JPS58146435A - 加熱用電源装置 - Google Patents
加熱用電源装置Info
- Publication number
- JPS58146435A JPS58146435A JP2933282A JP2933282A JPS58146435A JP S58146435 A JPS58146435 A JP S58146435A JP 2933282 A JP2933282 A JP 2933282A JP 2933282 A JP2933282 A JP 2933282A JP S58146435 A JPS58146435 A JP S58146435A
- Authority
- JP
- Japan
- Prior art keywords
- terminals
- transformer
- balanced
- semiconductor
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 59
- 238000010438 heat treatment Methods 0.000 title claims description 23
- 238000004804 winding Methods 0.000 abstract description 23
- 238000010586 diagram Methods 0.000 description 6
- 239000013256 coordination polymer Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000000969 carrier Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 101100425896 Mus musculus Tpm1 gene Proteins 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000008246 gaseous mixture Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Control Of Electrical Variables (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2933282A JPS58146435A (ja) | 1982-02-24 | 1982-02-24 | 加熱用電源装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2933282A JPS58146435A (ja) | 1982-02-24 | 1982-02-24 | 加熱用電源装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58146435A true JPS58146435A (ja) | 1983-09-01 |
JPH0334091B2 JPH0334091B2 (enrdf_load_stackoverflow) | 1991-05-21 |
Family
ID=12273272
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2933282A Granted JPS58146435A (ja) | 1982-02-24 | 1982-02-24 | 加熱用電源装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58146435A (enrdf_load_stackoverflow) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4617453A (en) * | 1984-05-22 | 1986-10-14 | Mitsubishi Denki Kabushiki Kaisha | Thyristor controlled power source for gradually decreasing loads |
JPS621017A (ja) * | 1985-06-27 | 1987-01-07 | Mitsubishi Electric Corp | 加熱電源装置 |
JP2010011729A (ja) * | 2008-06-03 | 2010-01-14 | Wacker Chemie Ag | 柱状の半導体材料を伝導加熱するために電気エネルギーを変換する装置 |
US7723871B2 (en) | 2006-03-20 | 2010-05-25 | Toshiba Mitsubishi-Electric Industrial Systems Corporation | Heating power supply apparatus |
-
1982
- 1982-02-24 JP JP2933282A patent/JPS58146435A/ja active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4617453A (en) * | 1984-05-22 | 1986-10-14 | Mitsubishi Denki Kabushiki Kaisha | Thyristor controlled power source for gradually decreasing loads |
JPS621017A (ja) * | 1985-06-27 | 1987-01-07 | Mitsubishi Electric Corp | 加熱電源装置 |
US7723871B2 (en) | 2006-03-20 | 2010-05-25 | Toshiba Mitsubishi-Electric Industrial Systems Corporation | Heating power supply apparatus |
JP2010011729A (ja) * | 2008-06-03 | 2010-01-14 | Wacker Chemie Ag | 柱状の半導体材料を伝導加熱するために電気エネルギーを変換する装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0334091B2 (enrdf_load_stackoverflow) | 1991-05-21 |
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