JPS58161950A - Airtightly welded body and welding method thereof - Google Patents

Abstract

PURPOSE:To obtain an airtightly welded body of a glass plate and a metallic frame having high accuracy quality and reliability with a simple process at a low cost by welding the glass plate to the metallic frame through the glass wound layer formed to said frame then subjected the same to an annealing treatment. CONSTITUTION:A metallic frame 1 is subjected to a wet hydrogen treatment for about 10min at about 1,100 deg.C, whereafter the frame is oxidized for about 2min at about 1,000 deg.C. Glass powder of the same kind as a glass plat 3 or having the coefft. of thermal expansion roughly equal to the coefft. of thermal expansion of the frame 1 is coated on the required part of the frame 1 by using a suitable solvent and is dried. The frame is then heated in a furnace of about 900-1,000 deg.C to weld the glass thereto, whereby a glass-wound layer 2 is completed. The plate 3 is fixed to the layer 2 in contact therewith and is heated by induction heating at about 800-1,000 deg.C to weld said layer and plate to one body, whereafter the assembly is treated for about 5min at about 550 deg.C in an annealing furnace, whereby the airtightly welded body is obtained. It is possible to improve the adhesive strength by embedding the frame 1 into the plate 3 during welding.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an airtight fused body and a fusion bonding method thereof, particularly a glass plate and a metal frame used for airtight packaging with a transparent window for display devices, semiconductor devices, etc. %O for the hermetically fused body and its M1 method.

In recent years, the development of display devices and semiconductor devices has been remarkable, and there is a growing trend to have various types of highly reliable transparent windows to input optical signals from the outside and to output optical signals from the inside to the outside. There is a growing demand for packaging with a hermetically sealed structure. In particular, the number of functional parts housed inside the product ranges from multiple H-4, and various types of highly reliable packaging are required. In particular, hermetic sealing has become an absolute necessity in order to prevent damage to internal elements even under harsh environmental conditions such as external atmosphere, temperature, and humidity.

In order to meet these demands, inorganic sealing methods have been adopted, but inorganic seals generally have high temperatures and potash during sealing, which can damage the elements and functional materials housed inside due to the temperature. For example, a gelatin film used as a color photoresist filter for a solid-state image pickup device becomes functionally damaged at about 180°C. Also, the alignment film of the liquid crystal display element has a molecular weight of 300 to 400.
damage at °C.

Therefore, Fig. 1 shows the solid-state imaging device O! ! As shown in the partial cross-sectional view, a ceramic container 1 is formed, and a solid-state image sensor 2 as a functional element is housed and bonded inside the container 10, while a glass window at the opening of the ceramic container 1 is sealed. I! (hereinafter referred to as a glass cap), a ceramic frame 4 is fused to a translucent glass M13 via a bullet glass 5, and a metallized layer S is formed on the opposite surface of this ceramic and Z-shaped frame 4. Attach the metal frame T to the layer and form a large crow cap 8, and then weld the metalized layer 9 and the glass layer 9 through the brazing filler metal 1o to seal the airtight seal. A stop structure was used.

However, according to such a sealing structure, in the process of manufacturing the glass cap 8, there is a process for bonding the glass x@3 and the *ramic frame 4 with the 7-lit S lath 5, and a metallized layer is added to the ceramic frame 4. 6 and the step of bonding the metal frame T to the metallized layer 6 are required. is complicated,
There was a runner-up that was extremely expensive to manufacture.

As a method for improving such drawbacks, a method has been proposed in which a frit glass 5 is interposed as a method for directly bonding the glass plate 3 and the metal frame T, as shown in a sectional view of the main part in FIG. According to such a structure, the mechanical strength of the bond between the metal frame T and the frit glass 5 is weak, and high reliability cannot be obtained. Tongta, glass plate 3
The method of removing the 0 peripheral portion was technically impossible because the light-transmitting effective surface of the glass@3 would be severely deformed and damaged by IIK.

Therefore, the present invention has been made in view of the above-mentioned drawbacks of the conventional art, and its purpose is to simplify the process of manufacturing an airtight fused body, and to improve accuracy, quality, and reliability. An object of the present invention is to provide an airtight fused body and a method for fusing the same, which make it possible to realize an airtight fused body with high properties at low cost.

1M of the present invention using the drawings below! A bar example will be explained in detail.

FIG. 3 shows an example of a glass cap showing an example of the airtight fused body according to the present invention. It is a s cross-sectional view.

In the figure, a glass 1i3 is provided around the glass plate 30.
The metal frame T is fixedly disposed through a glass wrapping layer 11 made of the same material as the metal frame T or glass having substantially the same coefficient of thermal expansion as the metal frame T. The manufacturing method of this airtight fused body is as follows: First, a metal frame T is subjected to pre-confucian oxidation treatment, and a glass made of the same material as this glass 1 [3 is installed in the part of this metal frame T where the glass 113 is to be bonded. , to form a glass-wound layer by fusing at 900 to 1000°C. Next, the glass plate 3 and the glass wrapping layer are formed and the metal frame T is attached to the Takaoka a! The metal frame T is set in an induction heating furnace and the output of the high m* induction heating device is controlled to maintain the metal frame T in the temperature range of 800-1000°C. In this way, the adhesion is fully completed with the peripheral part of the glass plate 30 in contact with the metal frame IK, but in some cases, when the expanded glass plate 3 is fixed 9, pressure is applied to the ceramic part of the glass plate IB. There is no problem.

