JPS58167987A - Particle beam position detector - Google Patents
Particle beam position detectorInfo
- Publication number
- JPS58167987A JPS58167987A JP5081882A JP5081882A JPS58167987A JP S58167987 A JPS58167987 A JP S58167987A JP 5081882 A JP5081882 A JP 5081882A JP 5081882 A JP5081882 A JP 5081882A JP S58167987 A JPS58167987 A JP S58167987A
- Authority
- JP
- Japan
- Prior art keywords
- particle beam
- grid electrode
- collector
- particle
- intensity distribution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Measurement Of Radiation (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明は、例えば被融合装置のプラズマ温度を上昇する
丸めの中性粒子入射装置等に使用される能動粒子源（Ｎ
Ｊｉｌ ）の粒子ビームの入射位置を検出する装置に関
する。Detailed Description of the Invention [Technical Field of the Invention] The present invention relates to an active particle source (N
Jil) relates to a device for detecting the incident position of a particle beam.
核融合装置に使用畜れる能動粒子源の粒子ビームの入射
位置の検出は、第１図に示すように大径のファラデーカ
ッグ１に粒子ビーム２を入射させ、そのビーム強度を電
流値に変換してビーム位置を検出するようｋしてい丸。To detect the incident position of the particle beam of an active particle source used in a nuclear fusion device, as shown in Figure 1, the particle beam 2 is incident on a large-diameter Faraday cag 1, and the beam intensity is converted into a current value. mark to detect the beam position.
ところがこのような鉄酸では、能動粒子源の粒子ビーム
が一般に２次元的な広が）をもって照射されるため、粒
子ビーム２の中心と７ァラデ一カ、グ１の中心とが一致
しているかどうかを正確に判定することが困難であシ、
粒子ビーム２０入射位置・及びその入射面内における強
度分布を高精度に検出する°ことがで龜なかり゛た。However, with such ferric acid, the particle beam from the active particle source is generally irradiated with a two-dimensional spread, so the center of particle beam 2 and the center of particle beam 1 coincide with each other. It is difficult to accurately determine whether
It was not possible to detect the incident position of the particle beam 20 and the intensity distribution within the incident plane with high accuracy.
本発明は、２次元的な広がシをもって照射される粒子ビ
ームの位置及びその入射面内における強度分布を高精度
に検出し、かつ画像表示することができる粒子ビーム位
置検出装置を提供することを目的とする。An object of the present invention is to provide a particle beam position detection device capable of highly accurately detecting the position of a particle beam irradiated with a two-dimensional spread and the intensity distribution within its incident plane, and displaying the image. With the goal.
本発明に係る粒子ビーム位置検出装置は、金網状をなし
２次元的な広がシを奄りた粒子ビームを表１ｉｉｉ肯よ
シ裏面側へ挿通させる平面的なグリッド電極と、このグ
リ、ド電極の裏面側に軸方向をグリッド電極に直交させ
てマトリックス状に配列され九複数の円筒形コレクタと
、各コレクタの前記グリッド電極と反対肯の端面に接触
して配設され各コレクタを一通過した前記粒子ビームを
入射させそのビーム強度に応じた電気信号を出力する複
数のアノードと、これらのアノードよ少入力され良電気
信号を画像信号に変換する信号処理回路と、この信号処
理回路よ少入力された画像信号にもとづいて前記粒子ビ
ームの強度分布を表示する表示装置とを具備してなるも
のである拳
〔発明の実施例〕
第２図は本発明の一実施例を示すもので、図中１１は２
次元的な広がシをもって照射される粒子ビームである。The particle beam position detection device according to the present invention includes a flat grid electrode through which a particle beam having a wire mesh shape and a two-dimensional spread is passed from the front side to the back side, and the grid electrode and the grid electrode. A plurality of nine cylindrical collectors arranged in a matrix with the axial direction perpendicular to the grid electrode on the back surface side of the electrode, and a plurality of cylindrical collectors disposed in contact with the end face opposite to the grid electrode of each collector and passing through each collector once. a plurality of anodes that input the particle beam and output electrical signals corresponding to the beam intensity; a signal processing circuit that receives a small number of input signals from these anodes and converts the electrical signals into image signals; A fist comprising a display device that displays the intensity distribution of the particle beam based on an input image signal [Embodiment of the Invention] FIG. 2 shows an embodiment of the present invention. 11 in the diagram is 2
This is a particle beam that is irradiated with a dimensional spread.
ｔ＊、−中１２はこの粒子ビーム１１の入射位置及びそ
の強度分布を検出し、かつ表示する粒子ビーム位置検出
装置であって、この装置１２０粒子ビーム入射面には、
粒子ビーム１１を十分挿通させうる粗目の金網状をなす
グリ、ド電＠ＪＪが平面的に配設されている。t*, - 12 is a particle beam position detection device that detects and displays the incident position of the particle beam 11 and its intensity distribution, and the particle beam entrance surface of this device 120 has:
A wire mesh-like grid, which allows the particle beam 11 to penetrate sufficiently, is arranged in a plane.
