JPS6297183U - - Google Patents

Info

Publication number
JPS6297183U
JPS6297183U JP18912385U JP18912385U JPS6297183U JP S6297183 U JPS6297183 U JP S6297183U JP 18912385 U JP18912385 U JP 18912385U JP 18912385 U JP18912385 U JP 18912385U JP S6297183 U JPS6297183 U JP S6297183U
Authority
JP
Japan
Prior art keywords
pulling
single crystal
shaft
pulling shaft
friction plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18912385U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0232689Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18912385U priority Critical patent/JPH0232689Y2/ja
Publication of JPS6297183U publication Critical patent/JPS6297183U/ja
Application granted granted Critical
Publication of JPH0232689Y2 publication Critical patent/JPH0232689Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP18912385U 1985-12-10 1985-12-10 Expired JPH0232689Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18912385U JPH0232689Y2 (enExample) 1985-12-10 1985-12-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18912385U JPH0232689Y2 (enExample) 1985-12-10 1985-12-10

Publications (2)

Publication Number Publication Date
JPS6297183U true JPS6297183U (enExample) 1987-06-20
JPH0232689Y2 JPH0232689Y2 (enExample) 1990-09-04

Family

ID=31141133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18912385U Expired JPH0232689Y2 (enExample) 1985-12-10 1985-12-10

Country Status (1)

Country Link
JP (1) JPH0232689Y2 (enExample)

Also Published As

Publication number Publication date
JPH0232689Y2 (enExample) 1990-09-04

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