JPS59150094A - Disc type rotary plating device - Google Patents

Disc type rotary plating device

Info

Publication number
JPS59150094A
JPS59150094A JP2344683A JP2344683A JPS59150094A JP S59150094 A JPS59150094 A JP S59150094A JP 2344683 A JP2344683 A JP 2344683A JP 2344683 A JP2344683 A JP 2344683A JP S59150094 A JPS59150094 A JP S59150094A
Authority
JP
Japan
Prior art keywords
plating
cathode
disc
matrix
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2344683A
Other languages
Japanese (ja)
Inventor
Kiyoshige Inagaki
稲垣 清滋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TEICHIKU KK
Original Assignee
TEICHIKU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TEICHIKU KK filed Critical TEICHIKU KK
Priority to JP2344683A priority Critical patent/JPS59150094A/en
Publication of JPS59150094A publication Critical patent/JPS59150094A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To enable uniform control of current density in the stage of plating in a disc type rotary plating device for producing a matrix for a disc record by forming an anode which is a plating metal with respect to a cathode which is the matrix into plural ring shapes and using respectively independent power sources for the same. CONSTITUTION:A matrix 13 is attached freely rotatably in a cathode chamber 23 and is connected via a fabric diaphragm 22 to an anode chamber 24 in the stage of plating Ni at a uniform thickness on the surface of a cathode disc 13 as a matrix for a disc record. Three pieces of annular anodes 41, 42, 43 contg. pellet-shaped Ni 50 in a Ti vessel are provided concentrically in an anode chamber 24 and the parts between the same are electrically insulated by means of partition plates 44, 45. The respective anodes are connected to the positive poles of respectively independent power sources 38, 39, 40, and the negative electrodes of the power sources are connected to the matrix 13 by means of a power feed brush 18. An Ni plating soln. is put in the device and while the matrix 13 is rotated with a motor 19, the voltages of the respective anodes are controlled, whereby the current for plating is conducted at uniform current density over the entire surface of the matrix 13 and the uniform Ni plating film is formed.

Description

【発明の詳細な説明】 産業上の利用分野 本発明はティスフレコード周器型の製造などに用いられ
る円盤状回転式メッキ装置の改良に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an improvement in a disc-shaped rotary plating apparatus used for manufacturing Tisfle record circumferential types.

従来例の構成とその問題点 従来、円盤状回転式メッキは、電解液の入った電解槽中
で円盤状被メッキ物を陰極とし、破メッキ部分に相対応
する位置に陽極を設置し、陰極を回転させながら陰陽極
間に電圧を印加して円盤状被メッキ物に所要の金属を析
出させるのが常である。この場合1円盤状回転陰極と相
対応する陽極が、円盤状回転陰極の各部分の電流密度が
崎しくなる様特殊な形状を成し、かつ不溶解性の陽極を
使用する場合を除き、通常の円盤状回転式メッキによる
場合は、円盤状被メツキ物各部の電びIL密度に差異を
生じ1円盤状回メッキ物各部の析出量及び析出物の内部
応力に差異を生じる。特に陰陽極を接近させ、単位面積
当たり大電流を通電する高各部分の析出量と析出物の内
部比、力を均一にするため、陰極又は陽極若しくは陰、
陽両極にマスキングを施したり、更に補助陰惨を使用し
たシすることが試みられたが、倒れの場合も陰、陽極l
i4]の距離の増加を必要とし、陰、陽極を近接させる
高速度回転式メッキに相反する結果となり、更に消費電
力の増加と設備の大型化及び町加電圧片!犬によって必
然的に伴う人体への電撃対策等、種々の問題を生じ、一
般的に実施されていないのが現状である。
Conventional structure and problems Conventional disc-shaped rotary plating has been performed by using a disc-shaped object to be plated as a cathode in an electrolytic bath containing an electrolytic solution, and setting an anode at a position corresponding to the broken plating area. It is customary to apply a voltage between the cathode and anode while rotating the plate to deposit the desired metal onto the disc-shaped object to be plated. In this case, unless an insoluble anode is used, the anode corresponding to the disc-shaped rotating cathode has a special shape so that the current density in each part of the disc-shaped rotating cathode is high. In the case of disc-shaped rotary plating, differences occur in the electrical current density of each part of the disc-shaped object to be plated, resulting in differences in the amount of precipitation and the internal stress of the precipitates in each part of the disc-shaped plated object. In particular, in order to make the amount of precipitation, internal ratio of precipitates, and force uniform in each part where a large current is passed per unit area by placing the cathode or anode close to each other,
Attempts have been made to mask both the positive and negative poles and to use auxiliary yin-so, but even in the case of collapse, the negative and anode l
i4], which is contrary to the high-speed rotary plating method in which the anode and anode are brought close to each other, resulting in an increase in power consumption, an increase in the size of the equipment, and the need for additional voltage strips! Currently, this method is not generally implemented because it causes various problems, such as measures against electric shock to the human body that are inevitably caused by dogs.

一方、円盤状回転陰極と相対応する陽極が円盤状回転陰
極の各部分の電流衿度が等しくなる様。
On the other hand, the anode that corresponds to the disc-shaped rotating cathode seems to have the same current curvature in each part of the disc-shaped rotating cathode.

