JPS58144242U - 焦点補正用チヨツパ - Google Patents

焦点補正用チヨツパ

Info

Publication number
JPS58144242U
JPS58144242U JP1982041124U JP4112482U JPS58144242U JP S58144242 U JPS58144242 U JP S58144242U JP 1982041124 U JP1982041124 U JP 1982041124U JP 4112482 U JP4112482 U JP 4112482U JP S58144242 U JPS58144242 U JP S58144242U
Authority
JP
Japan
Prior art keywords
focus correction
mirror
chopper
temperature
focus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1982041124U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6350651Y2 (cs
Inventor
雄一 萩原
吉村　恒彦
明人 長田
鷲野　弘幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1982041124U priority Critical patent/JPS58144242U/ja
Publication of JPS58144242U publication Critical patent/JPS58144242U/ja
Application granted granted Critical
Publication of JPS6350651Y2 publication Critical patent/JPS6350651Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Radiation Pyrometers (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP1982041124U 1982-03-23 1982-03-23 焦点補正用チヨツパ Granted JPS58144242U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1982041124U JPS58144242U (ja) 1982-03-23 1982-03-23 焦点補正用チヨツパ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982041124U JPS58144242U (ja) 1982-03-23 1982-03-23 焦点補正用チヨツパ

Publications (2)

Publication Number Publication Date
JPS58144242U true JPS58144242U (ja) 1983-09-28
JPS6350651Y2 JPS6350651Y2 (cs) 1988-12-27

Family

ID=30052313

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982041124U Granted JPS58144242U (ja) 1982-03-23 1982-03-23 焦点補正用チヨツパ

Country Status (1)

Country Link
JP (1) JPS58144242U (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008058044A (ja) * 2006-08-30 2008-03-13 Sumitomo Metal Mining Co Ltd 樹脂フィルムの温度測定方法及び加熱成膜装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008058044A (ja) * 2006-08-30 2008-03-13 Sumitomo Metal Mining Co Ltd 樹脂フィルムの温度測定方法及び加熱成膜装置

Also Published As

Publication number Publication date
JPS6350651Y2 (cs) 1988-12-27

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