆んど蒸発
させる。ついで炉に入れ、常温より約１時間で約
400℃に昇温し、約400℃に２時間保持し、約３時
間で約1200℃に昇温し約1200℃に30分間保持して
セラミツクパウダー４を焼結または焼成した後常
温まで約10時間かけて徐冷する。次にセラミツク
管３の両端面にアルミナ〜ガラス粉末混合物を水
で練つた泥漿状接着剤７を塗布し、セラミツク管
３の端面と同一輪郭を有しリード線２挿通用孔５
を設けたアルミナその他適宜材質のセラミツク蓋
６，６をリード線２に挿通し接着剤７によつてセ
ラミツク管３の両端面に接着する。得られた成形
品を約５時間常温乾燥後再び炉に入れ、常温より
約１時間で約400℃に昇温し、約400℃に２時間維
持し、約３時間で約1200℃に昇温し、約1200℃に
30分間維持して接着剤７を焼結してセラミツク蓋
６，６をセラミツク管３に完全に接着し、常温ま
で約10時間かけて徐冷することにより白金抵抗細
線１をセラミツク管３内に焼結セラミツク４およ
びセラミツク蓋６，６によつて固定した計測器用
センサーを得る。 The present invention aims to improve the above-mentioned drawbacks, by inserting a thin resistance wire 1 with both ends connected to one end of the lead wires 2, 2 into the ceramic tube 3, and connecting the wires 1, 2, 2 with the ceramic tube 3. A ceramic powder 4 is filled into the gap, the ceramic powder 4 is fired, and a ceramic lid 6 having a hole 5 for passing the lead wire 2 is attached to the open end of the ceramic tube 3 using a ceramic adhesive 7. A sensor for a measuring instrument is obtained by sintering the adhesive 7 and molding it integrally. Examples will be described with reference to the drawings. Example 1 As shown in Fig. 2, a platinum lead wire 2 with a diameter of about 0.2 mm is attached to both ends of a thin resistance wire 1 made of a thin platinum wire with a diameter of 20 microns wound in a spiral shape with a diameter of about 0.35 mm. , 2 are connected by electric welding or the like, and the lead wires 2, 2 and the thin resistance wire 1 are connected to a ceramic tube 3 with an outer diameter of 0.7 mm and an inner diameter of 0.5 mm made of alumina, alumina-magnesia, silica-alumina, or other appropriate material. The thin platinum resistance wire 1 is inserted so as to fit the welded part, and the gap between the ceramic tube 3 and the platinum wires 1, 2, and 2 is filled with ceramic slurry, such as 95-60% alumina fine powder with a diameter of 2 microns or less, and alumina powder of 95 to 60% with a diameter of 2 microns or less. hard glass fine powder 5~40
% and kneaded in a ratio of 90 to 80 parts fine powder to 10 to 20 parts water.
Dry for ~48 hours to evaporate most of the water added to the fine powder. Then put it in the oven and heat it up from room temperature for about 1 hour.
Raise the temperature to 400℃, hold it at about 400℃ for 2 hours, raise the temperature to about 1200℃ in about 3 hours, hold it at about 1200℃ for 30 minutes, sinter or fire the ceramic powder 4, and then heat it to room temperature for about 10 minutes. Cool slowly over time. Next, a slurry-like adhesive 7 made by mixing alumina-glass powder mixture with water is applied to both end surfaces of the ceramic tube 3, and a hole 5 for inserting the lead wire 2, which has the same contour as the end surface of the ceramic tube 3, is applied.
Ceramic caps 6, 6 made of alumina or other suitable material are inserted into the lead wire 2 and bonded to both end surfaces of the ceramic tube 3 with an adhesive 7. After drying the obtained molded product at room temperature for about 5 hours, it is put into the oven again, and the temperature is raised from room temperature to about 400℃ in about 1 hour, maintained at about 400℃ for 2 hours, and then raised to about 1200℃ in about 3 hours. and to about 1200℃
The ceramic lids 6, 6 are completely bonded to the ceramic tube 3 by sintering the adhesive 7 for 30 minutes, and the thin platinum resistance wire 1 is placed inside the ceramic tube 3 by slowly cooling it to room temperature for about 10 hours. A measuring instrument sensor fixed by the sintered ceramic 4 and the ceramic lids 6, 6 is obtained.