特殊々形状をなし、かつ不@解性陽極を使用する場合は
、円盤状被メツキ物各部の析出量と析出物の内部応力を
均一とすることば可能である。しかし、陽極が不浴解性
であるため、電解液中への今風イオンの補給は金属塩類
によって行う必女があり、壕だ電解液中の有機添加剤か
陽極酸化を受けることにより電解液組成に制ネ勺を受け
、この方法も一般的に実施されていないのが現状である
When a specially shaped and insoluble anode is used, it is possible to make the amount of precipitation and the internal stress of the precipitate uniform in each part of the disc-shaped object to be plated. However, since the anode is non-bath dissolvable, it is necessary to replenish the electrolyte with modern ions using metal salts. Currently, this method is not generally implemented due to restrictions imposed on it.

以下、従来例としてディスクレコード用母型の製造に現
在一般的に使用されている円盤状回転式メッキ装置につ
いて図面に基づいて説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS As a conventional example, a disc-shaped rotary plating apparatus that is currently commonly used for manufacturing disk record master dies will be described below with reference to the drawings.

ディスクレコード用母型の製造は、アルミニラ製円盤に
樹脂コーティングを施した母材にディスク録音機(カッ
ティングマシン)によりオーディオ信号を記録し、オー
ディオ信号記録済原盤1を得る。このオーディオ信号記
録済原盤1に無電解メッキ、真空蒸着、スパッタリング
等によりニッケル、銀、銅等の金属を300〜3000
人厚さにコーティングし導電性被膜2を付力する。次に
前記導電性被膜2を付与されたオーディオ信号記録済原
盤1に0.2〜○、Bmm厚のニッケルメッキ(電鋳)
を行ない1次に第2図に示すように、オーディオ信号記
録済原盤1と導電性被膜2との境界より剥離し、導電性
被膜2に0.2〜0.8am厚のニッケルメッキされた
ニッケル原盤、即ち金属マスター3を得る。ディスクレ
コードは、この金属マスター3を使用し、@脂族型か可
能であるか、通常は第3図に示すように、金属マスター
3の前記被膜2の表面に重クロム酸塩溶、牧への浸漬、
アルブミン等の有機物溶液中への浸漬、又は陽極電解ス
トライクによる酸化膜の生成等によりザー4)を析出さ
く、第4図に示すように金属マスター3の被膜2′と金
属マサ−4の境界よりi!lJ rlし金属マザー4を
得る。更に第5図に示すように前記金属マザー4の表面
に上記と同様の不価J態化処理を施し、この処理面4′
上にニッケルメッキにより0.2〜0 、3 rrrm
 J9−のニッケル5を析出させ、第6図のように金属
マザー4の境界より剥離しニノケルスクンパ−5を得る
To manufacture a master mold for a disc record, an audio signal is recorded on a base material made of an aluminum disc coated with a resin using a disc recorder (cutting machine) to obtain a master disc 1 on which audio signals have been recorded. 300~3000 nickel, silver, copper, etc. metals are applied to this master disc 1 on which audio signals have been recorded by electroless plating, vacuum deposition, sputtering, etc.
The conductive coating 2 is coated to a thickness similar to that of the average thickness. Next, the audio signal-recorded master 1 to which the conductive film 2 has been applied is nickel plated (electroformed) with a thickness of 0.2 to ○, Bmm.
As shown in FIG. 2, the conductive film 2 is peeled off from the boundary between the master disc 1 on which audio signals have been recorded and the conductive film 2, and the conductive film 2 is coated with nickel with a thickness of 0.2 to 0.8 am. Obtain the master disc, that is, the metal master 3. Disc records use this metal master 3, and are usually of the aliphatic type, as shown in FIG. soaking,
Thermal 4) is deposited by dipping in an organic solution such as albumin or by forming an oxide film by anodic electrolytic strike, from the boundary between the coating 2' of the metal master 3 and the metal master 4, as shown in Figure 4. i! lJ rl to obtain metal mother 4. Furthermore, as shown in FIG. 5, the surface of the metal mother 4 is subjected to the same dehydration treatment as described above, and this treated surface 4'
0.2~0,3rrrm by nickel plating on top
Nickel 5 of J9- is precipitated and peeled off from the boundary of the metal mother 4 as shown in FIG. 6 to obtain Ninokel Skumper 5.

以上のように、ディスクレコード用母型の製造において
、ニッケルメッキ(電鋳)は製造工程の骨格をなすもの
で、第7図に従来の代表的な円盤状回転式メッキ装置を
示す。
As described above, nickel plating (electroforming) forms the backbone of the manufacturing process in the manufacture of disk record master molds, and FIG. 7 shows a typical conventional disk-shaped rotary plating apparatus.

