JPS58147939A - Manufacturing method for color pickup tube - Google Patents

Abstract

PURPOSE:To perform boring work with an excellent processing shape without damaging a bonding agent layer. CONSTITUTION:A mask plate frame body 30 is configured by forming a red reflection stripe filter 17 and a blue reflection stripe filter 18 on one surface of a transparent glass substrate 16 and bonding a transparent glass substrate 29 using a bonding agent layer 19 so as to interpose both filters 17 and 18 therebetween. A hole 31 is bored up to almost the half of the thickness of both substrates 16 and 29 from the transparent glass substrate 16 to the transparent glass substrate 29 and a glass rod 32 is inserted and fixed. Then the top 32a of the glass rod 32 is broken away. Besides, the transparent glass substrate 29 is ground. Subsequently, after the said grinding is completed, a thru hole 34 is formed and a desired faceplate frame body 21 is obtained by removing the glass rod 32 with the use of a narrow wire or the like while keeping the whole mask plate frame body 30 at 100-120 deg.C again.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a method of manufacturing a single-tube color imaging tube, and more particularly to a method of manufacturing a face plate structure of a single-tube or two-tube color imaging tube.

[Technical details of the invention] Generally, a photoconductive type image pickup tube is constructed as shown in Figure 1, in which a transparent glass substrate 1 is coated with a transparent conductive film 2 and a photoconductive film 3 in sequence on its inner surface. The face plates 1-, s are constructed, and this 4-row face plate is sealed to the open end of the envelope 7 in which the electron gun is housed using a target tinog 5 coated with indium 4. It is constructed by evacuating the inside of the container 7 to a vacuum. .

In use, light 8 from an object is imaged onto the photoconductive film 3 through the optical lens 9, and a charge pattern image corresponding to the image of the object is formed on the photoconductive film 3. Then, the electron beam IO from the electron gun 6 is focused and scanned by a magnetic field created by a coil 1 arranged around the outer periphery of the envelope 7,
The charge pattern is taken out as an output from the target ring 5 through the transparent conductive film 2 and indium 4, and is sent to the amplifier 1 for signal processing via the capacitor 12.
3 will be introduced.

The signal-to-noise ratio S/N of the output signal from the amplifier 13 is determined by the equivalent noise resistance of the FET in the first stage of the amplifier 13 and the stray capacitance 14 entering the input section. is required for an 8/N improvement. The stray capacitance 14 is the sum of the input capacitance of the first stage FgT capacitor and the output capacitance of the image pickup tube. The output capacitance of the image pickup tube consists of the capacitance of the photoconductive film 3, the electron gun and the coil 1, and the capacitance of the target ring 5, the electron gun q-, and the coil 11, and they are approximately the same size. have. This means that target ring 5
This also means that the S/N can be improved by removing the .

By the way, single-tube color image pickup tubes have a frequency separation method,
A phase separation system, a three-electrode system, etc. are used, and as an example, a face plate structure for a single tube color image pickup tube using a frequency separation system is shown in FIG.

That is, a red reflective stripe filter 17 and a blue reflective stripe filter 18 are provided on a transparent glass substrate 16, and a thin glass plate 20 of about 10 to 30 microns is attached via a binder layer 19. Transparent grooves, direct conversion, and photoconductive film (both not shown) are placed on the thin plate 2o.
) are sequentially formed to constitute the face plate structure 21.

Now, remove the target ring as shown above and check the S/N
In order to improve this, a through hole of approximately 0.2 to 1.0 W is made in the part of the face plate structure other than the part used as the beam scanning surface, and a through hole of about 0.2 to 1.0 W is made using metal indium or a low melting point activated alloy. Make electrical contact with the transparent conductive film in a vacuum-tight manner,
It is only necessary to take out the electric signal directly from this part, that is, by penetrating the face plate.

Therefore, as a method for making through holes in the above-mentioned face plate structure 2, conventionally, a method using a machining needle using ultrasonic vibration is generally used, as shown in FIG. 3. That is, the face plate structure J is attached to the processing glass substrate 22 with a low melting point adhesive 23 such as paraffin.
Glue with. Next, place the positioning jig 24 on the face plate structure-2-7.
while injecting the abrasive 25, apply a suitable weight 2.
A through hole is made using an ultrasonic processing machine 27 loaded with a pressure of 6.

[Problems with background technology]

In the above-mentioned conventional method, if the through hole is drilled from the thin glass plate 20 side, a relatively clean hole can be made, but the surface of the thin glass plate 20 is damaged. Father, ultrasonic processor 27
The glass at the edge of the open end of the transparent glass substrate 16 on the side where the processing needle 28 has come out is broken. Furthermore, conversely, the transparent glass substrate 16
If the through hole is opened from the side, the elasticity of the adhesive layer I9 between the thin glass plate 20 will cause abnormalities such as peeling at the bonded portion, and in extreme cases, the thin glass plate 20 around the cargo hole will break.

[Purpose of the invention]

The purpose of this invention is to eliminate the above-mentioned conventional drawbacks,
It is an object of the present invention to provide a method for manufacturing a color image pickup tube in which holes are formed in an excellent shape without damaging the adhesive layer.

[Summary of the invention]

In this invention, a stripe filter is attached to one of the two glass substrates, and the two glass substrates are bonded with an adhesive with the stripe filter interposed therebetween. Drill a through hole or a hole halfway through the other glass substrate from the substrate side, insert and fix a glass rod into this hole, polish the other glass substrate to a specified thickness, and then insert the glass rod. This is a method of manufacturing a color image pickup tube in which the color image pickup tube is removed.

