JPS58167936A - Differential pressure transmitter - Google Patents
Differential pressure transmitterInfo
- Publication number
- JPS58167936A JPS58167936A JP5191682A JP5191682A JPS58167936A JP S58167936 A JPS58167936 A JP S58167936A JP 5191682 A JP5191682 A JP 5191682A JP 5191682 A JP5191682 A JP 5191682A JP S58167936 A JPS58167936 A JP S58167936A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- fluid
- differential pressure
- bypass
- hand side
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/023—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using bellows
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は差圧伝送器においてオーバーレンジの差圧が印
加されたときの医護装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a medical protection device when an over-range differential pressure is applied to a differential pressure transmitter.
差圧伝送器においては従来から、オーバーレンジの差圧
が印加されたとき圧力センサを保譲するために、差圧が
成る値に達するとシールダイヤフラムが差圧伝送器のボ
ディに当ってそれ以上変位できないようにするとか、封
入液の通路を遮断する等の方法が用いられている。しか
しこのようにしてもオーバーレンジが作用するとダイヤ
フラムやボディに歪が発生して0点がずれる等の測定上
の支障を来すことがあった。Conventionally, in differential pressure transmitters, in order to protect the pressure sensor when an over-range differential pressure is applied, when the differential pressure reaches a certain value, the seal diaphragm hits the body of the differential pressure transmitter and prevents the pressure sensor from exceeding the pressure range. Methods such as making it impossible to displace or blocking the passage of the sealed liquid are used. However, even with this arrangement, if overrange is applied, distortion may occur in the diaphragm or body, causing problems in measurement such as deviation of the zero point.
本発明は上述したような問題の解決を計るもので、単に
圧力センサをオーバーレンジの圧力から保護するだけで
なく、ダイヤフラムとかボディ等差圧伝送器構成体をも
オーバーレンジの圧力から保護した差圧伝送器を提供す
るものである。The present invention aims to solve the above-mentioned problems, and is designed to not only protect the pressure sensor from over-range pressure, but also protect differential pressure transmitter components such as the diaphragm and body from over-range pressure. The present invention provides a pressure transmitter.
本発明の目的及び作用をよシ明かにするため、まず従来
例について説明する。第1図および第2図に夫々異る従
来例を示す。第1図は静電容量型圧力センサを用いた従
来例である。1はボディで中央に小室があって平面ダイ
ヤフラム2によって左右に仕切られている。小室の両側
面には夫々電極板3.4が設けてあシールダイヤフラム
と相対してコンデンサを構成しておシ、このコンデンサ
が圧力センサとなっている。5,6はシールダイヤフラ
ムで各ダイヤフラムの内面側は上記小室に通じている。In order to clarify the purpose and effect of the present invention, a conventional example will first be described. Different conventional examples are shown in FIG. 1 and FIG. 2, respectively. FIG. 1 shows a conventional example using a capacitive pressure sensor. 1 is a body with a small chamber in the center, which is partitioned into left and right sides by a flat diaphragm 2. Electrode plates 3.4 are provided on both sides of the small chamber, respectively, and face the seal diaphragm to form a capacitor, and this capacitor serves as a pressure sensor. Numerals 5 and 6 are seal diaphragms, and the inner surface of each diaphragm communicates with the small chamber.
小室内には封入液が充してあり、シールダイヤフラムの
変位を平面ダイヤフラム2に伝える。夫々のシールダイ
ヤフラム5,6の外面に測定圧力が作用する。左右のシ
ールダイヤフラム5,6の外面に作用する圧力の差が成
る値に達すると、作用圧力が高い側のシールダイヤフラ
ムの内側面がボディ1に当ってしまい圧力差がそれ以上
大きくなっても、もはやシールダイヤプラムは変位でき
ず、従って圧力センサを構成している平面ダイヤフラム
2は過大な差圧から保護される。The small chamber is filled with a sealed liquid and transmits the displacement of the seal diaphragm to the flat diaphragm 2. A measuring pressure acts on the outer surface of each sealing diaphragm 5,6. When the difference between the pressures acting on the outer surfaces of the left and right seal diaphragms 5 and 6 reaches a value, the inner surface of the seal diaphragm on the side with the higher operating pressure hits the body 1, and even if the pressure difference becomes larger than that, The sealing diaphragm can no longer be displaced, so that the planar diaphragm 2 forming the pressure sensor is protected from excessive pressure differences.