この円盤状回転式メッキ装置は、電解槽10、直流電源
11、陽極12、円盤状回転陰極13゜隔壁14、電解
液入口15、電解液排出口16よりなる。電解槽10は
ステンレス鋼製容器の内面にゴムライニング17を施し
たものである。円盤状回転陰極13は給電刷子18によ
り直流電源11を介して陽極12に接続され、モーター
19によって回転し、かつ円盤回転軸中央のポル)20
はティスクレコ−1・用母型であるオーディオ信号記録
済原盤1や金属マスター3.金属マザー4をナツト21
により保持できるように表っている。円盤状回転陰極1
3は底面中央部に円形状の布製隔膜22を持つ合成樹脂
製隔壁14により形成される陰極室23に、また陽極1
2は電解槽10と合成樹脂製隔壁14により形成される
陽極室24にそれぞれセットされ、電解液(は1PLj
W Nk人口15よシ陰極呈23に入り、オーバーフロ
ーの後陽極室24へ入る。陽極室24の電解液面は陰極
室23の電解液面よりイち位のA’tiE造であるが、
陰極室と陽極室の間に9間を持つものではない。従って
、電解槽中の陽極12と円盤状回転陰極13は電解液を
介して通電が可能である。陽極12にはペレット状ニッ
ケル25を充填したチタン製容器26が設けである。
This disc-shaped rotary plating apparatus includes an electrolytic cell 10, a DC power source 11, an anode 12, a disc-shaped rotating cathode 13° partition wall 14, an electrolyte inlet 15, and an electrolyte outlet 16. The electrolytic cell 10 is a stainless steel container with a rubber lining 17 on the inner surface. The disc-shaped rotating cathode 13 is connected to the anode 12 via the DC power source 11 by a power supply brush 18, rotated by a motor 19, and connected to the pole 20 at the center of the disc rotation axis.
is a disk recorder 1, a master mold with audio signals recorded on it, and a metal master 3. Metal mother 4 to nut 21
It is shown so that it can be maintained by Disc-shaped rotating cathode 1
3 is a cathode chamber 23 formed by a synthetic resin partition wall 14 having a circular cloth partition 22 at the center of the bottom, and an anode 1
2 are respectively set in the anode chamber 24 formed by the electrolytic cell 10 and the synthetic resin partition wall 14, and the electrolyte (1 PLj
The WNk population 15 enters the cathode chamber 23 and after overflow enters the anode chamber 24. The electrolyte level in the anode chamber 24 is of A'tiE construction, which is lower than the electrolyte level in the cathode chamber 23.
It does not have 9 chambers between the cathode chamber and the anode chamber. Therefore, the anode 12 and disk-shaped rotating cathode 13 in the electrolytic cell can be energized via the electrolyte. The anode 12 is provided with a titanium container 26 filled with nickel pellets 25 .

27は電解液を循環さセるポンプ、28ば7L購液の貯
槽、29は陰、俊13に取りつける刊:型の周辺を押さ
えるリングである。30はモーター支持金具、31は上
蓋、32はモーター19の回転軸と陰極130回転軸3
3とを連結するカップリング、34は絶縁層である。3
5は回転Il!1II33に接触する給電刷子18を絶
縁材36に支持烙ぜるばねである。37は陽極支持台で
ある。
27 is a pump that circulates the electrolyte, 28 is a 7L storage tank, and 29 is a ring that holds the area around the mold that is attached to the shade and shun 13. 30 is a motor support fitting, 31 is a top cover, 32 is a rotation shaft of the motor 19 and a cathode 130 rotation shaft 3
3, and 34 is an insulating layer. 3
5 is rotation Il! This is a spring that supports the power supply brush 18 in contact with the insulating material 36. 37 is an anode support stand.

電74iHスルファミノ酸ニッケル、11う酸と少量の
界面活性剤(アンチピット剤)並びに塩化ニッケル等に
」:り構成されている。その配合例を次に示す。
It is composed of 74iH nickel sulfaminate, 11 fluoric acid, a small amount of surfactant (anti-pitting agent), nickel chloride, etc. An example of its formulation is shown below.

スルファミン酸ニッケル   3501/βはう酸  
           30ノ/β塩化ニツケル   
      6ノ/β界m1活性剤         
2QC,/2次に、ディスクレコード用母型製造におけ
るニッケルメッキ(電銑)の具体例として金属マザー4
よりニッケルスタンパ−5を製造する方法について説明
する。
Nickel sulfamate 3501/β nickel sulfamate
30/β nickel chloride
6-/β-world m1 activator
2QC, /2 Next, as a specific example of nickel plating (electroplating) in the manufacture of disk record mother molds, metal mother 4
A method for manufacturing the nickel stamper 5 will now be described.

ニッケルメッキに先立ち、前記配合例による電解液のp
Hを酸又はアルカリにより42±0.1に調整し、a温
を53°C±2°Cとする。循環ポンプ27によシミ解
液を電解液人口15より陰極室23へ供給L″PtPt
極室バーフローした電解液は陽極室24へ入り、陽極室
に過剰の電解液は貯槽28を経て循環ポンプ27に戻る
。このようにしてニッケルメッキの準備が完了する。
Prior to nickel plating, p of the electrolyte according to the above formulation example is
Adjust H to 42±0.1 with acid or alkali, and set a temperature to 53°C±2°C. The circulation pump 27 supplies the stain decomposition solution from the electrolyte solution 15 to the cathode chamber 23 L''PtPt
The electrolytic solution flowing into the electrode chamber enters the anode chamber 24, and the excess electrolyte in the anode chamber returns to the circulation pump 27 via the storage tank 28. In this way, preparation for nickel plating is completed.

