JPS5815286A - Electrode for silent discharge laser - Google Patents
Electrode for silent discharge laserInfo
- Publication number
- JPS5815286A JPS5815286A JP11408981A JP11408981A JPS5815286A JP S5815286 A JPS5815286 A JP S5815286A JP 11408981 A JP11408981 A JP 11408981A JP 11408981 A JP11408981 A JP 11408981A JP S5815286 A JPS5815286 A JP S5815286A
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- dielectric
- electrode
- electrodes
- silent discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は無声放電レーザ用電極に係り、特に無声放電励
起レーザ装置において放電開始電圧を低くなし、放電電
力密度を高めて高出力のレーザ光を発生させ得るように
した無声放電レーザ用電極に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an electrode for a silent discharge laser, and in particular, to a silent discharge excitation laser device, the firing voltage can be lowered and the discharge power density can be increased to generate high-output laser light. This invention relates to electrodes for silent discharge lasers.
従来、誘電体被覆電極間に発生させる無声放電部をレー
ザ励起源とした無声放電励起レーザ装置には、−例とし
て第１図に示すような構成のものが知られている。第１
図に示す装置において、レーザ媒質ガスｌを充満した容
器２内には得体の表面を誘電体で被覆された１対の電極
３Ａ、３Ｂが配設され、この１対の電極３Ａ、３Ｂに交
流電源４より電圧を印加すると各電極３Ａ、３Ｂ間には
無声放電５が生起される。この無声放″［５を介在して
全反射鏡６と部分反射鏡７とを対向して配置するとレー
ザ発根が発生し、第１図で矢印にて示すレーザ光出力８
が得られるものである。2. Description of the Related Art Conventionally, as an example of a silent discharge excitation laser device in which a silent discharge section generated between dielectric-coated electrodes is used as a laser excitation source, a configuration as shown in FIG. 1 is known. 1st
In the apparatus shown in the figure, a pair of electrodes 3A and 3B whose surfaces are coated with a dielectric material are arranged in a container 2 filled with a laser medium gas l, and an alternating current is applied to the pair of electrodes 3A and 3B. When a voltage is applied from a power source 4, a silent discharge 5 is generated between each electrode 3A and 3B. When the total reflection mirror 6 and the partial reflection mirror 7 are arranged opposite to each other with this silent emission "[5] in between, laser beam generation occurs, and the laser beam output 8 is shown by the arrow in FIG.
is obtained.
第２図は第１図に示す装置に使用される１対の電極３Ａ
、３Ｂの拡大断面図を表示している。同図において、１
対の電極３Ａ、３Ｂはそれぞれが導体９の表面を誘電体
１０によって被検されてなる構成を有しており、各誘電
体１０は互いに対抗して配設され、その対抗する表面間
に無塵放電５が生起される。Figure 2 shows a pair of electrodes 3A used in the device shown in Figure 1.
, 3B are shown. In the same figure, 1
The pair of electrodes 3A and 3B each has a structure in which the surface of a conductor 9 is tested by a dielectric 10, and each dielectric 10 is disposed opposite to each other, and there is no space between the opposing surfaces. A dust discharge 5 is generated.
第３図はこの無声放電５の放電特性を示すもの圧を徐々
に上昇させた場合、放電開始電圧１４までは殆んど電流
が流れることなく電圧が上昇するると、直ちに無声放電
５が生起して電流が流通し始めるために電圧は放電電圧
１５まで降下し、以後は放電電流が増加するにつれて放
電電圧も順次に上昇してゆく放電特性を呈する。Figure 3 shows the discharge characteristics of this silent discharge 5. When the pressure is gradually increased, almost no current flows until the discharge starting voltage 14, and when the voltage increases, the silent discharge 5 immediately occurs. As the current begins to flow, the voltage drops to the discharge voltage 15, and thereafter, as the discharge current increases, the discharge voltage also increases sequentially.
