JPS58157984A - Production of electroforming stamper for forming optical disc - Google Patents

Abstract

PURPOSE:To produce a titled stamper having a uniform film thickness, by mounting a thin vapor-deposited metallic film formed on the surface of a recording disc provided with fine patterns on the surface of a rotary cathode, forming an electroformed Ni film on the thin film and stripping the same from the recording disc thereby stripping the film thoroughly. CONSTITUTION:Fine patterns are formed by optical etching on the surface of a photosensitive resin film formed on a glass plate thereby forming a recording disc. A thin vapor-deposited metallic film or the like is formed on the patterned surface of the recording disc to provide electrical conductivity thereto. The thin film has high adhesive strength to an electroformed Ni, film, and sticks integrally on the side of the Ni film when stripped, thereby providing a function as a master pattern. Such recording disc is mounted on the surface of a rotary cathode and the surface of the thin film is exposed. The electroformed Ni film is formed on the thin film surface in an Ni bath by using an insoluble anode. The electroformed Ni film stuck with the thin metallic film is stripped from the recording disc and said film is used as a master stamper for forming optical discs.

Description

[Detailed Description of the Invention] [Technical public funds for the invention] This invention is based on a medium
~αSs, it is possible to form a fine pattern of 0.1μm degree, and the optical deinuta type electroforming stub bar 0
[Background of VSO technology] It is well known that methane is used, for example, in the record tab manufacturing process. First, a master disc is created by carving a pattern in the form of grooves on a regular lacquer board with a needle. ◎Nickel plating with a thickness of 200 to 300 pitches is applied to this master disc, and the peeled nickel film is used as a master.

Next, apply a release agent to the master and apply nickel electroforming.
The peeled nickel film is used as the mother. Furthermore, a release agent is applied to the mother, nickel electroforming is applied, and the nickel film is used as a stamper by peeling it off.

Nine master discs are known, in which fine patterns are created by rolling the master disc to make the recording even more dense, for example by optically etching the photosensitive resin film coated on the glass plate. When applying this master, K is the master surface, that is, the stamped resin surface. First, an electrode is formed on a silver mirror, and then nickel is electroformed. In electroforming, the master is placed on a rotating cathode, and a molten anode is applied. Use large current l! The nickel surface shape and overlay can be obtained by stirring the bath liquid once and applying it on the #l mirror surface.In this case, the master formed by electroforming and peeled off from the master is used as a stamper. It will be used.

In stampers for records, it is known that chrome plating is applied to the surface of the electroformed product to harden the surface of the electroformed nickel film in order to increase the surface hardness. This is not a preferable treatment because it disturbs the pattern shape.

[Problems with background technology]

If you count the problems with a master stamper like this, you will find the following.

(1) Silver mirrors do not deposit uniformly when they are attached to different objects - For example, when the master surface consists of the exposed surface of the substrate glass and the selectively left photosensitive resin film surface, The thickness of the silver film differs depending on which surface it is targeted for. In this way, the master stamper can be electroformed on the silver electrode formed with different film thicknesses. Silver is distributed on both sides to prevent peeling. )ゞWhen removing silver from the master stamper, nickel is dissolved, which is inconvenient◎ (2) In the electroforming bath! Star stamper table WJK Depositing nickel and melting raw nickel into this bath component are performed at a high current density in the same electrodeposition bath.For this reason, the metal to be melted is oxidized near the anode. This may cause a slime of insoluble precipitate to form in the bath or an oxide smut on the anode surface. Any of the impurity solids will be distributed in the bath liquid and will be inside the electroformed nickel film.
One pole is rotated to obtain a uniform thickness of electroformed nickel to be electrodeposited, but when using a molten anode, K becomes
In this case, the current distribution is increased to the periphery, and the inner thickness of nickel is increased around the electroformed surface, making the wall thickness not uniform.

[Purpose of the invention]