前記金属マザー4は清浄化の後1重クロム酸カリ溶液へ
の浸漬により不働態化処理を施し充分に水洗した上1円
盤状回転式メッキ装置の円盤状回転陰極13の回転軸中
央のホル)20に金属マザー4の中心穴を挿入し2ナツ
ト21によって固定し、周辺部押えリング29によシ更
に強固に固定する。次にモーター19を起動し、円盤状
回転陰@13を回転させ、直ちに直流%源11により′
電圧を印加し電流を通じる。この電流は直径350m1
liの母型の場合、通電後5分間は30Aとし、以後1
40Aを通電し、総電流量140アンペア・時でニッケ
ルメッキか完了する。円盤状回転陰極13よシ前記今風
マザー4の固定を解除し、イー属マザー上にニノケルス
クンパー5を析出させた円盤を取り外す。水洗、乾燥の
後金風マザー4とニノケルスクンパー5の境界より両者
を分離しニノケルスクンパー5を得る。上丙己のように
して得られたニッケルスタンパ−5の同上・円上におけ
る肉1塁はマイクロメーターにて差を認められない。こ
れに対し直径方向の各部分には大きな差異がある。
After cleaning, the metal mother 4 was passivated by immersion in a potassium dichromate solution and thoroughly washed with water. 20 into the center hole of the metal motherboard 4, and fix it with two nuts 21, and fix it even more firmly with the peripheral part holding ring 29. Next, start the motor 19, rotate the disc-shaped rotating shade @13, and immediately turn on the DC% source 11 to
Apply voltage and conduct current. This current has a diameter of 350m1
In the case of li matrix, the current is 30A for 5 minutes after turning on, and then 1
Applying 40A current, the nickel plating is completed with a total current of 140 amperes/hour. The fixation of the modern mother 4 is released from the disk-shaped rotating cathode 13, and the disk on which the Ninokel Skumper 5 is deposited on the Ei mother is removed. After washing and drying, Kinpu Mother 4 and Ninokel Skumper 5 are separated from each other at the boundary to obtain Ninokel Skumper 5. There is no discernible difference in the first base of the nickel stamper 5 on the same circle as above when measured using a micrometer. On the other hand, there are large differences between each portion in the diametrical direction.

上記のようにして得たニッケルスタンパ−について、中
ノb部からの距離の異なる各位置での厚みを演1」足し
た結果を第1表に示す。なお、@試料はいずれも152
y−である。
Table 1 shows the results of adding the thicknesses of the nickel stampers obtained as described above at different distances from the center no. In addition, @ samples are all 152
It is y-.

(以下余白) 第1表において、中心部付近に対し、周辺部付近の肉厚
が20〜40%増となるのは、周辺部に電流が集中する
ためであ−る。即ち電流の分布が一様でない結果である
。一般に、電解液の組成、電解条件(但し電流密度を除
く)が一定であるならば、析出物の内部応力は各電流密
度に対し各々−足の値を持つことが知られている。従っ
て上記電流の分布が一様で々いといつことは、析出物の
内部応力が均一でないということにほかならない。
(Left below) In Table 1, the reason why the wall thickness near the periphery is 20 to 40% larger than that near the center is because the current is concentrated in the periphery. That is, the current distribution is not uniform. Generally, it is known that if the composition of the electrolytic solution and the electrolytic conditions (excluding the current density) are constant, the internal stress of the precipitate has a value of -1 for each current density. Therefore, the fact that the current distribution is uniform means that the internal stress of the precipitate is not uniform.

上記の結果、ニッケルスタンパ−5は引っ張り応力の影
響により第8図のように周辺部がわん状にカールする。
As a result of the above, the peripheral portion of the nickel stamper 5 curls into a bowl shape as shown in FIG. 8 due to the influence of tensile stress.

一方、ディスクレコードの製造は、オーディオ信号記録
済原盤1、金属マスター3、金蝿マザー4、ニノケルス
クンパー5を経て樹脂成型により製造される。即ち通常
3回のニッケルメッキ過程を経ている。この過程で析出
物の内部応力の影響によりニノケルスクンパー5の平面
性が損なわれ、ひいてはディスクレコードの平面性が失
われる。
On the other hand, a disk record is manufactured by resin molding through a master disk 1 on which an audio signal is recorded, a metal master 3, a metal fly mother 4, and a Ninokel Skumper 5. That is, the nickel plating process is usually performed three times. In this process, the flatness of the Ninokel Skumper 5 is impaired due to the influence of the internal stress of the precipitates, and as a result, the flatness of the disc record is lost.

ディスクレコードは見掛上平面性を保っているが、大小
様々のうねシを持ち、信号再生に障害を及ぼしている。
Although disc records maintain their apparent flatness, they have ridges of various sizes that impede signal reproduction.

一般に二ノ夛ルメッキ析出物の内部応力は、電解液に添
加剤を徐加すると改善されることが知られている。内部
応力全減少する添加剤としてサッカリン、スルフォン・
アミド・ベンゼン。
It is generally known that the internal stress of two-layer plating deposits can be improved by gradually adding additives to the electrolyte. Saccharin, sulfone, etc. as additives that reduce total internal stress.
Amidobenzene.

スルフォンアミドパラトルエン、1,3.6−fフタリ
ンスルフォン酸などの化合物がある。しかし、上記内部
応力を減少する添加剤の仲」れを取って見ても、各電流
密度において内部応力を等しくする゛ものでないことも
知られている。以上より内部応力を均一にし、かつ零近
傍に抑えるには、先ず電流の分布を一様とすることが必
要である。封」ち@部分の電流密度を等しくし、かつ過
当な・応力減少剤を適量使用することが必要となる(ケ
れども、電鋳母型表面に流れる電流密度と百つものは、
@型の形状及び陽極の形状如伺でかなり変わるもの、で
あり、一様な電流密度で作業することは不可とされ、析
出物の内部応力が零になる様な電流密度の値がわかって
いてもその電流密度で一様に電着できない以上どうにも
ならないのが現状である。
There are compounds such as sulfonamide paratoluene and 1,3.6-f phthaline sulfonic acid. However, it is also known that even if the additives that reduce the internal stress are taken into account, the internal stress is not made equal at each current density. From the above, in order to make the internal stress uniform and suppress it to near zero, it is first necessary to make the current distribution uniform. It is necessary to equalize the current density in the sealing part and use an appropriate amount of stress reducing agent (However, the current density flowing on the surface of the electroforming mold and the
It varies considerably depending on the shape of the @-type and the shape of the anode, and it is impossible to work with a uniform current density, and the value of the current density that makes the internal stress of the precipitate zero is known. However, the current situation is that nothing can be done about it as long as uniform electrodeposition cannot be achieved at that current density.