In this case, a part of the metal frame 1 is embedded in the glass plate 3 (as shown in the enlarged sectional view of the main part of the fused body No. 411), and is fused with a strong adhesive force. Ru. Subsequently, the fused body that has been fused is coated with a glass-wrapped layer 11 during the cooling process.
It is completed by annealing for 5 to 10 minutes at a temperature near the transition point of the glass material used in the process.

Moreover, the shape of the part of the metal frame 7 that is bonded to the glass li3 has various shapes as shown in FIGS. 5, 6, and 7.
1! The adhesive strength can be particularly improved when the tube is stepped as shown in FIG. 6 or when it is plunged into the glass plate 3 as shown in FIG. Also, at least the part of the metal frame T that is to be glued to the glass plate 3 is 50~
By applying 400 mesh sandblasting to provide unevenness on the surface, the adhesion can be further improved by expanding the adhesion area and making oxidation uniform.

During high-frequency induction heating, parts other than the adhesive surface are heated red, so it is okay to work in an inert gas to prevent excessive oxidation.

The present invention will be explained in detail below using specific examples.

First, the dimensions of the metal frame are adjusted so that the inner frame of the Kovar metal frame overlaps the 11 widths of the periphery of the hard glass plate with the length and width of 20 x 20 sw x 1 -. Then, this metal frame is subjected to wet hydrogen treatment at approximately 1100° C. for approximately 10 minutes, and then subjected to approximately 29% hydrogen treatment at approximately 1000° C. Next, process the same glass lees bed as the hard glass plate, put appropriate IIIK in it, make it into a slip form, apply glass powder TW11 to the designated part of the metal frame after the above treatment by brushing.
Wipe and dry. And this also O is 900-100
The so-called glass wrapping is completed by placing about 5 portions of glass in a 0°C O oven and fusing the glass. Next, a hard glass plate is fixed in contact with the glass-wrapped metal frame, resulting in an output of 2KW.

Set it in a high frequency induction heating furnace with a wave number of approximately 0.45M11!0. Then, adjust the output and make the metal frame 800 to 1
The glass portion to be bonded to the metal frame is melted by heating to 000°C, and moderate pressure is applied to properly embed the metal frame into the glass plate and fuse the glass plate. Next, the fused assembly is immediately introduced into an annealing furnace and annealed at about 550° C. for about 5 minutes to complete the glass cap. Then, the completed glass cap was exposed to cold water and hot water at Δt=90°C 10 times in a cycle of about 30 seconds, but no cracks occurred, and an airtightness test using a helium detector showed that it was completely airtight. Ta.

Example 2 The glass plate was replaced with a semi-hard glass plate with a coefficient of thermal expansion α = 63 seconds, the metal frame was replaced with a T-N142 alloy, and the metal frame was heated at about 1100°C for about 10 minutes. A Tekaras cap was manufactured in the same manner as in Example 1, except that after the wet hydrogen treatment, an oxidation treatment was performed in air at approximately 950° C. for approximately 5 minutes. This product also had sufficient strength as in Example 1.

In the above embodiment, the case where the airtightly fused body is applied to a glass cap of a solid-state imaging device has been described, but the present invention is not limited to this, and the present invention is not limited to this, but may be applied to a glass material and a metal body by fusion bonding. Needless to say, the present invention can be applied to all fused bodies constructed by the following methods.

As explained above, according to the present invention, an airtight fused body having a typical shape made of a glass pair and a metal piece can be produced using a simple manufacturing process, using a small number of materials, at low cost, and with high quality.
It has an extremely excellent effect of achieving 1Illi reliability.

Brief explanation of WAIj Figure 1 shows the main part Ifi of an example of a conventional solid-state V&image device.
FIG. A sectional view of a main part showing an example of a bonded body, an enlarged sectional view of the main part thereof, and FIGS. 5WA to 7 are sectional views of a main part showing other embodiments of an airtightly fused body according to the present invention.

3...Glass plate, T...Metal frame, 11...
Glass wrapped layer.

Figure 1 3 Figure 6 1 Figure 3 Figure 5 Figure 7

Claims (1)

[Claims] 1. In an airtight fused body consisting of a glass plate and a metal frame,
Air-tight fusion, in which the glass plate and the metal frame are fused together by interposing a glass of the same type as the glass plate or a glass having a thermal expansion coefficient equivalent to that of the metal frame at the bonded part. body. . 2. The airtight fused body according to claim 1, wherein the metal of the portion of the metal frame that is bonded to the glass is embedded in the glass plate. 3. The airtight fused body according to claim 1, characterized in that a stepped portion is provided in a portion of the metal frame that is bonded to the glass plate. 4. 50 to 40
The airtight fused body according to claim 1, 2, or 3a, characterized in that the surface is roughened by sandblasting with zero mesh. 5. In an airtight fused body consisting of a glass plate and a metal frame,
a step of subjecting the metal frame to wet hydrogen treatment and then oxidation treatment;
Glass lI on the part that will be bonded to the metal glass plate! l
the glass plate and the metal frame O glass** layer are brought into contact and fused together by high-frequency induction heating, and the process is annealed after the fusion. I felt like it was a special mission! ! Fusion body OII bonding method. 1. Claim 5, characterized in that in the process of fusing and integrating the metal frame and the glass plate, the metal frame is embedded in the glass plate by applying an appropriate pressure. A method for fusing an airtightly fused body as described in lli. 7. The method of fusing an airtight welded body according to claim 5, characterized in that the high frequency induction heating is carried out in an inert atmosphere.