しかしながらこのとき、ボディ1に押しつけられている
側のシールダイヤフラムを考えると、シールダイヤフラ
ムにはコルゲート(同心円の波形)が設けてあシ、ボデ
ィ1のシールダイヤフラムが当接する面には上記コルゲ
ートに合せて同心円の111
波形を形成してシールダイヤフラムと一致するようにし
であるとは云え、加工精度および組立精度には限界があ
るからシールダイヤフラムのコルゲートとボディの波形
とは完全に一致せず、シールダイヤフラムがボディに押
しつけられたときは局所的な当りが生じて弾性限界を超
えた局所変形が生じ、そのためオーバレンジの差圧が去
った後で左右のシールダイヤフラムの平衡位置がずれて
0点が狂い、或はシールダイヤフラムの剛性が変化して
感度が変ってしまうと云った現象が起る。またボディ1
にしても、ワンブロックで構成されたものでなく、複数
の部分をダイヤフラムをはさんで重ね合せて結合した構
成であるから、過大な差圧により、結合のずれを生じて
やはり0点の移動を来すことがある。第2図の例は左右
のシールダイヤフラム5,6の間に連結されたスプール
7の変位をレバー8でボディlの外に取出す構成で、過
大の差圧が作用したときはシールダイヤフラムのスプー
ル取付は座面が0リング9又は10に圧接され、シール
ダイヤフラムとボディとの間にある封入液が反対側のシ
ールダイヤフラムの方に逃げるのを阻止し、ボディとシ
ールダイヤプラムトの間に封入液を閉じ込めてシールダ
イヤプラムがボディ1に当接するのを避けるようにしだ
もので、第1図に示すようなシールダイヤフラムの変形
は防がれるが、ボディ1に左右不平衡な過大力が作用す
るのは避けられず、ボディが積重ね構成である所から左
右不平衡な作用力により結合に歪を生じて0点移動等が
起るのは避けられない。本発明はこのような問題を解決
しようとするものである。However, at this time, considering the side of the seal diaphragm that is pressed against the body 1, the seal diaphragm is provided with a corrugate (concentric waveform), and the surface of the body 1 that the seal diaphragm contacts is fitted with the corrugate. However, there are limits to processing and assembly accuracy, so the corrugations of the seal diaphragm and the corrugations of the body do not perfectly match, and the seal When the diaphragm is pressed against the body, local contact occurs and local deformation that exceeds the elastic limit occurs.As a result, after the overrange pressure difference disappears, the equilibrium position of the left and right seal diaphragms shifts and the zero point is lost. A phenomenon occurs in which the sensitivity changes due to distortion or changes in the rigidity of the seal diaphragm. Also body 1
However, since it is not composed of a single block but multiple parts that are stacked and joined together with a diaphragm in between, the excessive differential pressure will cause the connections to shift and the zero point will shift. may occur. The example shown in Fig. 2 has a configuration in which the displacement of the spool 7 connected between the left and right seal diaphragms 5 and 6 is taken out of the body l by a lever 8, and when an excessive differential pressure acts, the spool of the seal diaphragm is attached. The seat surface is pressed against the O-ring 9 or 10 to prevent the sealed liquid between the seal diaphragm and the body from escaping toward the seal diaphragm on the opposite side, and to prevent the sealed liquid between the body and the seal diaphragm from escaping towards the seal diaphragm on the opposite side. This is designed to prevent the seal diaphragm from coming into contact with the body 1 by confining the body 1, which prevents the seal diaphragm from deforming as shown in Figure 1, but causes an unbalanced excessive force to act on the body 1. This is unavoidable, and since the bodies are stacked, it is unavoidable that the unbalanced acting force on the left and right causes distortion in the connection and causes zero point movement. The present invention attempts to solve such problems.
以下実施例によって本発明を説明する。The present invention will be explained below with reference to Examples.
