JPS58171637A - Cooling type photoelectric converter - Google Patents
Cooling type photoelectric converterInfo
- Publication number
- JPS58171637A JPS58171637A JP57054584A JP5458482A JPS58171637A JP S58171637 A JPS58171637 A JP S58171637A JP 57054584 A JP57054584 A JP 57054584A JP 5458482 A JP5458482 A JP 5458482A JP S58171637 A JPS58171637 A JP S58171637A
- Authority
- JP
- Japan
- Prior art keywords
- photoelectric converter
- heat insulating
- refrigerating machine
- cooling
- gas circulation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 title claims abstract description 27
- 238000006243 chemical reaction Methods 0.000 claims description 16
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000009413 insulation Methods 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 abstract description 3
- 238000007789 sealing Methods 0.000 abstract description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 2
- 239000004020 conductor Substances 0.000 abstract description 2
- 230000010355 oscillation Effects 0.000 abstract 4
- 230000008878 coupling Effects 0.000 abstract 3
- 238000010168 coupling process Methods 0.000 abstract 3
- 238000005859 coupling reaction Methods 0.000 abstract 3
- 238000004140 cleaning Methods 0.000 abstract 1
- 239000011889 copper foil Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 13
- 238000001514 detection method Methods 0.000 description 11
- 239000001307 helium Substances 0.000 description 7
- 229910052734 helium Inorganic materials 0.000 description 7
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 7
- 239000007788 liquid Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003507 refrigerant Substances 0.000 description 2
- 201000000680 ankyloglossia Diseases 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000003236 psychic effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
- G01J5/061—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by controlling the temperature of the apparatus or parts thereof, e.g. using cooling means or thermostats
Abstract
Description
【発明の詳細な説明】
（ａ） 発明の技術分野
本発明はガス循環型冷凍機等の冷却装置を用いた冷却型
光電変換装置に係り、特にガス循環型冷凍機で発生する
駆動振動が装置の光電変換素子に伝わることを防止する
ようにしたガス循環型冷凍機の取付は構造に関するもの
である。Detailed Description of the Invention (a) Technical Field of the Invention The present invention relates to a cooling type photoelectric conversion device using a cooling device such as a gas circulation type refrigerator, and in particular, the present invention relates to a cooling type photoelectric conversion device using a cooling device such as a gas circulation type refrigerator. The installation of a gas circulation type refrigerator that prevents the transmission of gas to the photoelectric conversion element is related to the structure.
（′ｂ）技術の背景
半導体の光電、効果を利用した光電変換装置、特に長波
長の赤外線領域で用いられる赤外線検知装置は、その赤
外線検知素子を常温よりも通かに低温に冷却しないと良
好に動作しないことから、一般に外管と内管からなるデ
ユワ構造の断熱容器を用い、該外筒の一部に設けられた
透光窓に対向する内管の真空側管壁に赤外線検知素子を
配置し、前記内管内に液体窒素等からなる液状冷媒を収
容するか、あるいはヘリウムガス循環型冷凍機のクーリ
ングロッドを挿設して前記検知素子を所定の低温動作温
度にまで冷却し、良好に動作せしめる構成がとられてい
る。('b) Background of the technology Photoelectric conversion devices that utilize the photoelectric effect of semiconductors, especially infrared detection devices used in the long wavelength infrared region, do not work well unless the infrared detection element is cooled to a temperature significantly lower than room temperature. Generally, an insulated container with a dewar structure consisting of an outer tube and an inner tube is used, and an infrared detection element is installed on the vacuum side wall of the inner tube, which faces a transparent window provided in a part of the outer tube. The sensing element is cooled down to a predetermined low operating temperature by storing a liquid refrigerant such as liquid nitrogen in the inner tube, or by inserting a cooling rod of a helium gas circulation type refrigerator. A configuration is in place to make it work.
Ｕ 従来技術と問題点
ところで上述の如き構成の冷却型赤外線検知装置の中で
ヘリウムガス循環型冷凍機を用いて検知素子を低温動作
せしめる赤外線検知装置にあっては、液状冷媒を動作途
中において補給することなく長時間にわたって検知素子
を所要低温に維持して連続的に動作させることが可能で
あるといったすぐれた利点を有する反面、前記冷凍機に
おけるＨｅガスを圧縮、断熱膨張し、寒冷を発生させる
駆動部で発生する微小な振動が、断熱容器を介して直接
赤外線検知素子に伝わり、その結果ノイズが発生し、当
該赤外線検知素子の検出特性を悪化させる欠点があった
。U. Prior Art and Problems By the way, among the cooling-type infrared detection devices configured as described above, infrared detection devices that use a helium gas circulation refrigerator to operate the detection element at a low temperature require replenishment of liquid refrigerant during operation. While it has the excellent advantage of being able to maintain the sensing element at a required low temperature and operate it continuously for a long period of time without having to do so, it also compresses and adiabatically expands the He gas in the refrigerator to generate cold. The minute vibrations generated in the drive section are directly transmitted to the infrared sensing element through the heat insulating container, resulting in noise, which has the drawback of deteriorating the detection characteristics of the infrared sensing element.
