JPS5815969U - 電子線装置の対物レンズ - Google Patents

電子線装置の対物レンズ

Info

Publication number
JPS5815969U
JPS5815969U JP10913981U JP10913981U JPS5815969U JP S5815969 U JPS5815969 U JP S5815969U JP 10913981 U JP10913981 U JP 10913981U JP 10913981 U JP10913981 U JP 10913981U JP S5815969 U JPS5815969 U JP S5815969U
Authority
JP
Japan
Prior art keywords
magnetic pole
tube
objective lens
cylinder
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10913981U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6313646Y2 (enrdf_load_stackoverflow
Inventor
谷中　隆志
Original Assignee
株式会社明石製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社明石製作所 filed Critical 株式会社明石製作所
Priority to JP10913981U priority Critical patent/JPS5815969U/ja
Publication of JPS5815969U publication Critical patent/JPS5815969U/ja
Application granted granted Critical
Publication of JPS6313646Y2 publication Critical patent/JPS6313646Y2/ja
Granted legal-status Critical Current

Links

JP10913981U 1981-07-24 1981-07-24 電子線装置の対物レンズ Granted JPS5815969U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10913981U JPS5815969U (ja) 1981-07-24 1981-07-24 電子線装置の対物レンズ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10913981U JPS5815969U (ja) 1981-07-24 1981-07-24 電子線装置の対物レンズ

Publications (2)

Publication Number Publication Date
JPS5815969U true JPS5815969U (ja) 1983-01-31
JPS6313646Y2 JPS6313646Y2 (enrdf_load_stackoverflow) 1988-04-18

Family

ID=29903518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10913981U Granted JPS5815969U (ja) 1981-07-24 1981-07-24 電子線装置の対物レンズ

Country Status (1)

Country Link
JP (1) JPS5815969U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61131351A (ja) * 1984-11-30 1986-06-19 Internatl Precision Inc 電子線装置の対物レンズ
JP3001609U (ja) * 1994-03-02 1994-09-06 マルホ産業株式会社 電柱標識灯

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61131351A (ja) * 1984-11-30 1986-06-19 Internatl Precision Inc 電子線装置の対物レンズ
JP3001609U (ja) * 1994-03-02 1994-09-06 マルホ産業株式会社 電柱標識灯

Also Published As

Publication number Publication date
JPS6313646Y2 (enrdf_load_stackoverflow) 1988-04-18

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