とは言うものの陰、陽極間の距離を円盤の直径の5倍以
上とすると電流密度全均一化し得るとの学説もあるが経
済的に困難である。又陽極もしくは陰極にじゃへい板を
設けるマスキング、補助陰極による過大電流の軽減等が
試みられてはいるか。
However, there is a theory that the current density can be made completely uniform by making the distance between the anode and the anode five or more times the diameter of the disk, but this is economically difficult. Also, have any attempts been made to reduce excessive current by masking the anode or cathode with a baffle plate, or by using an auxiliary cathode?

定量的に制御することができず、期待する効果が得られ
ないのが実状である。
The reality is that it cannot be quantitatively controlled and the expected effects cannot be obtained.

発明の目的 本発明は、上記の様な不都合を解消するもので、特に陰
、陽極間を近接させ単位面積当たり大電流を通電する高
速度円盤状回転式ノブキにおいて、円盤状回転陰極の各
部分の電流密度を制御し、円盤状被メッキ物の各部分の
析出物の内部応力を均一とし、かつ被メッキ物の各部分
に所要の析出量を得る装置を提供することを目的とする
。゛−−−−−−−発明の構成 本づL明は、複数の陽極と111−の円盤状回転共通陰
極で構成される電解槽において、複数の陽極の各々をM
流電源を介して単一の円盤状回転共通陰極に接続し、各
々の陰、陽極間に直流電圧を印加し、各陰、陽極間の印
加電圧を各々制御することにより、各々の電流を制御し
、単一の円盤状回転共通陰極の複数の陽極の各々に相対
応する部分の析出量及び析出物の内部応力を11ilJ
 m+するように構成したものである。
Purpose of the Invention The present invention is intended to solve the above-mentioned disadvantages. In particular, in a high-speed disc-shaped rotary knob in which the negative and anodes are brought close to each other and a large current is passed per unit area, each part of the disc-shaped rotating cathode is An object of the present invention is to provide an apparatus that controls the current density of the plating object, makes the internal stress of the precipitate uniform in each part of the disc-shaped object to be plated, and obtains the required amount of deposit on each part of the object to be plated.゛---------Constitution of the Invention The present invention is directed to an electrolytic cell composed of a plurality of anodes and a disk-shaped rotating common cathode of 111-, in which each of the plurality of anodes is
Each current is controlled by connecting to a single disk-shaped rotating common cathode via a current power source, applying a DC voltage between each cathode and anode, and controlling the applied voltage between each cathode and anode. The amount of precipitation and the internal stress of the precipitate at the portion corresponding to each of the plurality of anodes of a single disk-shaped rotating common cathode are calculated as 11ilJ.
It is configured so that m+.

実施例の説明 以下1本発明をディスクレコード用母型の製造に使用す
る円盤状回転式メッキ装置に適用した実施例を図面に基
づいて順次説明する。
DESCRIPTION OF EMBODIMENTS An embodiment in which the present invention is applied to a disk-shaped rotary plating apparatus used for manufacturing a master mold for a disk record will be described below in sequence with reference to the drawings.

なお本発明は、ディスクレコード用母型の製造に限らず
、コンパクトティスク、ビテオディスク。
Note that the present invention is not limited to the production of master molds for disc records, but can also be applied to compact discs and video discs.

情報ティスフ用量型々どにも適用が可能てあり。The information can be applied to various dosage types.

特に限定するものではない。It is not particularly limited.

第9図は本発明による円盤状回転式メッキ装置を示す。FIG. 9 shows a disc-shaped rotary plating apparatus according to the present invention.

この円盤状回転式メッキ装置は陰極側は前記の従来例と
同様の構成である。38 、39 。
This disk-shaped rotary plating apparatus has a cathode side having the same structure as the conventional example described above. 38, 39.

40は各々独立した直流電源、41,42.43は第1
0図のように三重のリング状に構成された陽極であり、
陽極は電気絶縁物」2よりなるリング状の隔離板44.
45によって隔離されている。
40 are independent DC power supplies, 41, 42, 43 are the first
It is an anode configured in a triple ring shape as shown in Figure 0.
The anode is a ring-shaped separator plate 44 made of an electrical insulator 2.
45.