実施例 ２
第３図および第４図に示す如く２本の透孔を穿
つたセラミツク製円柱体３ａを用意し、タングス
テンリード線２，２を両端に電気溶接したタング
ステン抵抗細線１を前記２本の透孔に溶着部が納
まるよう挿通し、セラミツク製円柱体３ａとタン
グステン線１，２，２との空隙部を埋めるようセ
ラミツク泥漿たとえばアルミナ微粉末を10〜20％
の水で練つた泥漿状均質混合物４を充填し、泥漿
４を常温乾燥後セラミツク製円柱体３ａの両端部
にセラミツク泥漿４と焼成時において相溶性のあ
る、たとえばアルミナ〜ガラス粉末混合物を水で
練つた接着剤７を塗布してタングステン抵抗細線
１の露出部を埋め、空洞部を有するセラミツク蓋
６ａを抵抗細線１のあらわれていた側の円柱体３
ａ端面に接着剤７によつて接着し、２本のリード
線挿通用孔５を設けたセラミツク蓋６ｂの孔５に
リード線２を通し、セラミツク蓋６ｂを接着剤７
によつて円柱体３ａ端面に接着する。得られた成
形品を約５時間常温乾燥し、次いでアルゴンガス
95％、水素ガス５％程度の雰囲気に保つた炉に入
れ、常温より約１時間で約400℃に昇温し、約400
℃に約２時間維持し、約３時間で約1200℃に昇温
し、約1200℃に約30分間維持してセラミツク混合
物４を焼成または焼結するとともにセラミツク接
着剤７を焼結し、常温まで約10時間かけて徐冷し
てタングステン抵抗細線１をセラミツク管３ａ内
に焼結セラミツク４およびセラミツク蓋６ａ，６
ｂによつて固定した計測器用センサーを得る。Example 2 As shown in FIGS. 3 and 4, a ceramic cylindrical body 3a with two through holes is prepared, and a thin tungsten resistance wire 1 with tungsten lead wires 2, 2 electrically welded to both ends is attached to the two. The welded part is inserted into the through hole, and ceramic slurry, such as alumina fine powder, is applied at a rate of 10 to 20% to fill the gap between the ceramic cylinder 3a and the tungsten wires 1, 2, and 2.
A slurry-like homogeneous mixture 4 kneaded with water is filled, and after drying the slurry 4 at room temperature, a mixture of alumina and glass powder, for example, which is compatible with the ceramic slurry 4 during firing, is added to both ends of the ceramic cylinder 3a with water. The kneaded adhesive 7 is applied to fill the exposed part of the tungsten resistance wire 1, and the ceramic lid 6a having a cavity is attached to the cylindrical body 3 on the side where the resistance wire 1 was exposed.
The lead wire 2 is pasted through the hole 5 of the ceramic lid 6b, which is bonded to the end surface a with an adhesive 7 and has two lead wire insertion holes 5, and the ceramic lid 6b is attached with the adhesive 7.
It is adhered to the end face of the cylindrical body 3a by using the cylindrical body 3a. The obtained molded product was dried at room temperature for about 5 hours, and then heated with argon gas.
95% hydrogen gas and 5% hydrogen gas, and the temperature was raised from room temperature to approximately 400℃ in approximately 1 hour.
℃ for about 2 hours, raised to about 1200℃ in about 3 hours, maintained at about 1200℃ for about 30 minutes to fire or sinter the ceramic mixture 4 and sinter the ceramic adhesive 7, and then heat it to room temperature. The thin tungsten resistance wire 1 is slowly cooled for about 10 hours until the sintered ceramic 4 and the ceramic lids 6a, 6 are placed inside the ceramic tube 3a.
A fixed measuring instrument sensor is obtained by b.
上記実施例において抵抗細線１には白金、タン
グステンを使用したが、それ以外にもニツケル、
ステンレス鋼、洋銀、燐青銅等抵抗の温度係数の
大きい任意の導線を使用することができる。但し
高温腐食性のある金属細線の場合は炉内を窒素、
アルゴン、水素等のガスで充満した雰囲気中で焼
成する。セラミツク管３の材料としてはムライ
ト、ジルコニア等のセラミツクあるいは金属を使
用することができ、セラミツクパウダー４の材料
としてはアルミナ、シリカ、マグネシア、石英ガ
ラス等またはその混和物を使用し得るが、セラミ
ツク管３と焼結セラミツク４と抵抗線１とは熱膨
脹係数が可及的等しくなるように夫々の材料を選
定し組合わせる必要がある。 In the above embodiment, platinum and tungsten were used for the resistance wire 1, but other materials such as nickel,
Any conductive wire with a high temperature coefficient of resistance, such as stainless steel, German silver, or phosphor bronze, can be used. However, in the case of thin metal wires that are corrosive at high temperatures, the inside of the furnace must be filled with nitrogen,
Firing is performed in an atmosphere filled with gases such as argon and hydrogen. Ceramics such as mullite and zirconia or metals can be used as the material for the ceramic tube 3, and alumina, silica, magnesia, quartz glass, etc. or mixtures thereof can be used as the material for the ceramic powder 4. 3, the sintered ceramic 4, and the resistance wire 1, it is necessary to select and combine their respective materials so that their coefficients of thermal expansion are as equal as possible.