このグリ、ド電極１１は電＃１４に接続され負のバイア
ス電圧が勾加されている。を九前記グリ、ド電極１３の
裏面側には耐熱性ｅ（優れたセラミ、り勢による絶縁性
のコレクタ保持板１５が配設されている。このコレクタ
保持板１６は第３図に示すようにマトリックス状に配列
して穿設された多数の孔１６・・・を有するもので、そ
。This grid electrode 11 is connected to voltage #14 and a negative bias voltage is applied thereto. On the back side of the negative electrode 13, there is provided a collector holding plate 15 made of heat-resistant ceramic (made of excellent ceramic material), which is insulated by tension. It has a large number of holes 16 arranged in a matrix.
れらの合孔１６′・・・には第４図に示すように４ＩＩ
Ｌ金属＠Ｃ）円筒形マルテテ°ヤンネル２次元コレクタ
１１・・・が嵌合されている拳これらのコレクタ１７・
・・の材質としては、対高温特性の嵐い例えばタングス
テン又はモリブデン等が使用される。These matching holes 16'... have 4II holes as shown in FIG.
L metal @ C) Cylindrical maltete ° Jannel two-dimensional collector 11... is fitted into these collectors 17.
As for the material, a material having high temperature resistance properties such as tungsten or molybdenum is used.
そして前記コレクタ保持板１１の裏ｔｈｉＩＩＫはセラ
ミ、りでで龜た多層のプリント配線基板１８が配設され
ておシ、この基板１８のｉＩ面には前記各；レクタ１１
・・・の下端に直接接触して各コレクタ１１・・・Ｋ！
Ｉ続されかつ相互に絶縁された円形平板状の多数のアノ
ード１９・・・と、各アノード１ｇ・・・に接続され良
信号゛引出し用の配線ノｌターン２０・・・とが設けら
れている。そして前記各アノード１９・・・には配線基
板１８の１１面に引出された配置Ｉ／ｆターン２０・・
・を介してマルチチャンネルアン７”ＪＪ・・・が接ａ
され、さらにそのアｙｆｘｚ・・・を介して行方向と列
方向とに分かれて２つの信号処理回路２２°゛、２２が
接続されている。まえ、両信号処理回路ｘ２．；１２に
は表示装置２１が接続され、さらにこの表示装置２Ｊを
介して計算機２４が接続されている。A multilayer printed wiring board 18 made of ceramic or resin is disposed on the back side of the collector holding plate 11, and on the iI side of this board 18, each of the collectors 11
Each collector 11...K!
A large number of circular plate-shaped anodes 19 connected to each other and insulated from each other are provided, and a wiring turn 20 connected to each anode 1g for extracting a good signal is provided. There is. Each of the anodes 19... has I/F turns 20 drawn out on the 11th surface of the wiring board 18.
・Multi-channel antenna 7”JJ... is connected via
Further, two signal processing circuits 22° and 22 are connected in the row direction and column direction via the eyes yfxz, . . . . In front, both signal processing circuits x2. 12 is connected to a display device 21, and further connected to a computer 24 via this display device 2J.
次に、以上の如く構成され九粒子ビーム位置検出装置１
２０作用を説明する。まずグリッド電極ＪＪＫ例えば−
５０〜−１００Ｖｉｉ度の負電圧を印加する。ｔた各コ
レクタ１７・・・内を高真空状１ｉＫ排気してお龜、グ
リッド電極ＪＪの表面に、正電位に帯電された、例えば
プロトン（Ｈ”）ビーム、重水素（Ｐ＋）ビーム、ヘリ
ウム（）ｉ＠”）ビーム等の粒子ビーム１１を照射する
と、このグリッド電極ＩＪは平面的な形状をもつもの゛
であるから、２次元的な広がシをもつ粒子ビーム１１の
入射を確実に受けることがで龜る・まだ粒子ビーム１１
″が高速でコレクタ１１に入射すると自コレクタ１１か
ら電子を放出するが、グリッド電極１３は負電位に保た
れているので放出された電子をコレクタ１１へ押戻す作
用を果している。また各円筒形コレクタ１７・・・は１
個１個がファラデーカ、グの役目を果し、粒子ビーム１
１は各円筒形コレクタ１１・・・を通してアノード１９
・・・Ｋ入射する。そこで、各アノード１＃・・・は、
個々に入射し九粒子ビームの強度に比例し走電流をアン
プ２１・・・へ流す。Next, the nine-particle beam position detection device 1 configured as described above will be described.