円盤状回転共通陰極13は軸33、給電刷子18、王台
のそれぞれ独立した直流電源38゜39.4Qを介して
前記三個の部分より構成される陽極 41,42.43
の陽極電極4’6,47゜48のそれぞれに電気的に接
続されており、モーター19によって回転可14ヒの構
造にしである。この円盤状回転共通陰極13は底面中央
部に円形状の布製隔膜22を持つ合成樹脂製、隔壁14
により形成される陰極室23に、まだ前記三個の部分よ
り構成する陽極41’、、 42 、43は電解槽10
と隔壁14により形成される陽極室24の陽極支持台3
7上にセットされ、電解液は電解液入口15より陰極室
23に入り、オーバーフローの後陽極室24へ入る。陽
極室24の電解液面は陰極室23の電解液面よシ低位の
構造であるが、陰極室と陽極室の間に空間を持つもので
はない。従って電解槽中の前記三個の部分より構成する
陽極41゜42.43のそれぞれと円盤状回転共通陰極
13は、電解液を介しそれぞれ通電が可能である。前記
三個の部分より構成する陽極41,42..43はそれ
ぞれ独立したドーナツ状チタンケース49にペレット状
ニッケル50を充り:ta bだもので、三重の構造に
しである。電7Qイ液はスルファミン酸ニッケル、はう
酸、少量の界、面活性掘(アンチビット剤)、応力減少
剤、塩化コバルト、並びに塩化ニッケルにて構成されて
いる。配合例を次に示す。
The disk-shaped rotating common cathode 13 is an anode composed of the three parts 41, 42, 43 via the shaft 33, the power supply brush 18, and the stand, which are independent DC power supplies 38°39.4Q.
It is electrically connected to each of the anode electrodes 4'6, 47°48, and is rotatable by a motor 19. This disk-shaped rotating common cathode 13 is made of synthetic resin and has a circular cloth diaphragm 22 at the center of the bottom surface.
In the cathode chamber 23 formed by
and the anode support base 3 of the anode chamber 24 formed by the partition wall 14
7, the electrolyte enters the cathode chamber 23 from the electrolyte inlet 15, and after overflowing, enters the anode chamber 24. Although the electrolyte level of the anode chamber 24 is lower than the electrolyte level of the cathode chamber 23, there is no space between the cathode chamber and the anode chamber. Therefore, each of the anodes 41, 42, 43 and the disc-shaped rotating common cathode 13, which are comprised of the three parts in the electrolytic cell, can be electrically energized through the electrolyte. Anodes 41, 42 composed of the three parts. .. 43 are independent donut-shaped titanium cases 49 filled with pellet-like nickel 50, and have a triple structure. Electron 7Q liquid is composed of nickel sulfamate, fluoric acid, a small amount of interface, a surface active agent (antivit agent), a stress reducing agent, cobalt chloride, and nickel chloride. A formulation example is shown below.

例1 スルファミン酸ニッケル  55oy−/βはう酸  
            30ノ/f塩化ニツケル  
       6y−/β界面活性剤(アンチビット剤
)    2CC,76例2 スルフアミノ酸ニッケル  350ノ/βはう酸   
      30 !?/β塩化コバルト      
  30y−/β応力減少剤         12t
/β界面活性剤(アンチヒツト剤)、2CC,/β次に
本発明によるティスフレコード回器型の製造におけるニ
ッケルメッキの具体例として。
Example 1 Nickel sulfamate 55oy-/β oxalic acid
30n/f nickel chloride
6y-/β surfactant (antivital agent) 2CC, 76 example 2 Sulfur amino acid nickel 350-/β oxalic acid
30! ? /β cobalt chloride
30y-/β stress reducer 12t
/β surfactant (anti-hit agent), 2CC, /β Next, as a specific example of nickel plating in the production of a tape recorder type according to the present invention.

上記金属マザー4よりニッケルスタンパ−5金製造する
に除し、上記電m液配合例1及び配合例2によるニッケ
ルメッキについて説明する。
The nickel stamper 5 is manufactured from the metal mother 4 and the nickel plating according to the electrolytic solution formulation example 1 and formulation example 2 will be explained.

ニッケルメッキに先立ち、前記配合例による電解液のp
Hを酸又はアルカリによシ4゜2±0.1に調整し、液
温を53℃±2℃とする。循環ポンプ27によシ亀解液
を電解液人口15よシ陰極室23へ供給する。陰極室で
オーバーフローした電解液は陽極室24へ入シ、陽極室
に過剰の電解液は貯槽28を経て循環ポンプ27へ戻る
。以上のようにしてニッケルメッキの準備が完了する。
Prior to nickel plating, p of the electrolyte according to the above formulation example is
Adjust H to 4°2±0.1 with acid or alkali, and set the liquid temperature to 53°C±2°C. The circulation pump 27 supplies the electrolyte solution to the cathode chamber 23 from the electrolyte solution 15 . The electrolyte that overflows in the cathode chamber enters the anode chamber 24, and the excess electrolyte in the anode chamber returns to the circulation pump 27 via the storage tank 28. Preparation for nickel plating is completed in the above manner.

金属マザー4は、清浄化の後重クロム酸カリ溶液への浸
漬により前記同様不働態化処理を施し。
After cleaning, the metal mother 4 was subjected to passivation treatment in the same manner as described above by immersing it in a potassium dichromate solution.