ところで、従来装置における前記誘電体１ｏの表面は、
通常平滑面に形成されているため、交流電源４の出力電
圧を徐々に上昇させたとき、放電開始電圧１４が比較的
高くなり無声放電５が生起し難く、また無声放電５が生
起すると放電電圧１５が急速ｌと低下して不連続な特性
となるので交流電源４による放電電力の制御が甚だ困難
となる不都合がある。また、前述のように誘電体１０の
表面が平滑面とされているために比熱的に表面積が小さ
くなり、これにより放電電力密度が低い等の欠点があっ
た。By the way, the surface of the dielectric 1o in the conventional device is
Since it is usually formed on a smooth surface, when the output voltage of the AC power supply 4 is gradually increased, the discharge starting voltage 14 becomes relatively high, making it difficult for the silent discharge 5 to occur, and when the silent discharge 5 occurs, the discharge voltage 15 rapidly decreases to 1, resulting in discontinuous characteristics, which makes it extremely difficult to control the discharge power by the AC power source 4. Further, as described above, since the surface of the dielectric 10 is smooth, the surface area becomes small in terms of specific heat, which causes disadvantages such as low discharge power density.
本発明は上述のような欠点を除去するために発明された
ものであり、誘電体被検電極間に発生させる無声放電部
をレーザ励起源とした無声放電励起レーザ装置において
、前記誘電体被接電極の表面を凹凸に形成してなる構成
を有してなり、これにより放電開始電圧を低くなし、放
電電力密度を高めることができるようにしてなる無声放
電レーザ用電極を提供することを目的とするものである
。The present invention was invented in order to eliminate the above-mentioned drawbacks, and provides a silent discharge excitation laser device using a silent discharge section generated between dielectric test electrodes as a laser excitation source. It is an object of the present invention to provide an electrode for a silent discharge laser, which has a structure in which the surface of the electrode is formed into irregularities, thereby making it possible to lower the discharge starting voltage and increase the discharge power density. It is something to do.
以下、図面に基づいて本発明を実施例によって詳細に説
明する。第４図は本発明に係る一実施例である無声放電
レーザ用電極の拡大断面図を示し、同図に示される互い
に対抗して配設される１対の電極３Ａ、３Ｂは、それぞ
れ導体９と、この導体９を被覆し、かつ表面の一部を凹
凸に形成してなる誘電体１３とから構成されている。こ
のような構成を有する各電極３Ａ、３Ｂの導体９に対し
て第１図に示す交流電源４より電圧を印加すると、互い
に対抗する各誘電体１３の表面の一部にはそれぞれ凹凸
部１３Ａ 、 １３Ｂが形成されているために、第１図
に示す従来例における誘電体１０の表面が平滑面である
場合の第３図に示す放電開始電圧１４と比べて、第５図
に示すようにその放電開始電圧１４は低くなる。また、
各電極３Ａ、３Ｂに被覆される誘導体１３の表面にはそ
れぞれ凹凸部１３Ａ。Hereinafter, the present invention will be described in detail by way of examples based on the drawings. FIG. 4 shows an enlarged sectional view of an electrode for a silent discharge laser according to an embodiment of the present invention. and a dielectric 13 that covers the conductor 9 and has a partially uneven surface. When a voltage is applied from the AC power source 4 shown in FIG. 1 to the conductor 9 of each electrode 3A, 3B having such a configuration, a portion of the surface of each dielectric 13 opposing each other has an uneven portion 13A, 13B, the discharge starting voltage 14 shown in FIG. 5 is lower than the discharge starting voltage 14 shown in FIG. 3 when the surface of the dielectric 10 in the conventional example shown in FIG. 1 is a smooth surface. The discharge starting voltage 14 becomes lower. Also,
The surface of the dielectric 13 covered with each electrode 3A, 3B has an uneven portion 13A.
