JPS58158254A - 多層薄膜形成装置における膜厚監視装置 - Google Patents
多層薄膜形成装置における膜厚監視装置Info
- Publication number
- JPS58158254A JPS58158254A JP57039336A JP3933682A JPS58158254A JP S58158254 A JPS58158254 A JP S58158254A JP 57039336 A JP57039336 A JP 57039336A JP 3933682 A JP3933682 A JP 3933682A JP S58158254 A JPS58158254 A JP S58158254A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- workpiece
- monitoring
- multilayer thin
- evaporation source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 30
- 239000010408 film Substances 0.000 title claims description 11
- 230000008020 evaporation Effects 0.000 claims description 26
- 238000001704 evaporation Methods 0.000 claims description 26
- 238000012544 monitoring process Methods 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 2
- 239000000126 substance Substances 0.000 description 4
- 239000002356 single layer Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000009489 vacuum treatment Methods 0.000 description 2
- 206010011224 Cough Diseases 0.000 description 1
- 241000255925 Diptera Species 0.000 description 1
- 241000406668 Loxodonta cyclotis Species 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012806 monitoring device Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Laminated Bodies (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57039336A JPS58158254A (ja) | 1982-03-15 | 1982-03-15 | 多層薄膜形成装置における膜厚監視装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57039336A JPS58158254A (ja) | 1982-03-15 | 1982-03-15 | 多層薄膜形成装置における膜厚監視装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58158254A true JPS58158254A (ja) | 1983-09-20 |
| JPS6154597B2 JPS6154597B2 (https=) | 1986-11-22 |
Family
ID=12550246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57039336A Granted JPS58158254A (ja) | 1982-03-15 | 1982-03-15 | 多層薄膜形成装置における膜厚監視装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58158254A (https=) |
-
1982
- 1982-03-15 JP JP57039336A patent/JPS58158254A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6154597B2 (https=) | 1986-11-22 |
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