ｆｄ、） 発明の目的
本発明は、上述の点に鑑みなされ念もので、その目的は
、光電変換素子を配設したデユワＷｔ造の断熱容器に対
し、ヘリウムガス循環型冷凍機の振動を防止し得るよう
にし友構造の新規な冷却型光電変換装置を提供せんとす
るものである。fd,) Purpose of the Invention The present invention was conceived in view of the above-mentioned points, and its purpose is to prevent vibrations of a helium gas circulation type refrigerator in an insulated container made of Duwa Wt in which a photoelectric conversion element is disposed. It is an object of the present invention to provide a novel cooling type photoelectric conversion device having a double-sided structure.
（θ）発明の構成
上記目的を達成する之め１本発明に係る冷却型光電変換
装置は、透光窓を設けた外管と、該透光窓に対向して冷
却基台を介して半導体光ｔｉ変換素子を配設した内管よ
りなり、かつその内外両管の間の空間を真空としたデユ
ワ構造のＩＩｔｒ熱容器内容器内循環型冷凍機のクーリ
ングロッドを気留に伸設してなる構成において、前記断
熱容器とガス循環型冷凍機との間に除振用のベロ一連結
具を介在してなることを特徴とするものである、（ト）
発明の実施例
以下図面を用いて本発明の好ましい実施例について詳細
に説明する。(θ) Structure of the invention To achieve the above objects 1. A cooled photoelectric conversion device according to the present invention includes an outer tube provided with a light-transmitting window, and a semiconductor device connected to the semiconductor via a cooling base opposite to the light-transmitting window. The cooling rod of the intra-vessel circulation type refrigerator inside the IItr heat vessel, which has a dewar structure and consists of an inner tube equipped with an optical Ti conversion element, and which has a vacuum in the space between the inner and outer tubes, is installed in a pneumatic manner. (g) The structure is characterized in that a vibration-isolating tongue chain is interposed between the heat insulating container and the gas circulation type refrigerator.
DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described in detail below with reference to the drawings.
図は本発明を適用した冷却型赤外線検知装置の一＊施例
を示す要部断面図であり、図ｆおいてｌは透光窓４をそ
なえた外管２と該透光窓４に対向して冷却基台５をもう
けた内管３からなり、かつ該内外両管２．８間の空間を
真空としたデユワ構造の断熱容器であり、該冷却基台５
の真空側に赤外線検知素子６が取付けられている。該検
知素子６からの信号出力はリード線７により外管２に該
管壁の１部を横断する形に封着された環状円板形のセフ
ミック板８の外部リード端子９より取り出される。そう
してかかる構成において前記検知素子６ｔ−冷却基台５
１に介して低温に冷却するヘリウムガス循環型冷凍機１
０は、前記内管３内の冷却基台５の背面に対し該冷凍機
１０のクーリングロッド１１を例えば熱伝導のよい銅箔
を積層した帯状熱伝導体と連結され、かつスプリングと
組合せたクーリングヘッド１２を介在して圧接した従来
の連結構造に加えて、前記断熱容器ｌの封着フフンジ部
１３に伸縮自在な防振用ペロ一連結１４１４を介在して
前記冷凍機１０をねじｌδによって取付けた構造がとら
れている。The figure is a cross-sectional view of a main part showing one example of a cooled infrared detection device to which the present invention is applied. It is an insulating container with a dewar structure, consisting of an inner tube 3 with a cooling base 5 formed thereon, and the space between the inner and outer tubes 2.8 is evacuated, and the cooling base 5 is
An infrared detecting element 6 is attached to the vacuum side of. A signal output from the detection element 6 is taken out from an external lead terminal 9 of an annular disc-shaped cefmic plate 8 which is sealed to the outer tube 2 so as to cross a part of the tube wall by a lead wire 7. In such a configuration, the sensing element 6t-cooling base 5
Helium gas circulation type refrigerator 1 cooled to low temperature through 1
0 is a cooling device in which the cooling rod 11 of the refrigerator 10 is connected to the back surface of the cooling base 5 in the inner tube 3 with a band-shaped heat conductor made of laminated copper foil with good thermal conductivity, for example, and is combined with a spring. In addition to the conventional connection structure in which the head 12 is interposed and pressure-welded, the refrigerator 10 is attached to the sealing flange portion 13 of the heat insulating container l with a retractable vibration-proofing perforator connection 1414 via a screw lδ. A similar structure has been adopted.
