JPS5815153A - 超音波顕微鏡 - Google Patents
超音波顕微鏡Info
- Publication number
- JPS5815153A JPS5815153A JP56113699A JP11369981A JPS5815153A JP S5815153 A JPS5815153 A JP S5815153A JP 56113699 A JP56113699 A JP 56113699A JP 11369981 A JP11369981 A JP 11369981A JP S5815153 A JPS5815153 A JP S5815153A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- stress
- motor
- observed
- scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001902 propagating effect Effects 0.000 claims description 3
- 238000002604 ultrasonography Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 230000002706 hydrostatic effect Effects 0.000 description 4
- 230000003068 static effect Effects 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/0289—Internal structure, e.g. defects, grain size, texture
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56113699A JPS5815153A (ja) | 1981-07-22 | 1981-07-22 | 超音波顕微鏡 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56113699A JPS5815153A (ja) | 1981-07-22 | 1981-07-22 | 超音波顕微鏡 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5815153A true JPS5815153A (ja) | 1983-01-28 |
| JPH0158457B2 JPH0158457B2 (enrdf_load_stackoverflow) | 1989-12-12 |
Family
ID=14618930
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56113699A Granted JPS5815153A (ja) | 1981-07-22 | 1981-07-22 | 超音波顕微鏡 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5815153A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61194353A (ja) * | 1985-02-25 | 1986-08-28 | Hitachi Ltd | 超音波顕微鏡 |
-
1981
- 1981-07-22 JP JP56113699A patent/JPS5815153A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61194353A (ja) * | 1985-02-25 | 1986-08-28 | Hitachi Ltd | 超音波顕微鏡 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0158457B2 (enrdf_load_stackoverflow) | 1989-12-12 |
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