１３Ｂが形成されてその表面積が大きくされているので
、各誘導体１３の表面における電流密度を前述の従来例
の電極のものに比べて低下させることができる。すなわ
ち、電極に対する電流密度を同一、こするとより多くの
電流を流通させることができることになり、このことは
従来例の電極に比較して放電電力密度を高くすることと
同じであり、本発明による構成を有する電極を使用する
ことによりレーザ光出力８を一層増大することができる
ものである。また、本発明では第５図に明示するように
各電極３Ａ、３Ｂ間の放電開始電圧１４が低くなること
により、交流電源４の耐電圧をも低くなし得るばかりか
、その放電電力の制御をも容易に行なうことが可能とな
る。13B is formed and its surface area is increased, the current density on the surface of each dielectric 13 can be lowered compared to that of the conventional electrode described above. In other words, if the current density to the electrode is the same, more current can be passed through the electrode, and this is the same as increasing the discharge power density compared to the conventional electrode. By using electrodes having this structure, the laser light output 8 can be further increased. In addition, in the present invention, by lowering the discharge starting voltage 14 between each electrode 3A and 3B as clearly shown in FIG. can also be done easily.
なお、前記誘電体１３としては、一般にガラス等の絶縁
物が良く使用され、このガラスの表面をすりガラス状に
形成加工することにより、極めて簡単に構成し得るもの
である。Incidentally, as the dielectric material 13, an insulating material such as glass is generally used, and it can be constructed extremely easily by forming the surface of this glass into a frosted glass shape.
以上詳述したように、本発明は無声放電励起レーザ装置
に使用される互いに対抗する誘導体検相電極の表面に凹
凸部を形成してなる構成を有するものであり、本発明に
よればこのように極めて簡単な構成をもって、従来のこ
の種の電極に比べて放電開始電圧を低くなし、放電電力
密度をより高めることができるので、高出力のレーザ光
出力を容易に発生させることができるという格別に優れ
た効果を奏するものである。As described in detail above, the present invention has a configuration in which uneven portions are formed on the surfaces of mutually opposing dielectric phase detection electrodes used in a silent discharge excitation laser device. With an extremely simple configuration, it is possible to lower the discharge starting voltage and increase the discharge power density compared to conventional electrodes of this type, making it possible to easily generate high-power laser light output. It has excellent effects.
第１図は従来例の無声放電励起レーザ装置を示す概要構
成図、第２図は第１図の装置に使用される１対の電極の
拡大断面図、第３図は第２図に示す１対の電極間の無声
放電特性図、第４図は本発明の一実施例である１対□の
電極の拡大断面図、第５図は第４図に示す１対の電極間
の無声放電特性図である。
１・・・・・・・・・レーザ媒質ガス、２・・・・・・
−容器、３Ａ、３１Ｊ・・・・・・・・・電極、４・・
・・・・・・・交流電源、５・・・−・・・・・無声放
電、６・・・・・・・・全反射鏡、７・・・・・・・・
・部分反射鏡、８・・・・・・・・レーザ光出力、９・
・・−・・・・導体、１０，１３・・・・・・・・・誘
電体、１３Ａ 、 １３Ｂ・・・・・・・・・凹凸部。
なお、図中同一符号は同一、又は相当部分を示す。
代理人 葛 野 信 −
第１図
、２
第２図
第４
一ノ′
ノ
距
第５図
Ａ
）
ＢFig. 1 is a schematic configuration diagram showing a conventional silent discharge pumped laser device, Fig. 2 is an enlarged sectional view of a pair of electrodes used in the device of Fig. A silent discharge characteristic diagram between a pair of electrodes, FIG. 4 is an enlarged sectional view of a pair of electrodes which is an embodiment of the present invention, and FIG. 5 is a silent discharge characteristic diagram between a pair of electrodes shown in FIG. 4. It is a diagram. 1... Laser medium gas, 2...
-Container, 3A, 31J... Electrode, 4...
・・・・・・・・・AC power supply, 5・・・・・・・・・Silent discharge, 6・・・・・・・Total reflection mirror, 7・・・・・・・・・・・・
・Partial reflection mirror, 8...Laser light output, 9.
