JPS5148975A - SOSAKADENRYUSHIBIIMUNO BUNPUSOKUTE ISOCHI - Google Patents
SOSAKADENRYUSHIBIIMUNO BUNPUSOKUTE ISOCHIInfo
- Publication number
- JPS5148975A JPS5148975A JP12311774A JP12311774A JPS5148975A JP S5148975 A JPS5148975 A JP S5148975A JP 12311774 A JP12311774 A JP 12311774A JP 12311774 A JP12311774 A JP 12311774A JP S5148975 A JPS5148975 A JP S5148975A
- Authority
- JP
- Japan
- Prior art keywords
- sosakadenryushibiimuno
- bunpusokute
- isochi
- sosakadenryushibiimuno bunpusokute
- bunpusokute isochi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12311774A JPS5148975A (en) | 1974-10-25 | 1974-10-25 | SOSAKADENRYUSHIBIIMUNO BUNPUSOKUTE ISOCHI |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12311774A JPS5148975A (en) | 1974-10-25 | 1974-10-25 | SOSAKADENRYUSHIBIIMUNO BUNPUSOKUTE ISOCHI |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5148975A true JPS5148975A (en) | 1976-04-27 |
Family
ID=14852589
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12311774A Pending JPS5148975A (en) | 1974-10-25 | 1974-10-25 | SOSAKADENRYUSHIBIIMUNO BUNPUSOKUTE ISOCHI |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5148975A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5353974A (en) * | 1976-10-27 | 1978-05-16 | Cho Lsi Gijutsu Kenkyu Kumiai | Method of implanting ion and device therefor |
DE2934601A1 (en) * | 1979-08-27 | 1981-03-19 | Yeda Research And Development Co. Ltd., Rehovot | POLYMERS |
JPS5691366A (en) * | 1979-12-26 | 1981-07-24 | Fujitsu Ltd | Ion injector |
JPS56126918A (en) * | 1980-03-11 | 1981-10-05 | Hitachi Ltd | Injecting device for ion |
JPS58167987A (en) * | 1982-03-29 | 1983-10-04 | Toshiba Corp | Particle beam position detector |
JPS6068542A (en) * | 1983-09-22 | 1985-04-19 | Tokyo Erekutoron Kk | Ion implantation device |
JPS60258840A (en) * | 1984-06-04 | 1985-12-20 | Mitsubishi Electric Corp | Reactive ion beam etching apparatus |
-
1974
- 1974-10-25 JP JP12311774A patent/JPS5148975A/en active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5353974A (en) * | 1976-10-27 | 1978-05-16 | Cho Lsi Gijutsu Kenkyu Kumiai | Method of implanting ion and device therefor |
DE2934601A1 (en) * | 1979-08-27 | 1981-03-19 | Yeda Research And Development Co. Ltd., Rehovot | POLYMERS |
DE2934601C2 (en) * | 1979-08-27 | 1987-04-09 | Yeda Research And Development Co., Ltd., Rehovot, Il | |
JPS5691366A (en) * | 1979-12-26 | 1981-07-24 | Fujitsu Ltd | Ion injector |
JPS56126918A (en) * | 1980-03-11 | 1981-10-05 | Hitachi Ltd | Injecting device for ion |
JPS58167987A (en) * | 1982-03-29 | 1983-10-04 | Toshiba Corp | Particle beam position detector |
JPS6068542A (en) * | 1983-09-22 | 1985-04-19 | Tokyo Erekutoron Kk | Ion implantation device |
JPS60258840A (en) * | 1984-06-04 | 1985-12-20 | Mitsubishi Electric Corp | Reactive ion beam etching apparatus |
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