[Embodiments of the invention]

As shown in FIG. 4, a red reflective stripe filter I7 and a blue reflective stripe filter 18 are formed on one surface ζ of a transparent glass substrate, and both filters 17.1
Transparent glass substrates 29 having approximately the same thickness as the transparent glass substrates 16 are bonded to each other by an adhesive layer 19 so as to sandwich the transparent glass substrates 8 between them, thereby forming a plate face plate structure 30-. Then, using an ultrasonic processing machine similar to that shown in Fig. 3, the transparent glass substrate 1 is
3 holes are made in the transparent glass substrate 29 from the 6 side to about half its thickness. Alternatively, it may be passed through. In this case, the crank is inserted at the end when the processing needle of the ultrasonic power tool comes out, but there is no problem with the product. A glass rod 32 is inserted and fixed into the hole 31 thus opened. The thickness of this glass rod 32 is 0.05 to 0.2 m larger than the size of the hole 3I.
It is appropriate that the glass rod be as thin as ar, and can be made by heating a rod-shaped glass with a glass burner and stretching it. Further, it is preferable that the material is a glass material of the same quality as the transparent glass substrate 16.29, but since the area ratio to the entire substrate is small, there is no problem even if the material is of the same type or a different type of glass. An adhesive 33 is used to fix such a glass rod 32, but each filter 17. If the IB is made of a similar material, the adhesive 33 is preferably one with a low melting point such as paraffin due to its heat resistance.In order to fix the glass rod 32 with such an adhesive 33, the plate structure: !,” overall 10
The glass rod 32 is maintained at a temperature of 0 to 120 degrees Celsius, and the tip of the glass rod 32 is immersed in the molten adhesive 19 before being inserted into the hole 31. When the temperature is then raised to room temperature, the glass rod 32 is completely fixed. Ru.

Next, as shown in FIG. 4 (bl), the glass rod 32 protruding from the plate surface plate structure U is inconvenient during polishing, which will be described later, so the work will be easier if the head 32a is broken.

Next, as shown in FIG. 41 (cl), the transparent glass substrate 29
Perform polishing. This polishing is done by roughing it at first,
The thickness of the transparent glass substrate 29 is about 100 microns. Thereafter, polishing is performed to finish the thin glass plate 20 with a predetermined thickness.

The glass rod 32 inserted and fixed into the plate surface plate structure A prevents the hole 31 from expanding due to the movement (rolling) of the abrasive and local polishing around the hole 3, and prevents the adhesive layer 19 from being polished. It does not cause any damage and is indispensable for excellent polishing of carbo-machined shapes.

Next, after the polishing is completed, the entire plate structure 30□ is kept at a temperature of 100 to 120° C. and the glass rod 32 is removed with a thin wire or the like to form a through hole 34, as shown in FIG.
d) (The desired face plate structure L1 as shown is obtained.

〔Effect of the invention〕

According to this invention, since polishing is performed by inserting and fixing the glass rod 32 into the plate structure 1A, the expansion of the hole 31 due to movement of the polishing agent and local polishing around the hole 3 are prevented. , it is possible to perform polishing with an excellent processed shape without causing any damage to the adhesive layer 19, and the through hole 34 can be easily obtained.

In the above embodiment, the glass rod 32 was inserted and fixed into the hole 31 for polishing, but the same effect can be achieved even if only the adhesive 33 is filled in the hole 3 without using the glass rod 32. There is.

[Brief explanation of the drawing]

Fig. 1 is a sectional view showing a general image pickup tube, Fig. 2 is a sectional view showing the face plate structure of a color image pickup tube, Fig. 3 is a sectional view showing a conventional manufacturing method, and Fig. 4 (al to fdl are It is a sectional view showing a method of manufacturing a color image pickup tube according to an embodiment of the present invention. 16... Transparent glass substrate, 17... Red reflective stripe filter, 18... Blue reflective stripe filter, I9 ... Adhesive layer, 20 ... Glass thin plate, 27.
...Ultrasonic processor, 29...Transparent glass substrate, D...
・Plate face plate structure, 31...hole, 32...glass rod, 3
3...Adhesive, 34...Through hole. Applicant's agent Patent attorney Takehiko Suzue 3rd 'j'
J <a> -170- Figure 4

Claims (3)

[Claims] (1) A method for manufacturing a color image pickup tube characterized by comprising at least the following steps ω to α. ■ A stripe filter is provided on one surface of the first transparent glass substrate, and further an adhesive A second transparent glass substrate is grown to form a plate structure. (2) Next, from the first transparent glass substrate side of the plate structure to the middle of (or through) the second transparent glass substrate. Drill a hole, insert a glass rod into the hole, and fix it with adhesive. ■ Next, remove the head of the glass rod that protrudes from the plate structure. (Next, attach the second transparent glass substrate to the glass rod. Polish to the specified thickness. ■ Next, remove the glass rod. (2) The method for manufacturing a color image pickup tube according to claim 1, wherein the hole is filled with only an adhesive instead of the glass rod. (3) Claims 1 and 2, wherein the red reflective stripe filter and the evening reflective stripe filter are made of organic material, and the adhesive is a low melting point adhesive.
Color photography as described in section: Iken manufacturing method.