かくして前記断熱容器ｌにベロ一連結具１４を介シテヘ
リウムガス冷凍機ｌＯのクーリングロッド１ｌｔｌ−挿
設固定することにより、該冷＃１１ｆｌｌＯにおいて発
生する振動が、前記ベロ一連結具１４によって減衰消勢
され、かつ前記冷却基台５とクーリングロッド１２との
連結構造とも相俟って断熱容器ｌ側に伝搬することが容
易に防止されるので赤外線検知素子６が振動するといっ
た不都合を排除することが可能となる。Thus, by inserting and fixing the cooling rod 1ltl of the helium gas refrigerator lO into the heat insulating container l through the tongue series connector 14, the vibrations generated in the cold #11flO are attenuated and extinguished by the tongue series connector 14. Coupled with the connection structure between the cooling base 5 and the cooling rod 12, it is easy to prevent the infrared rays from propagating toward the heat insulating container l side, thereby eliminating the inconvenience that the infrared detecting element 6 vibrates. becomes possible.
なお上述の実施例では、光電変換素子として赤外線検知
素子を用いた場合の例について説明したが、本発明はか
かる素子に限定されるものではなく、低温冷却を必要と
する赤外線レーザ素子等を実装した冷却型光電変換装置
等にも適用可能なことはいうまでもない。In the above-mentioned embodiment, an example was explained in which an infrared detection element was used as a photoelectric conversion element, but the present invention is not limited to such an element, and can also be implemented with an infrared laser element etc. that requires low-temperature cooling. Needless to say, the present invention can also be applied to cooled photoelectric conversion devices.
（２）発明の効果
以上の説明から明らかなように本発明に係る冷却型光電
変換装置によれば、装置の主体をなす断熱容器とヘリウ
ムガス循環型冷凍機との間に伸縮自在なベロ一連結具を
介在させた構造がとられているので、該冷凍機の振動が
断熱容器内に配設された光電変換素子に伝わることが排
除され、光電変換装置の性能を向上することができる優
れ念利点を有し、実用上きわめて有益である。(2) Effects of the Invention As is clear from the above explanation, according to the cooled photoelectric conversion device of the present invention, there is a flexible tongue between the heat insulating container, which is the main body of the device, and the helium gas circulation refrigerator. Since the structure includes a connector, it is possible to prevent the vibrations of the refrigerator from being transmitted to the photoelectric conversion element disposed inside the heat insulating container, which is an advantage in improving the performance of the photoelectric conversion device. It has psychic benefits and is extremely useful in practice.
図は本発明に係る冷却型光電変換装置の一実施例の構造
を示す要部縦断面図である。
図において１は断熱容器、２は外管、ＢＶｉ内管、４は
透光窓、５は冷却基台、６Ｆｉ赤外線検知素子、１０は
ヘリウムガス循環型冷凍機、１１はクーリングロッド、
１２はクーリングヘッド、１３ａ封着フランジ部、１４
は防振用ベロ一連結具を示す。The figure is a longitudinal sectional view of a main part showing the structure of an embodiment of a cooling type photoelectric conversion device according to the present invention. In the figure, 1 is a heat insulating container, 2 is an outer tube, BVi inner tube, 4 is a transparent window, 5 is a cooling base, 6Fi infrared detection element, 10 is a helium gas circulation refrigerator, 11 is a cooling rod,
12 is a cooling head, 13a is a sealing flange portion, 14
indicates a series of vibration-proof tongue ties.
Claims (1)
介し半導体光電変換素子を配設した内管よりなり、かつ
その内外両管の間の空間を真空としたデユワ構造の断熱
容器内に、ガス循環型冷凍機のクーリングロッドを気密
に挿設してなる構成において、前記断熱容器とガス循環
型冷凍機との間に除振用のベロ一連結具を介在してなる
ことを特徴とする冷却型光電変換装置。A duplexer consisting of an outer tube with a light-transmitting window and an inner tube with a semiconductor photoelectric conversion element disposed opposite the light-transmitting window via a cooling base, and the space between the inner and outer tubes is evacuated. In a structure in which a cooling rod of a gas circulation type refrigerator is airtightly inserted into an insulated container of the structure, a vibration-isolating tongue series connection device is interposed between the insulation container and the gas circulation type refrigerator. A cooled photoelectric conversion device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57054584A JPS58171637A (en) | 1982-03-31 | 1982-03-31 | Cooling type photoelectric converter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57054584A JPS58171637A (en) | 1982-03-31 | 1982-03-31 | Cooling type photoelectric converter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58171637A true JPS58171637A (en) | 1983-10-08 |
Family
ID=12974751
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57054584A Pending JPS58171637A (en) | 1982-03-31 | 1982-03-31 | Cooling type photoelectric converter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58171637A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010133811A (en) * | 2008-12-04 | 2010-06-17 | Jecc Torisha Co Ltd | Heat insulated type calorimeter |
-
1982
- 1982-03-31 JP JP57054584A patent/JPS58171637A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010133811A (en) * | 2008-12-04 | 2010-06-17 | Jecc Torisha Co Ltd | Heat insulated type calorimeter |
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