JPS58172391U - 微動変位制御装置 - Google Patents

微動変位制御装置

Info

Publication number
JPS58172391U
JPS58172391U JP1982067771U JP6777182U JPS58172391U JP S58172391 U JPS58172391 U JP S58172391U JP 1982067771 U JP1982067771 U JP 1982067771U JP 6777182 U JP6777182 U JP 6777182U JP S58172391 U JPS58172391 U JP S58172391U
Authority
JP
Japan
Prior art keywords
laminate
outer cylinder
piezoelectric
control device
displacement control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1982067771U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0237279Y2 (enrdf_load_html_response
Inventor
一夫 伊藤
尚正 脇田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Priority to JP1982067771U priority Critical patent/JPS58172391U/ja
Publication of JPS58172391U publication Critical patent/JPS58172391U/ja
Application granted granted Critical
Publication of JPH0237279Y2 publication Critical patent/JPH0237279Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
JP1982067771U 1982-05-10 1982-05-10 微動変位制御装置 Granted JPS58172391U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1982067771U JPS58172391U (ja) 1982-05-10 1982-05-10 微動変位制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982067771U JPS58172391U (ja) 1982-05-10 1982-05-10 微動変位制御装置

Publications (2)

Publication Number Publication Date
JPS58172391U true JPS58172391U (ja) 1983-11-17
JPH0237279Y2 JPH0237279Y2 (enrdf_load_html_response) 1990-10-09

Family

ID=30077581

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982067771U Granted JPS58172391U (ja) 1982-05-10 1982-05-10 微動変位制御装置

Country Status (1)

Country Link
JP (1) JPS58172391U (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6214990U (enrdf_load_html_response) * 1985-07-09 1987-01-29

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6214990U (enrdf_load_html_response) * 1985-07-09 1987-01-29

Also Published As

Publication number Publication date
JPH0237279Y2 (enrdf_load_html_response) 1990-10-09

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