JPS58146807A - 平面度測定装置 - Google Patents
平面度測定装置Info
- Publication number
- JPS58146807A JPS58146807A JP2962282A JP2962282A JPS58146807A JP S58146807 A JPS58146807 A JP S58146807A JP 2962282 A JP2962282 A JP 2962282A JP 2962282 A JP2962282 A JP 2962282A JP S58146807 A JPS58146807 A JP S58146807A
- Authority
- JP
- Japan
- Prior art keywords
- data
- flatness
- address
- image sensor
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012545 processing Methods 0.000 claims abstract description 15
- 230000003287 optical effect Effects 0.000 claims description 30
- 238000006243 chemical reaction Methods 0.000 claims description 19
- 238000012360 testing method Methods 0.000 claims description 6
- 238000004148 unit process Methods 0.000 claims 1
- 238000012937 correction Methods 0.000 abstract description 6
- 230000004907 flux Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 9
- 238000005259 measurement Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000009467 reduction Effects 0.000 description 3
- 235000006693 Cassia laevigata Nutrition 0.000 description 2
- 241000522641 Senna Species 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 229940124513 senna glycoside Drugs 0.000 description 2
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- 229910001369 Brass Inorganic materials 0.000 description 1
- 241000102542 Kara Species 0.000 description 1
- 244000269722 Thea sinensis Species 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 210000003323 beak Anatomy 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
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- 230000008859 change Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
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- 125000006850 spacer group Chemical group 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Supporting Of Heads In Record-Carrier Devices (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2962282A JPS58146807A (ja) | 1982-02-24 | 1982-02-24 | 平面度測定装置 |
| US06/449,733 US4627733A (en) | 1981-12-25 | 1982-12-14 | Flatness measuring apparatus |
| DE19823247238 DE3247238A1 (de) | 1981-12-25 | 1982-12-21 | Ebenheitsmessgeraet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2962282A JPS58146807A (ja) | 1982-02-24 | 1982-02-24 | 平面度測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58146807A true JPS58146807A (ja) | 1983-09-01 |
| JPS6364722B2 JPS6364722B2 (enExample) | 1988-12-13 |
Family
ID=12281180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2962282A Granted JPS58146807A (ja) | 1981-12-25 | 1982-02-24 | 平面度測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58146807A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60193852A (ja) * | 1984-03-09 | 1985-10-02 | 三笠産業株式会社 | 容器又は瓶の注出口とその製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50126132A (enExample) * | 1974-03-23 | 1975-10-03 | ||
| JPS632446A (ja) * | 1986-06-20 | 1988-01-07 | Matsushita Electric Ind Co Ltd | Dpsk変調デ−タの復調回路 |
-
1982
- 1982-02-24 JP JP2962282A patent/JPS58146807A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50126132A (enExample) * | 1974-03-23 | 1975-10-03 | ||
| JPS632446A (ja) * | 1986-06-20 | 1988-01-07 | Matsushita Electric Ind Co Ltd | Dpsk変調デ−タの復調回路 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60193852A (ja) * | 1984-03-09 | 1985-10-02 | 三笠産業株式会社 | 容器又は瓶の注出口とその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6364722B2 (enExample) | 1988-12-13 |
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