第3図および第4図は本発明の一実施例であって、第3
図は平衡状態、第4図はオーバーレンジの差圧が印加さ
れたときの状態を示す。1はボディで円筒形であり、内
部に移動体11が嵌合させである。移動体11の外周に
は0リング12が嵌めてあってボディ1との間は気密に
なっており、移動体11は左右の圧力差でピストン状に
左右に動く。’13.14は移動体を支持するベローで
ある。15.16は圧力を測定すべき流体の進入口で、
これらの流体はボディlに設けられた通路17.18を
通してベロー13.14の内側にも進入し、ベロ・−1
3,14は夫々内外の圧力が釣合つている1、1ボデイ
1には流体進入口15および16に通じボディの円筒内
面に開口しているバイパス19.20が設けである。バ
イパス19.20の円筒内面の開口位置は移動体11の
平衡位置(第3図)よりも夫々流体進入口15および1
6に近い側にある。21は移動体11の中央に取付けら
れた圧力センサーで、その左右の流体の圧力差に応答し
た出力を発生する。今右側の流体圧が高まって左右の流
体圧の差が成る設定値を超えた場合を考える、このとき
移動体11は左方へ移動せしめられ、0リング12はバ
イパス20のボディ1内面の開口を左方へ超える。この
状態が第4図に示されている。0リングがバイパス20
のボディ1内面開口を左側へ超えると、流体進入口15
から進入した流体はバイパス20を通って圧力の低い流
体進入口16の方へ流れる。この結果移動体11の右側
の流体圧は低下し、左側の流体圧は上昇して差圧の上昇
が停止し、移動体11は0リング12がバイパス20の
ボディl内面開口を左へ超えかけた所で停止する。左側
の流体圧が上昇すると移動体11は右方−\移動せしめ
られ、圧力差が成る限界を超等とOリング12は・(イ
・くス19のボディ1内面開口を右へ超え、上述した所
と同じ作用でその位置に移動体11が停止する。FIG. 3 and FIG. 4 show an embodiment of the present invention.
The figure shows an equilibrium state, and FIG. 4 shows a state when an over-range differential pressure is applied. 1 is a cylindrical body, into which a moving body 11 is fitted. An O-ring 12 is fitted around the outer periphery of the movable body 11 to provide an airtight connection with the body 1, and the movable body 11 moves left and right like a piston due to the pressure difference between the left and right sides. '13.14 is a bellows that supports the moving body. 15.16 is the inlet of the fluid whose pressure is to be measured;
These fluids also enter the inside of the bellows 13.14 through passages 17.18 provided in the body l, and enter the bellows 13.14.
The body 1 is provided with bypasses 19 and 20 which communicate with the fluid inlets 15 and 16 and open into the cylindrical inner surface of the body. The opening positions of the cylindrical inner surface of the bypasses 19 and 20 are closer to the fluid inlets 15 and 1, respectively, than the equilibrium position of the moving body 11 (FIG. 3).
It's on the side closer to 6. Reference numeral 21 denotes a pressure sensor attached to the center of the moving body 11, which generates an output in response to the pressure difference between the fluid on its left and right sides. Let's now consider a case where the fluid pressure on the right side increases and the difference between the left and right fluid pressures exceeds the set value. At this time, the movable body 11 is moved to the left, and the O-ring 12 is opened on the inner surface of the body 1 of the bypass 20. over to the left. This state is shown in FIG. 0 ring bypass 20
If you go beyond the inner surface opening of the body 1 to the left side, there is a fluid inlet port 15.
The fluid that enters through the bypass 20 flows toward the lower pressure fluid inlet 16. As a result, the fluid pressure on the right side of the movable body 11 decreases, the fluid pressure on the left side increases, and the differential pressure stops increasing, and the movable body 11 is moved so that the O-ring 12 is about to cross the inner surface opening of the body l of the bypass 20 to the left. Stop at the right place. When the fluid pressure on the left side rises, the movable body 11 is moved to the right, and when the pressure difference exceeds the limit, the O-ring 12 crosses the inner opening of the body 1 of the The movable body 11 stops at that position by the same action as at that position.
第5図は本発明の他の実施例で上記実施例におけるベロ
ー13.14の所をコイルバネ13’、 14’に変え
たものであり、動作原理は上述実施例と全く同じである
。FIG. 5 shows another embodiment of the present invention in which the bellows 13 and 14 in the above embodiment are replaced with coil springs 13' and 14', and the operating principle is exactly the same as in the above embodiment.