This invention includes the above-mentioned (1), (2),
(3) To provide an improved manufacturing method for an electroforming stamper for forming optical discs, which eliminates the disadvantages of each item. A metal thin film is formed by vapor-depositing metal on the disk surface, and the formed metal thin film is placed on the rotating anode surface with the exposed surface, and the metal thin film is deposited in a nickel bath using an insoluble anode. A method for producing an electroformed stamper for forming an optical disc, characterized in that an electroformed nickel film is formed on the surface and then peeled off from the master, or The bath temperature is 50-60℃, pH 3.0-4.5
The anode is an insoluble electrode made of either a noble metal or a copper alloy, and the bath liquid is transferred from the electrodeposition tank to the dissolution tank with an amount of nickel equivalent to the amount of nickel deposited. The aforementioned (1
The method for producing an electroformed stamper for forming optical discs as described in item (3) above, or (3) adding an amount equivalent to the amount of nickel deposited to the solution and injecting basic nickel sulfate into the melting tank to maintain - In the method for manufacturing an electroformed stamper for optical disk imaging described in (2) above, or (4) adding an equivalent amount of nickel to the solution to maintain the amount of nickel deposited, the nickel taplets are melted into the anode in the melting tank. ◎ For example, a photosensitive resin film is formed on a glass plate, and the surface of this film is optically The metal evaporated film, which is formed on the patterned surface of the original disc by etching a fine pattern, is
It has high adhesion strength with the electroformed nickel film, and when it is peeled off, it adheres to the electroformed nickel film as one, functioning as a master stamper. Deposited film thickness is 3001-10
001 - This metal evaporated surface is used as the transfer surface. ◎Nickel electroforming is performed by selecting a nickel sulfinate bath because it deposits a film with low stress. Since the anode is an insoluble anode, as nickel is deposited (by electroforming), the - value of the bath decreases, and for example, when the value becomes less than 2.5, the sulfanocolic acid will be hydrolyzed. 3.0 to 4.5 so that the value before precipitation can be returned to (by adding nickel from basic nickel carbonate or a dissolving anode) ◎The bath solution in which nickel was deposited is transferred from the electrodeposition tank to the dissolution tank. Nickel is added at ζ＼ and returned to the original -.The adjusted bath liquid is passed through and returned to the electrodeposition tank, where it is continuously electroformed to form a nickel film of a predetermined thickness. The bath temperature is specified in order to form an electroformed nickel film on a flat surface.When the temperature is too low or too high, the film body warps and At high temperatures, there is also the disadvantage that the bath liquid decomposes. [Embodiments of the Invention] Examples will be described below. In this example, the master disc is one in which a fine pattern is engraved by optical etching on the surface of a photosensitive resin film formed on a glass plate.The pattern of the master disc is created by laminating 300-10001 iK gold by evaporation. ◎This master is coated with vinyl chloride on a copper mandrel and placed on a nine-turn cathode. ◎The anode is an insoluble electrode. ◎In this example, a nickel plate is coated with 0.3~0.0% gold or platinum.
．． 5-voice coated body with a shape similar to the master disc, but it may also be a titanium plate. Master disc KO, 2S thickness O electroformed nickel film is formed in the nickel sulfonate bath of the electrodeposition tank. When the outer periphery of the cast film body is cut and the master and electroformed plate are separated, gold is deposited and a nine electroformed nickel film is obtained as a master stamper for forming optical discs.The nickel sulfanate bath is made of sulfa electroformed acid. =yKel tetrahydrate 450.9//*9 acid 3011/l nickel bromide 51/l, bit inhibitor and K> constituted.

The bath temperature was 55℃, the anode was coated with platinum, and the current was 8A/dI.
Electrodeposition is carried out at a pH of 4±0.5 with a voltage of 5 V.The IIH is lowered.The bath solution is transferred to the dissolution tank. The amount of nickel precipitated can be 1-29/l.

In the electrodeposition tank, only the deposition reaction takes place and no dissolution reaction takes place, so insoluble solids such as slime and smut do not eutectoid and the electroforming master stamper for forming optical discs does not damage the fine stamper. In this example, the entire thickness of the electroformed film body is covered by the undissolved anode, but the initial electroforming thickness range of 10 degrees to 5 degrees was carried out as described above, and then the electroformed film thickness was This is because the early stage of electroforming affects the Q fine pattern structure, which can be easily replaced by anode electroforming and overlay. A metal evaporated film is formed on the surface to give it conductivity, so that the fine pattern is not damaged, and an insoluble anode is used to eliminate the dissolution reaction in the electrodeposition tank, which prevents coarse foreign matter from forming on the deposited film. There is no distribution, and the shape of the anode can be selected so that it always remains constant, so the thickness of the nickel deposit can be made uniform0 Agent Patent Attorney Inoue -Male

Claims (1)

[Claims] (1) A cathode in which a metal is deposited on the master surface on which a fine pattern is formed to form a capsular thin film, and the formed metal thin film is solidified in such a way as to expose the surface. I slammed my fist to stop him.
A method for manufacturing an electroformed stamper for forming an optical disc, characterized by forming an electroformed nickel film on a metal thin film IIw in a nickel bath using a fusago anode and peeling it off from the master (
The nickel bath is a null 7 acetic acid nickel film with a bath temperature of 50 to 60℃, -s, O to 45), and the anode is precious metal, titanium, or from the bath IIVi electrodeposition tank) and from the bath IIVi electrodeposition tank
K11) In the Im tank, a large amount of nickel is added to the amount of nickel deposited to maintain - and return to electrodeposition 11 after passing through KIIIL, making it possible to perform electroforming continuously Patent claim 011 @ 1. Method for producing an electroformed stamper egg for forming optical discs as described in Section 1 (3) A large amount of nickel is added to the bath liquid and basic nickel carbonate is injected into the Kll decomposition bath to maintain the precipitated amount of nickel. A method for manufacturing an electroforming stamper for forming an optical disk according to claim 11112 (4) Adding a large amount of nickel precipitation to a bath solution and maintaining a rolling process in which nickel tablets are dissolved in a dissolving tank. A method for preparing an electroforming stamper for forming an optical disc according to claim 2, wherein the stamper is melted by applying a voltage as an anode.