JPS5816393U - タ−ボ分子ポンプ - Google Patents

タ−ボ分子ポンプ

Info

Publication number
JPS5816393U
JPS5816393U JP11188981U JP11188981U JPS5816393U JP S5816393 U JPS5816393 U JP S5816393U JP 11188981 U JP11188981 U JP 11188981U JP 11188981 U JP11188981 U JP 11188981U JP S5816393 U JPS5816393 U JP S5816393U
Authority
JP
Japan
Prior art keywords
molecular pump
drive shaft
oil
turbo
turbo molecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11188981U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6229678Y2 (enrdf_load_stackoverflow
Inventor
潔 成田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP11188981U priority Critical patent/JPS5816393U/ja
Publication of JPS5816393U publication Critical patent/JPS5816393U/ja
Application granted granted Critical
Publication of JPS6229678Y2 publication Critical patent/JPS6229678Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP11188981U 1981-07-27 1981-07-27 タ−ボ分子ポンプ Granted JPS5816393U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11188981U JPS5816393U (ja) 1981-07-27 1981-07-27 タ−ボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11188981U JPS5816393U (ja) 1981-07-27 1981-07-27 タ−ボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPS5816393U true JPS5816393U (ja) 1983-02-01
JPS6229678Y2 JPS6229678Y2 (enrdf_load_stackoverflow) 1987-07-30

Family

ID=29906234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11188981U Granted JPS5816393U (ja) 1981-07-27 1981-07-27 タ−ボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPS5816393U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6229678Y2 (enrdf_load_stackoverflow) 1987-07-30

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