JPS5148975A - SOSAKADENRYUSHIBIIMUNO BUNPUSOKUTE ISOCHI - Google Patents

SOSAKADENRYUSHIBIIMUNO BUNPUSOKUTE ISOCHI

Info

Publication number
JPS5148975A
JPS5148975A JP12311774A JP12311774A JPS5148975A JP S5148975 A JPS5148975 A JP S5148975A JP 12311774 A JP12311774 A JP 12311774A JP 12311774 A JP12311774 A JP 12311774A JP S5148975 A JPS5148975 A JP S5148975A
Authority
JP
Japan
Prior art keywords
sosakadenryushibiimuno
bunpusokute
isochi
sosakadenryushibiimuno bunpusokute
bunpusokute isochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12311774A
Other languages
Japanese (ja)
Inventor
Masahiko Washimi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP12311774A priority Critical patent/JPS5148975A/en
Publication of JPS5148975A publication Critical patent/JPS5148975A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP12311774A 1974-10-25 1974-10-25 SOSAKADENRYUSHIBIIMUNO BUNPUSOKUTE ISOCHI Pending JPS5148975A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12311774A JPS5148975A (en) 1974-10-25 1974-10-25 SOSAKADENRYUSHIBIIMUNO BUNPUSOKUTE ISOCHI

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12311774A JPS5148975A (en) 1974-10-25 1974-10-25 SOSAKADENRYUSHIBIIMUNO BUNPUSOKUTE ISOCHI

Publications (1)

Publication Number Publication Date
JPS5148975A true JPS5148975A (en) 1976-04-27

Family

ID=14852589

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12311774A Pending JPS5148975A (en) 1974-10-25 1974-10-25 SOSAKADENRYUSHIBIIMUNO BUNPUSOKUTE ISOCHI

Country Status (1)

Country Link
JP (1) JPS5148975A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5353974A (en) * 1976-10-27 1978-05-16 Cho Lsi Gijutsu Kenkyu Kumiai Method of implanting ion and device therefor
DE2934601A1 (en) * 1979-08-27 1981-03-19 Yeda Research And Development Co. Ltd., Rehovot POLYMERS
JPS5691366A (en) * 1979-12-26 1981-07-24 Fujitsu Ltd Ion injector
JPS56126918A (en) * 1980-03-11 1981-10-05 Hitachi Ltd Injecting device for ion
JPS58167987A (en) * 1982-03-29 1983-10-04 Toshiba Corp Particle beam position detector
JPS6068542A (en) * 1983-09-22 1985-04-19 Tokyo Erekutoron Kk Ion implantation device
JPS60258840A (en) * 1984-06-04 1985-12-20 Mitsubishi Electric Corp Reactive ion beam etching apparatus

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5353974A (en) * 1976-10-27 1978-05-16 Cho Lsi Gijutsu Kenkyu Kumiai Method of implanting ion and device therefor
DE2934601A1 (en) * 1979-08-27 1981-03-19 Yeda Research And Development Co. Ltd., Rehovot POLYMERS
DE2934601C2 (en) * 1979-08-27 1987-04-09 Yeda Research And Development Co., Ltd., Rehovot, Il
JPS5691366A (en) * 1979-12-26 1981-07-24 Fujitsu Ltd Ion injector
JPS56126918A (en) * 1980-03-11 1981-10-05 Hitachi Ltd Injecting device for ion
JPS58167987A (en) * 1982-03-29 1983-10-04 Toshiba Corp Particle beam position detector
JPS6068542A (en) * 1983-09-22 1985-04-19 Tokyo Erekutoron Kk Ion implantation device
JPS60258840A (en) * 1984-06-04 1985-12-20 Mitsubishi Electric Corp Reactive ion beam etching apparatus

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