充分に水洗する。そして円盤状回転式メッキ装置の円盤
状回転共通陰極13の回転II!1l133中央のボル
ト20に金属マザー4の中心穴−&Th人し、ナツト2
1によって固定し、更に周辺部押えリンク29により強
固に固定する。次にモーター19をち 起動し、共通陰極13を回転し、直に直流電源38.3
9.40により電圧を印加し電流を通じる。電流は直径
350胴の母型の場合、通電後5分間は総電流を3OA
とし、それぞれの割合は電源38 : 39 :4o=
o、s : 1 : 1.1である。5分経過後直流電
源を昇圧し、総電流を140Aとする。直流電源のそれ
ぞれの割合は電源38:39: 40=0.7 : 1
ニー1.1である。総電流量140A時にてニッケルメ
ッキか完了する。ニッケルメッキ完了後、円盤状回転共
通陰極より金属マザー4の固定を解除し、金属マザー4
上にニッケルスタンパ−5を析出させた円盤を取り外す
。水洗乾燥の後、金属マザー4とニノケルスクンパー5
の境界より両者を分離し、ニノケルスクンパー5を得る
。上記のようにして得られたニノケルスクンパー5の同
上・田土における肉厚はマイクロメーターにて差を認め
られない。一方、直径方向の各辿j定点での肉厚は基準
肉厚に対し±3係以内であっ( た。各群」定点で肉厚を第2表に示す。表においてハ 試料B−1〜B−5は配合例1の電解液による結果、試
料B−6〜B −1’Oは配合例2の電)0イ液による
結果を示している。また、各試料の重量はいずれも15
2y−である。
Wash thoroughly with water. And rotation II of the disc-shaped rotating common cathode 13 of the disc-shaped rotary plating device! 1l133 Attach the center hole of the metal motherboard 4 to the center bolt 20, and then attach the nut 2
1, and further firmly fixed by the peripheral portion holding link 29. Next, the motor 19 is started, the common cathode 13 is rotated, and the DC power source 38.3 is directly activated.
9. Apply voltage and conduct current according to 40. In the case of a mother mold with a diameter of 350 mm, the total current is 3 OA for 5 minutes after energization.
and the respective ratio is power supply 38:39:4o=
o, s: 1:1.1. After 5 minutes have elapsed, the DC power source is boosted to bring the total current to 140A. The ratio of each DC power source is 38:39:40=0.7:1
The knee is 1.1. Nickel plating is completed when the total current is 140A. After completing the nickel plating, release the fixation of the metal mother 4 from the disk-shaped rotating common cathode, and
The disk on which the nickel stamper 5 is deposited is removed. After washing and drying, Metal Mother 4 and Ninokel Skumper 5
Separate the two from the boundary to obtain Ninokelskumper 5. There is no discernible difference in the wall thickness of Ninokel Skumper 5 obtained as described above in the same manner as above and in the field soil using a micrometer. On the other hand, the wall thickness at each fixed point along the diametrical direction was within ±3 coefficients of the standard wall thickness. B-5 shows the results using the electrolytic solution of Formulation Example 1, and samples B-6 to B-1'O show the results using the electrolytic solution of Formulation Example 2. In addition, the weight of each sample is 15
2y-.

発明の効果 以上のように1本発明のメッキ装置は、複数の陽極と単
一の円盤状回転共通陰極で構成される電解槽において、
複数の各陽極を各々の電源を介して単一の円盤状回転共
通陰極に接続したので、各々の陰、陽画極間に直流電圧
を印加し、各陰21場両極間の印加電圧を各々制御し、
単一の円盤状回転共通陰惨の複数の陽極に相対応する部
分の%光密度を各々制往]することにより、容易に均一
な陰極電流密度を得ることかでき1円盤状被メッキ物各
部分の析出量及び析出物の内部応力をjli:4御する
ことかてきた。また配合例2の上記電解液中には301
/lの塩化コバルトを含有し、析出物(はニッケルとコ
バルトの合金となり、析出9勿中のコバルト含有量は2
7重量%で、ビッカース硬度はnv470を示した。一
方、上記配合例1、川」ちコバルトイオンを含有しない
電解液よりの析出物は従来又は本発明による円盤状回転
式メッキ方法による倒れの試料もビッカース硬度HV2
00を越えなかった。このようにニッケルとコバルトの
合金析出物は、硬度かIS〈、従ってi鞘乃耗性が要求
される成形母型としては理想に近いものの一つである。
Effects of the Invention As described above, the plating apparatus of the present invention has an electrolytic cell composed of a plurality of anodes and a single disk-shaped rotating common cathode.
Since each of the plurality of anodes is connected to a single disk-shaped rotating common cathode through each power source, a DC voltage is applied between each negative and positive electrode, and the applied voltage between each negative and positive electrode is controlled respectively. death,
Uniform cathode current density can be easily obtained by controlling the % light density of the parts corresponding to the plurality of anodes of a single disc-shaped rotating common gruesome object. The amount of precipitation and the internal stress of the precipitate were controlled by jli:4. In addition, the electrolyte of Formulation Example 2 contains 301
/l of cobalt chloride, the precipitate becomes an alloy of nickel and cobalt, and the cobalt content in the precipitate is 2.
At 7% by weight, the Vickers hardness showed nv470. On the other hand, in the above formulation example 1, the precipitates from the electrolyte that does not contain cobalt ions also have a Vickers hardness of HV2 when deposited by conventional or disc-shaped rotary plating method according to the present invention.
It did not exceed 00. As described above, the alloy precipitates of nickel and cobalt are close to ideal for molding molds that require hardness or IS, and therefore, abrasion resistance.

このようなニッケル・コバルト合金メッキは、陰極電流
密度の変化に敏感で、僅かな陰極電流密度の変化で急激
な応力変動を生じ、均一な陰極電流密度隻を得られない
場合は、特に型破りに適用することは不可であったが1
本発明は陰極電流密度を容易に均一化することができる
ため、前記第2表のようにコバルト・ニッケル合金析出
物を得ることができる。陰極電流密度を均一となし得る
こと(は、即ち記載例以外の1例えは電解液中への有機
化合物の徐加によるニッケル析出物の改質等を可能とす
るものである。
Such nickel-cobalt alloy plating is sensitive to changes in cathode current density, and small changes in cathode current density will cause rapid stress fluctuations, making it especially unconventional if a uniform cathode current density cannot be obtained. Although it was impossible to apply 1
Since the present invention can easily make the cathode current density uniform, it is possible to obtain cobalt-nickel alloy precipitates as shown in Table 2 above. The ability to make the cathode current density uniform (that is, in one example other than the examples described above, it is possible to modify nickel precipitates by gradually adding an organic compound to the electrolytic solution).