本発明は上記の如くセラミツク管３の開口端に
予め成形したセラミツク蓋６を取付けセラミツク
パウダー４を封入したので、計測器用センサーを
簡易確実に正確な寸法に製造することができ、従
来の如く充填セラミツク４がセラミツク管両端部
に露出してその端面形状が歪みあるいはリード線
２にステムとなるリード線２ａを溶接する際充填
セラミツク４の露出部にクラツクを生じて測定精
度を低下させるおそれなく、流速計用センサー、
測温抵抗体、温度補償用センサーとして長期に亘
つて正確に迅速に温度または流速を測定し得る計
測器用センサーを得られる効果を有するものであ
る。 In the present invention, as described above, a pre-formed ceramic lid 6 is attached to the open end of the ceramic tube 3 and the ceramic powder 4 is enclosed, so that a sensor for a measuring instrument can be simply and reliably manufactured to an accurate size, and can be filled as required in the conventional method. There is no risk that the ceramic 4 will be exposed at both ends of the ceramic tube and its end face shape will be distorted, or that cracks will occur in the exposed portion of the filled ceramic 4 when welding the lead wire 2a that will become the stem to the lead wire 2, reducing measurement accuracy. current meter sensor,
This has the effect of providing a sensor for measuring instruments that can accurately and quickly measure temperature or flow rate over a long period of time as a resistance temperature detector or temperature compensation sensor.
第１図は従来の計測器用センサーの一例を示す
断面図、第２図および第３図は本発明により得ら
れた計測器用センサーの例を示す断面図、第４図
は第３図のＡ−Ａ線断面図である。
図中１は抵抗細線、２はリード線、３はセラミ
ツク管、４は焼結セラミツク、６はセラミツク蓋
を示す。
FIG. 1 is a sectional view showing an example of a conventional sensor for measuring instruments, FIGS. 2 and 3 are sectional views showing an example of a sensor for measuring instruments obtained according to the present invention, and FIG. 4 is a cross-sectional view showing an example of a conventional sensor for measuring instruments. It is an A-line sectional view. In the figure, 1 is a resistive thin wire, 2 is a lead wire, 3 is a ceramic tube, 4 is a sintered ceramic, and 6 is a ceramic lid.
Claims (1)
夫々接続したものをセラミツク管３内に挿通し、
セラミツク管３と線１，２，２との空隙にセラミ
ツクパウダー４を充填して該セラミツクパウダー
４を焼成し、セラミツク管３の開口端にリード線
２挿通用孔５を設けたセラミツク蓋６をセラミツ
ク質接着剤７により接着し、セラミツク質接着剤
７を焼結し一体的に成形することを特徴とする計
測器用センサーの製造方法。 ２ セラミツクパウダー４の焼成とセラミツク質
接着剤７の焼結とを最終工程において一緒に行な
う特許請求の範囲第１項記載の計測器用センサー
の製造方法。 ３ 計測器が流速計である特許請求の範囲第１項
または第２項記載の計測器用センサーの製造方
法。 ４ 計測器用センサーが測温抵抗体である特許請
求の範囲第１項または第２項記載の計測器用セン
サーの製造方法。 ５ 計測器用センサーが温度補償用センサーであ
る特許請求の範囲第１項または第２項記載の計測
器用センサーの製造方法。[Scope of Claims] 1. Both ends of a thin resistance wire 1 are connected to one end of lead wires 2, 2, respectively, and the wires are inserted into a ceramic tube 3,
A ceramic powder 4 is filled in the gap between the ceramic tube 3 and the wires 1, 2, 2, and the ceramic powder 4 is fired to form a ceramic lid 6 with a hole 5 for inserting the lead wire 2 at the open end of the ceramic tube 3. A method of manufacturing a sensor for a measuring instrument, characterized in that the sensors are bonded using a ceramic adhesive 7, and the ceramic adhesive 7 is sintered and integrally molded. 2. The method for manufacturing a sensor for a measuring instrument according to claim 1, wherein the firing of the ceramic powder 4 and the sintering of the ceramic adhesive 7 are performed together in the final step. 3. The method for manufacturing a sensor for a measuring instrument according to claim 1 or 2, wherein the measuring instrument is a current meter. 4. The method for manufacturing a sensor for a measuring instrument according to claim 1 or 2, wherein the sensor for a measuring instrument is a resistance temperature sensor. 5. The method for manufacturing a measuring instrument sensor according to claim 1 or 2, wherein the measuring instrument sensor is a temperature compensation sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5619882A JPS58172513A (en) | 1982-04-03 | 1982-04-03 | Sensor for measuring instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5619882A JPS58172513A (en) | 1982-04-03 | 1982-04-03 | Sensor for measuring instrument |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58172513A JPS58172513A (en) | 1983-10-11 |
| JPH0211850B2 true JPH0211850B2 (en) | 1990-03-16 |
Family
ID=13020416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5619882A Granted JPS58172513A (en) | 1982-04-03 | 1982-04-03 | Sensor for measuring instrument |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58172513A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61154536U (en) * | 1985-03-16 | 1986-09-25 | ||
| JP2003254799A (en) * | 2002-03-01 | 2003-09-10 | Yokogawa Electric Corp | Vortex flowmeter |
-
1982
- 1982-04-03 JP JP5619882A patent/JPS58172513A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58172513A (en) | 1983-10-11 |
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