JPH0334091B2 - - Google Patents

Info

Publication number
JPH0334091B2
JPH0334091B2 JP2933282A JP2933282A JPH0334091B2 JP H0334091 B2 JPH0334091 B2 JP H0334091B2 JP 2933282 A JP2933282 A JP 2933282A JP 2933282 A JP2933282 A JP 2933282A JP H0334091 B2 JPH0334091 B2 JP H0334091B2
Authority
JP
Japan
Prior art keywords
transformer
current
voltage
group
balanced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2933282A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58146435A (ja
Inventor
Seiichi Okami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osaka Titanium Co Ltd
Original Assignee
Osaka Titanium Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka Titanium Co Ltd filed Critical Osaka Titanium Co Ltd
Priority to JP2933282A priority Critical patent/JPS58146435A/ja
Publication of JPS58146435A publication Critical patent/JPS58146435A/ja
Publication of JPH0334091B2 publication Critical patent/JPH0334091B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Control Of Electrical Variables (AREA)
JP2933282A 1982-02-24 1982-02-24 加熱用電源装置 Granted JPS58146435A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2933282A JPS58146435A (ja) 1982-02-24 1982-02-24 加熱用電源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2933282A JPS58146435A (ja) 1982-02-24 1982-02-24 加熱用電源装置

Publications (2)

Publication Number Publication Date
JPS58146435A JPS58146435A (ja) 1983-09-01
JPH0334091B2 true JPH0334091B2 (enrdf_load_stackoverflow) 1991-05-21

Family

ID=12273272

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2933282A Granted JPS58146435A (ja) 1982-02-24 1982-02-24 加熱用電源装置

Country Status (1)

Country Link
JP (1) JPS58146435A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0795246B2 (ja) * 1984-05-22 1995-10-11 三菱電機株式会社 加熱電源装置
JP2544907B2 (ja) * 1985-06-27 1996-10-16 三菱電機株式会社 加熱電源装置
JP4767176B2 (ja) 2006-03-20 2011-09-07 東芝三菱電機産業システム株式会社 加熱電源装置
DE102008002184A1 (de) * 2008-06-03 2009-12-10 Wacker Chemie Ag Vorrichtung zur Umformung elektrischer Energie zur konduktiven Erhitzung von Halbleitermaterial in Stabform

Also Published As

Publication number Publication date
JPS58146435A (ja) 1983-09-01

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