...... Conductor, 10, 13... Dielectric, 13A, 13B... Concave and convex portion. Note that the same reference numerals in the figures indicate the same or equivalent parts. Agent Makoto Kuzuno - Figures 1 and 2 Figure 2 Figure 4 Distance Figure 5 A) B
Claims (2)
ザ励起源とした無声放電励起レーザ装置において、前記
誘電体被覆電極の表面を凹凸に形成してなることを特徴
とする無声放電レーザ用電極。(1) A silent discharge excitation laser device using a silent discharge portion generated between dielectric covered electrodes as a laser excitation source, characterized in that the surface of the dielectric covered electrode is formed to have an uneven surface. electrode.
すりガラス状に形成してなるガラス等の絶縁物を用いる
ことを特徴とする特許請求の範囲第１項記載の無声放電
レーザ用電極。(2) The silent discharge laser electrode according to claim 1, wherein an insulating material such as glass whose surface is formed into a frosted glass shape is used as the dielectric of the dielectric covered electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11408981A JPS5815286A (en) | 1981-07-21 | 1981-07-21 | Electrode for silent discharge laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11408981A JPS5815286A (en) | 1981-07-21 | 1981-07-21 | Electrode for silent discharge laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5815286A true JPS5815286A (en) | 1983-01-28 |
Family
ID=14628813
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11408981A Pending JPS5815286A (en) | 1981-07-21 | 1981-07-21 | Electrode for silent discharge laser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5815286A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06209131A (en) * | 1992-07-06 | 1994-07-26 | Heraeus Noblelight Gmbh | High-output beam generator |
| WO2004066461A1 (en) * | 2003-01-24 | 2004-08-05 | Trumpf, Inc. | Diffusion-cooled laser system |
-
1981
- 1981-07-21 JP JP11408981A patent/JPS5815286A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06209131A (en) * | 1992-07-06 | 1994-07-26 | Heraeus Noblelight Gmbh | High-output beam generator |
| WO2004066461A1 (en) * | 2003-01-24 | 2004-08-05 | Trumpf, Inc. | Diffusion-cooled laser system |
| US6879616B2 (en) | 2003-01-24 | 2005-04-12 | Trumpf, Inc. | Diffusion-cooled laser system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4542529A (en) | Preionizing arrangement for transversely excited lasers | |
| US4597086A (en) | Coaxial type laser oscillator for excitation by silent discharge | |
| JPS5815286A (en) | Electrode for silent discharge laser | |
| US3893046A (en) | Parallel plate transmission line laser excitation system | |
| JPS6026310B2 (en) | gas laser equipment | |
| JPS6240876B2 (en) | ||
| EP0020624A1 (en) | Pulsed discharge gas laser apparatus. | |
| JPS58216481A (en) | High frequency discharge sealing type gas laser | |
| JPH0234196B2 (en) | GASUREEZASOCHI | |
| JPS60157277A (en) | Axial-flow type noiseless discharge excitation gas laser device | |
| JPS6339111B2 (en) | ||
| JPH038381A (en) | Gas laser device | |
| JPS5850788A (en) | Lateral mode excitation type gas laser device | |
| JPH01214184A (en) | Pulse laser oscillation device | |
| RU2146409C1 (en) | Transverse-flow electrooptical laser unit | |
| JPH0239871B2 (en) | ||
| JPH0225267B2 (en) | ||
| JPS6026311B2 (en) | gas laser equipment | |
| JPS5851581A (en) | Lateral excitation type gas laser | |
| JPS631086A (en) | Gas laser oscillator | |
| JPS58103186A (en) | Rf discharge carbon dioxide wave guide type laser tube | |
| RU2227949C2 (en) | High-power slotted gas laser | |
| JPS5855653Y2 (en) | gas laser equipment | |
| JPS5821891A (en) | Noiseless discharge type carbon dioxide gas laser | |
| JPS6240877B2 (en) |