JPS58169026A - 長さ又は角度の電気的なデジタル測定装置 - Google Patents

長さ又は角度の電気的なデジタル測定装置

Info

Publication number
JPS58169026A
JPS58169026A JP58040848A JP4084883A JPS58169026A JP S58169026 A JPS58169026 A JP S58169026A JP 58040848 A JP58040848 A JP 58040848A JP 4084883 A JP4084883 A JP 4084883A JP S58169026 A JPS58169026 A JP S58169026A
Authority
JP
Japan
Prior art keywords
measuring
scale
measuring device
scanning
scanning unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP58040848A
Other languages
English (en)
Japanese (ja)
Inventor
ギユンテル・ネ−レ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Publication of JPS58169026A publication Critical patent/JPS58169026A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24428—Error prevention
    • G01D5/24433—Error prevention by mechanical means
    • G01D5/24442—Error prevention by mechanical means by mounting means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471—Error correction
    • G01D5/24485—Error correction using other sensors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length-Measuring Instruments Using Mechanical Means (AREA)
JP58040848A 1982-03-25 1983-03-14 長さ又は角度の電気的なデジタル測定装置 Pending JPS58169026A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19823210962 DE3210962A1 (de) 1982-03-25 1982-03-25 Laengen- oder winkelmesssystem
DE32109628 1982-03-25

Publications (1)

Publication Number Publication Date
JPS58169026A true JPS58169026A (ja) 1983-10-05

Family

ID=6159261

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58040848A Pending JPS58169026A (ja) 1982-03-25 1983-03-14 長さ又は角度の電気的なデジタル測定装置

Country Status (5)

Country Link
US (1) US4475289A (enExample)
EP (1) EP0090139B1 (enExample)
JP (1) JPS58169026A (enExample)
AT (1) ATE17039T1 (enExample)
DE (1) DE3210962A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3216616C2 (de) * 1982-05-04 1985-06-27 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Elektrisches Längen- oder Winkelmeßsystem
AT395070B (de) * 1983-11-22 1992-09-10 Emr Elektronische Mess Und Reg Laengenmesseinrichtung, insbesondere gekapselte laengenmesseinrichtung
AT379449B (de) * 1984-07-03 1986-01-10 R S F Elektronik Ohg Rechtsfor Laengenmesseinrichtung
US4974332A (en) * 1988-08-19 1990-12-04 Delta International Machinery Corp. Measurement system reader element standoff
AT394110B (de) * 1989-02-10 1992-02-10 Rsf Elektronik Gmbh Laengenmesssystem
US7197828B2 (en) * 2005-05-31 2007-04-03 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing FPD chuck Z position measurement
DE102009026492A1 (de) * 2009-05-27 2011-03-03 Robert Bosch Gmbh Handwerkzeug
DE102011007459B4 (de) 2011-04-15 2023-05-11 Dr. Johannes Heidenhain Gmbh Optische Längenmesseinrichtung
EP3228993B1 (de) * 2016-04-05 2018-08-01 Dr. Johannes Heidenhain GmbH Längenmesseinrichtung

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US226162A (en) * 1880-04-06 Island
DE853657C (de) * 1944-09-05 1952-10-27 Leitz Ernst Gmbh Vorrichtung zur Berichtigung der aus dem Geraet sich ergebenden Mess-fehler von mit optischen Messeinrichtungen versehenen Maschinen und Instrumenten
DE2712422C2 (de) * 1977-03-22 1978-11-09 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Längenmeßeinrichtung
DE2724858A1 (de) * 1977-06-02 1978-12-07 Heidenhain Gmbh Dr Johannes Laengenmessgeraet mit korrektureinrichtung
DE2810341C2 (de) * 1978-03-10 1980-01-31 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Längenmeßeinrichtung
DE2820753C2 (de) * 1978-05-12 1980-03-06 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Einrichtung zur Fehlerkorrektur bei Positionsmeßsystemen
DE2844066C2 (de) * 1978-10-10 1982-04-22 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Längen- oder Winkelmeßeinrichtung
DD142522B1 (de) * 1978-11-14 1981-12-30 Trepte Klaus Dieter Einrichtung zur korrektur eines maschinengesamtfehlers

Also Published As

Publication number Publication date
EP0090139B1 (de) 1985-12-18
DE3210962A1 (de) 1983-10-20
EP0090139A1 (de) 1983-10-05
ATE17039T1 (de) 1986-01-15
US4475289A (en) 1984-10-09
DE3210962C2 (enExample) 1987-10-01

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