20.Explain the action. First, grid electrode JJK for example -
A negative voltage of 50 to -100 Vii degrees is applied. The interior of each collector 17 is evacuated to a high vacuum state of 1iK, and a positively charged beam, such as a proton (H'') beam, deuterium (P+) beam, or helium, is applied to the surface of the grid electrode JJ. When a particle beam 11 such as a ()i@”) beam is irradiated, since this grid electrode IJ has a planar shape, it ensures that the particle beam 11 with a two-dimensional spread is incident. Particle beam 11 still slows down due to receiving
'' enters the collector 11 at high speed, it emits electrons from its own collector 11, but since the grid electrode 13 is kept at a negative potential, it functions to push the emitted electrons back to the collector 11.In addition, each cylindrical Collector 17...is 1
Each particle plays the role of Faradeka, and the particle beam 1
1 is an anode 19 through each cylindrical collector 11...
...K is incident. Therefore, each anode 1#...
A traveling current proportional to the intensity of the nine particle beams incident on each beam is sent to the amplifier 21 .
このと素粒子ビーム１１の、入射面（すなわちグリ、ド
電＠Ｐｉ１３の表面）内における強度分布は、アノード
１９・・・において電流の強−分布に変換され、さらに
アン７’ＪＪ・・・で増幅されて信号処理回路ｉ：ｔｔ
、ｘｚに送出されることになる。そして信号処理回路ｉ
ｓ 、 ２７においてサングルホールドされ九後Ａ／Ｄ
変供され、粒子ビーム１１０２次元釣人がシに対、応し
た信号処理、回路３２．２２内の２次元メモリに画像信
号として記憶される。そこで、このｉ！ｉ儂信号は表示
装置２３へ入力されて２次元表示されるとともに、計算
機２４へ入力される。そしてこの計算機２４では電流の
ピーク値を検出し、そのピーク値に対応するコレクタ１
１から粒子ビーム１１の中心位置が算出されるので、粒
子ビーム１１の位置及びその入射面内における強度分布
をｌｌ１ｉｂ棺度に検出することができる。At this time, the intensity distribution of the elementary particle beam 11 within the incident plane (i.e., the surface of the doped electric @Pi 13) is converted into an intensity distribution of current at the anodes 19... and further anodes 19... signal processing circuit i:tt
, xz. and signal processing circuit i
s, Sangle hold at 27 and 9th A/D
The particle beam 110 is converted into a two-dimensional beam, and corresponding signal processing is performed and stored as an image signal in the two-dimensional memory in the circuit 32.22. So this i! The i-signal is input to the display device 23 for two-dimensional display, and is also input to the computer 24. Then, this calculator 24 detects the peak value of the current, and selects the collector 1 corresponding to the peak value.
Since the center position of the particle beam 11 is calculated from 1, the position of the particle beam 11 and its intensity distribution within the plane of incidence can be detected accurately.
以上詳述し九ように、本発明に係る粒子ビーム位置検出
装置によれば、入射面に、金網状をなす平面的なグリ、
ド電也が配置されているので、２次元的な広がシをもつ
粒子ビーム１１の照射をその表ｔＪＫ＠夷に受けること
ができる。As described in detail above, according to the particle beam position detection device according to the present invention, the plane grid having a wire mesh shape is provided on the incident surface.
Since the electron beams are arranged, the surface thereof can be irradiated with the particle beam 11 having a two-dimensional spread.
また、グリッド電極の皇面肯には複数の円筒形コレクタ
を、それらの軸方向をグリッド電極に直交させてマトリ
ックス状に配列し、かつｌレクタの、前記グリッド電極
と反対側の図面にはアノードを接触させているので、グ
リッド電極を通過した粒子ビームを、各コレクタを通し
て各アノードへ確実に入射させることかで龜る。Further, on the opposite side of the grid electrode, a plurality of cylindrical collectors are arranged in a matrix with their axial directions perpendicular to the grid electrode, and on the opposite side of the collector from the grid electrode, an anode is arranged. Since the grid electrodes are in contact with each other, it is difficult to ensure that the particle beam that has passed through the grid electrode is incident on each anode through each collector.
そして各アノードよ）、その粒子ビームのビーム強度に
応じた電気信号を出力させ、その電気信号にもとづき、
信号処理回路よシ画像信号を表示装置へ入力させ−〔、
粒子ビームの位置及びその入射面内における強度分布を
２次元表示することができる。従ってビーム位置及び強
度分布１を高精度に検出することができ、目動粒子―の
粒子ビーム軸合せも容易となる。Then, each anode) outputs an electrical signal corresponding to the beam intensity of the particle beam, and based on that electrical signal,
The signal processing circuit inputs the image signal to the display device.