【図面の簡単な説明】[Brief explanation of the drawing]

第1図〜第6図はオーティオ信号記録済原盤からニッケ
ルスタンパ−1を得る工程を示す図、第7図は従来の代
表的な円盤状回転式メッキ装置の縦断面図、第8図は周
辺部がわん状にカールしたニッケルスタンパ−を示す断
面図、第9図は本発明による円盤状回転式メッキ装置の
実施例を示す縦断面図、第10図は第9図x−x’線断
血図、第11図はそのチタン製陽極の縦断回正l相図、
第12図は同縦断面側面図である。 10・・・・・電解槽、13・・・・・・円盤状回転陰
極、38〜40・・・・・電源、41,42.43・・
・・・・陽極。 49・・・・・・容器、50・・・・・ベレット状ニッ
ケル。 代理人の氏名 弁理士 中 尾 敏 男 ほか1名第1
図 第3図 、9 第4図 、? 第5図 第7図     tq 第8図 第9図 Q 第10図 第11図
Figures 1 to 6 are diagrams showing the process of obtaining a nickel stamper 1 from a master disk on which audio signals have been recorded, Figure 7 is a longitudinal cross-sectional view of a typical conventional disc-shaped rotary plating device, and Figure 8 is the surrounding area. 9 is a longitudinal sectional view showing an embodiment of the disc-shaped rotary plating apparatus according to the present invention, and FIG. 10 is a sectional view taken along the line xx' in FIG. 9. Blood diagram, Figure 11 is the vertical rotational phase diagram of the titanium anode,
FIG. 12 is a longitudinal cross-sectional side view of the same. 10... Electrolytic cell, 13... Disc-shaped rotating cathode, 38-40... Power supply, 41, 42.43...
····anode. 49...Container, 50...Bellet-shaped nickel. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
Figure 3, 9 Figure 4, ? Figure 5 Figure 7 tq Figure 8 Figure 9 Q Figure 10 Figure 11

Claims (1)

【特許請求の範囲】[Claims] 複数の陽極と単一の円盤状回転共通陰極で構成される電
解槽を(7firえ、複数の各陽イタを各々の電源を介
して単一の円盤状回転陰極陰、悌に接続して各隅、陽極
間に印加する直流電圧を各々制御するように構成した円
盤状回転式メッキ装置。
An electrolytic cell consisting of multiple anodes and a single disc-shaped rotating common cathode (7 fires) is constructed by connecting each of the multiple anodes to a single disc-shaped rotating cathode and cathode through each power supply. A disc-shaped rotary plating device configured to control the DC voltage applied between the corner and anode.
JP2344683A 1983-02-14 1983-02-14 Disc type rotary plating device Pending JPS59150094A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2344683A JPS59150094A (en) 1983-02-14 1983-02-14 Disc type rotary plating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2344683A JPS59150094A (en) 1983-02-14 1983-02-14 Disc type rotary plating device

Publications (1)

Publication Number Publication Date
JPS59150094A true JPS59150094A (en) 1984-08-28

Family

ID=12110726

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2344683A Pending JPS59150094A (en) 1983-02-14 1983-02-14 Disc type rotary plating device

Country Status (1)

Country Link
JP (1) JPS59150094A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7090751B2 (en) * 2001-08-31 2006-08-15 Semitool, Inc. Apparatus and methods for electrochemical processing of microelectronic workpieces
US7160421B2 (en) * 1999-04-13 2007-01-09 Semitool, Inc. Turning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
US7264698B2 (en) * 1999-04-13 2007-09-04 Semitool, Inc. Apparatus and methods for electrochemical processing of microelectronic workpieces
US7357850B2 (en) * 1998-07-10 2008-04-15 Semitool, Inc. Electroplating apparatus with segmented anode array
US7794573B2 (en) 2003-12-05 2010-09-14 Semitool, Inc. Systems and methods for electrochemically processing microfeature workpieces
JP2018188734A (en) * 2017-05-11 2018-11-29 ユニゾン・インダストリーズ,エルエルシー Component with differing material properties

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7357850B2 (en) * 1998-07-10 2008-04-15 Semitool, Inc. Electroplating apparatus with segmented anode array
US7160421B2 (en) * 1999-04-13 2007-01-09 Semitool, Inc. Turning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
US7264698B2 (en) * 1999-04-13 2007-09-04 Semitool, Inc. Apparatus and methods for electrochemical processing of microelectronic workpieces
US7090751B2 (en) * 2001-08-31 2006-08-15 Semitool, Inc. Apparatus and methods for electrochemical processing of microelectronic workpieces
US7794573B2 (en) 2003-12-05 2010-09-14 Semitool, Inc. Systems and methods for electrochemically processing microfeature workpieces
JP2018188734A (en) * 2017-05-11 2018-11-29 ユニゾン・インダストリーズ,エルエルシー Component with differing material properties
US11091848B2 (en) 2017-05-11 2021-08-17 Unison Industries, Llc Component with differing material properties

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