JPS58148070U - 半導体結晶成長装置 - Google Patents

半導体結晶成長装置

Info

Publication number
JPS58148070U
JPS58148070U JP4334782U JP4334782U JPS58148070U JP S58148070 U JPS58148070 U JP S58148070U JP 4334782 U JP4334782 U JP 4334782U JP 4334782 U JP4334782 U JP 4334782U JP S58148070 U JPS58148070 U JP S58148070U
Authority
JP
Japan
Prior art keywords
growth
furnace
crystal growth
semiconductor crystal
ampoule
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4334782U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6127975Y2 (enExample
Inventor
吉河　満男
宏 瀧川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4334782U priority Critical patent/JPS58148070U/ja
Publication of JPS58148070U publication Critical patent/JPS58148070U/ja
Application granted granted Critical
Publication of JPS6127975Y2 publication Critical patent/JPS6127975Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP4334782U 1982-03-26 1982-03-26 半導体結晶成長装置 Granted JPS58148070U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4334782U JPS58148070U (ja) 1982-03-26 1982-03-26 半導体結晶成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4334782U JPS58148070U (ja) 1982-03-26 1982-03-26 半導体結晶成長装置

Publications (2)

Publication Number Publication Date
JPS58148070U true JPS58148070U (ja) 1983-10-05
JPS6127975Y2 JPS6127975Y2 (enExample) 1986-08-20

Family

ID=30054440

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4334782U Granted JPS58148070U (ja) 1982-03-26 1982-03-26 半導体結晶成長装置

Country Status (1)

Country Link
JP (1) JPS58148070U (enExample)

Also Published As

Publication number Publication date
JPS6127975Y2 (enExample) 1986-08-20

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