第4図に戻って差圧が成る限度を超えて)くイ、Cス2
0のボディ1内面開口がOリング12の右側に開口する
と、右側の流体圧の方が左側の流体圧より高いから、右
側の流体進入口15から進入した流体は進入口16の方
へ流れるが、この流れのイス等の作用で流体圧か低下し
、逆に左側の流体圧は上昇して、移動体11の左右の流
体圧の差は0リング12がバイパス20のボディ内開口
を移動体11の右側にわづかに開口した位置におけるベ
ロー13.14の復原力と釣合い、右側の流体圧が更に
上昇しても移動体11はわづかに左へ移動してバイパス
20の開口度を増すだけで、移動体11の位置は殆んど
変らず、ベロー13.14に無理な力がか\るようなこ
とはない。またボディ内の左右の圧力差も殆んど変らず
予め設定した圧力差を超えることがない。Returning to Figure 4, if the differential pressure exceeds the limit
When the inner opening of the body 1 of O-ring 12 opens on the right side of the O-ring 12, the fluid pressure on the right side is higher than the fluid pressure on the left side, so the fluid that enters from the fluid inlet port 15 on the right side flows toward the inlet port 16. , the fluid pressure decreases due to the action of this flow chair, etc., and conversely, the fluid pressure on the left side increases. In balance with the restoring force of the bellows 13 and 14 in the position where the right side of the bellows 11 is slightly opened, even if the fluid pressure on the right side further increases, the movable body 11 moves slightly to the left to increase the degree of opening of the bypass 20. , the position of the moving body 11 hardly changes, and no unreasonable force is applied to the bellows 13 and 14. Furthermore, the pressure difference between the left and right sides within the body hardly changes and never exceeds a preset pressure difference.
本発明差圧伝送器は上述したような構成で差圧が成る限
度を超えるとバイパスが開通して圧力センサ両側の流体
を連通ずるので、それ以上の差圧の上昇が阻止され圧力
センサが過大な差圧から保護されるだけでなく、差圧伝
送器の構成部分も過大な差圧を受けることがなく、以後
の測定等に支障を来すような歪の発生が避けられる。The differential pressure transmitter of the present invention has the above-mentioned configuration, and when the differential pressure exceeds the limit, the bypass opens and communicates the fluid on both sides of the pressure sensor, preventing the differential pressure from increasing further and preventing the pressure sensor from becoming excessive. In addition to being protected from excessive pressure differences, the components of the differential pressure transmitter will not be exposed to excessive pressure differences, and distortions that may interfere with subsequent measurements, etc., can be avoided.
第1図および第2図は夫々異る従来例の縦断側面図、第
3図は本発明の一実施例の平衡状態に七ける縦断側面図
、第4図は同実施例の限界の差圧が作用した場合の縦断
側面図、第5図は本発明の他の実施例の縦断側面図であ
る。
1・・・ボディ、11・・・移動体、12・・・0リン
グ、13.14・・・ベロー、15.16・・・流体進
入口、19.20・・・バイパス、21・・・圧力セン
サ。
代理人 弁理士 係 浩 介Figures 1 and 2 are longitudinal sectional side views of different conventional examples, Figure 3 is a longitudinal sectional side view of an embodiment of the present invention in an equilibrium state, and Figure 4 is the limit differential pressure of the embodiment. Fig. 5 is a longitudinal side view of another embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Body, 11... Moving body, 12... 0 ring, 13.14... Bellows, 15.16... Fluid inlet, 19.20... Bypass, 21... pressure sensor. Agent Patent Attorney Kosuke
Claims (1)
移動体を嵌合させ、同移動体の両側に被測定流体の圧力
を作用させるようにすると共に、上記円筒内面の両端寄
りに夫々開口を持ち、ボディにおける夫々の側の測定流
体進入口に通じるバイパスを設け、上記移動体を弾性体
で支持して同移動体に中央位置への復原力を与え、かつ
予め設定した限界差圧の下で移動体が上記バイパスのう
ち低圧側に設けられたもののボディ円筒内面開口を超え
て同バイパスを高圧側に連通させるようにしたことを特
徴とする差圧伝送器。A movable body is fitted airtightly and slidably into a cylinder of a body having a cylindrical inner surface, and the pressure of the fluid to be measured is applied to both sides of the movable body, and openings are provided near both ends of the cylindrical inner surface. A bypass is provided which leads to the measurement fluid inlet on each side of the body, and the moving body is supported by an elastic body to give the moving body a restoring force to the center position, and a preset limit differential pressure is maintained. A differential pressure transmitter characterized in that the movable body at the bottom crosses an opening on the inner cylindrical body of the body of the bypass provided on the low-pressure side and connects the bypass to the high-pressure side.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5191682A JPS58167936A (en) | 1982-03-29 | 1982-03-29 | Differential pressure transmitter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5191682A JPS58167936A (en) | 1982-03-29 | 1982-03-29 | Differential pressure transmitter |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS58167936A true JPS58167936A (en) | 1983-10-04 |
Family
ID=12900192
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5191682A Pending JPS58167936A (en) | 1982-03-29 | 1982-03-29 | Differential pressure transmitter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58167936A (en) |
-
1982
- 1982-03-29 JP JP5191682A patent/JPS58167936A/en active Pending
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