The position of the particle beam and its intensity distribution within the plane of incidence can be displayed two-dimensionally. Therefore, the beam position and intensity distribution 1 can be detected with high precision, and particle beam axis alignment of the moving particles is also facilitated.
第１図は背景技術の説明図、第２図は本発明の一実施例
を示す粒子ビーム位置検出輌皺の概略構成図、第３図は
同実施例の一部を取出して示す平面図、＃ｇ４図は同冥
施例の部分斜視−である。
１１・・・粒子ビーム、１２・・・粒子ビーム位置検−
出装置、１３・・・グリ、ド電極、１１・・・円筒形コ
レクタ、１９・・・アノード、２２・・・信号処１１１
１ｇ回路、２１・・・表示装置。
出願人代理人 弁理士 鈴 江 武 彦牙１図FIG. 1 is an explanatory diagram of the background art, FIG. 2 is a schematic configuration diagram of a particle beam position detection vehicle wrinkle showing an embodiment of the present invention, and FIG. 3 is a plan view showing a part of the embodiment. Figure #g4 is a partial perspective view of the same example. 11...Particle beam, 12...Particle beam position detection-
Output device, 13... Grid, electrode, 11... Cylindrical collector, 19... Anode, 22... Signal processing 111
1g circuit, 21...display device. Applicant's agent Patent attorney Takeshi Suzue Hikoga 1
Claims (3)
ビームを表面匈よ〕裏面側へ挿通させる平 ３゜面的
なグリッド電極と、このグリッド電極の裏面側に軸方向
をグリッド電極に直交させてマトリッタス状に配ダ１ｊ
され九複数の円筒形；レクタと、各コレクタの前記グリ
、ｔ／電極と反対側の端面ＫＩ［＋触して配設され各コ
レクタを通過した一紀粒子ｅ−ムを入射させそのビーム
強度に応じ良電気信号を出力する複数のアノードと、こ
れらのアノードより入力された電気信号を画像信号に変
換する信号処理回路と、この信号処理回路よシ入力され
た画像信号にもとづいて紡紀粒子ビームの強度分布を表
示する表示装置とを具備し九ことを％黴とする粒子゛ビ
ーム位置検出装置―(1) A flat 3° grid electrode that has a wire mesh shape and a nine-particle beam with a two-dimensional spread 9 is passed from the surface to the back side, and a grid that runs in the axial direction on the back side of this grid electrode. Arranged in a matrittas shape perpendicular to the electrode 1j
A plurality of cylindrical collectors; each collector has an end surface KI on the opposite side to the electrode; A plurality of anodes that output electrical signals, a signal processing circuit that converts the electrical signals input from these anodes into image signals, and a spin particle beam based on the input image signals from this signal processing circuit. and a display device for displaying the intensity distribution of the particle beam, the particle beam position detection device being equipped with a display device that displays the intensity distribution of the particle.
したことを特徴とする特許請求の範囲第（１）項記載の
粒子ビー五位置検出装置。(2) The particle bee five-position detection device according to claim (1), wherein the cylindrical collector is made of tungsten.
九ことを特徴とする特許請求の範囲鮪（１）項記載の粒
子ビーム位置検出装置・(3) The particle beam position detection device according to claim (1), wherein the cylindrical collector is made of molybdenum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5081882A JPS58167987A (en) | 1982-03-29 | 1982-03-29 | Particle beam position detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5081882A JPS58167987A (en) | 1982-03-29 | 1982-03-29 | Particle beam position detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58167987A true JPS58167987A (en) | 1983-10-04 |
Family
ID=12869337
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5081882A Pending JPS58167987A (en) | 1982-03-29 | 1982-03-29 | Particle beam position detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58167987A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60167248A (en) * | 1984-02-10 | 1985-08-30 | Jeol Ltd | Electron microscope |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5148975A (en) * | 1974-10-25 | 1976-04-27 | Tokyo Shibaura Electric Co | SOSAKADENRYUSHIBIIMUNO BUNPUSOKUTE ISOCHI |
| JPS5571970A (en) * | 1978-11-07 | 1980-05-30 | Thomson Csf | Divice for visualizing current density distribution in electric charge particle beam |
-
1982
- 1982-03-29 JP JP5081882A patent/JPS58167987A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5148975A (en) * | 1974-10-25 | 1976-04-27 | Tokyo Shibaura Electric Co | SOSAKADENRYUSHIBIIMUNO BUNPUSOKUTE ISOCHI |
| JPS5571970A (en) * | 1978-11-07 | 1980-05-30 | Thomson Csf | Divice for visualizing current density distribution in electric charge particle beam |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60167248A (en) * | 1984-02-10 | 1985-08-30 | Jeol Ltd | Electron microscope |
| JPH0339378B2 (en) * | 1984-02-10 | 1991-06-13 | Nippon Electron Optics Lab |
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