JPS58141138A - X-ray three-dimensional image observing apparatus - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an X-ray stereoscopic image observation apparatus for stereoscopically observing a relatively small object.

In order to non-destructively inspect the state of the internal structure of a semiconductor integrated circuit, such as bonding wires, etc., the subject is placed very close to the image pickup tube or X-film, XLFJM shadowing is performed, and the photographed image is A method of observing is adopted. The reason why the subject is brought close to the image pickup tube is to prevent blurring of the photographed image caused by the focal point of xm', the X-ray source, having a surface that is approximately a few minutes vertically and horizontally. It is.

As a result of limiting the location of the subject, if the camera is in trouble with the camera tube, it can only be photographed with one camera tube, making it difficult to obtain images from one different angle, which is necessary for stereoscopic viewing. I can't do it. Therefore, it is difficult to realize a three-dimensional image observation device using a tube.

Therefore, in order to perform stereoscopic viewing, a method is used in which photographic film of the subject is photographed from λ different angles and then stereoscopically observed using a stereoscope or the like.

However, this method has disadvantages due to the use of film, such as the need for time for development.

The present invention has been made in view of the above-mentioned points, and consists of storing the video information obtained by photographing the subject from λ different angles in a storage device, and transmitting the video information to a single video player. This system constitutes an X-ray stereoscopic image observation device that can perform stereoscopic observation by simultaneously reproducing images and simultaneously observing them using a stereoscopic optical system.

The present invention will be described in detail below with reference to the accompanying drawings.

Figure g shows the configuration of an embodiment of the present invention, in which λ x
X-rays from the ray tubes 2 and 2' are applied to the subject 3, and a video signal is output by the ray tube.

This video signal is converted into a digital signal by an analog-to-digital converter j and provided to memories M1 and M2K via a switch 8Wg. This switch sw2 is
The wire tube is connected to the switch SW for switching λ', and the solid line positions in the figure correspond to each other, and the dotted line positions correspond to each other. X-ray images from an X-ray tube are stored in memory M.
1, and the x-gankyo measurements by the x-ray tube-' are stored in the memory, respectively. The X-ray 12' is to irradiate the object 3 with X-rays from the first angle and the λ-th angle with an angular difference θ. Therefore, the image information stored in the memory M1% pigeon is from the first and λ-th angles. This relates to X-ray images.

The video information stored in memory Mls M2 is j'
The L digital to analog converter t17 restores the signal to an analog video signal, and then sends it to a video reproducing device, such as a CRT device r.
12, and an image is formed on each screen. In the image reproducing device r, an image is formed by an X-ray tube, and an image is simultaneously formed by an X-ray tube.

When the viewer observes the images simultaneously and separately with the left and right eyes, the images on both image players j1 are viewed as a single image and as a three-dimensional image. This allows the internal structure of small structures such as ICs to be observed three-dimensionally.

In this device, each operation of imaging by the image pickup tube and reproducing images by the video regenerators is controlled by a scanning signal generator/θ.
It is performed based on the scanning signal from ゎtL, and a memo of the image information that has been smoked! , l ML , % and its reading is performed based on the address signal of the scanning signal address converter //. Scanning signal address conversion! // converts the scanning signal from the scanning signal generator 10 into the address number 4g, so the photographing operation, the reading of the self-memory and stored video information, and the visualization thereof are performed synchronously.

Figure 1 shows another smoke shadowing method according to the present invention.
An image is performed for one angle of the subject 3 using two X-ray tubes. In this case, the direction of the X-rays is kept constant and the subject is made to take two postures of 3.3'. This J,
! ' has an angular difference θ and is the first in the relative relationship with the X-ray.
This is the same as the case shown in the figure. K, who chooses the relationship between the X-rays and the subject in this way, uses a method other than the above to fix the subject and move the X-ray tube from the - position to the λ' position in Fig. 1! You can make it 4!7.

As described above, various positional relationships can be used between the X-ray tube and the subject during imaging, but it is necessary that the subject and the m-picture tube be placed at a close distance.

FIG. 3 is a diagram for explaining the rank f between this subject and the head of the m family. The above-mentioned close distance means a distance shorter than the distance mlFm between the subject E and the image plane C of Tomohiro Toike in this iris diagram 3, and can be expressed as follows from the illustrated positional relationship.

Fx: Fm= Dx: Dm However, Fm=
Distance between the subject and the imaging plane Fx = Distance between the X-ray tube and the image plane - 〇m = Subject dimension Dx = X-ray tube focal dimension, that is, since the image of the subject E by the wooden carving A is projected onto the image plane The requirement is a close range closer than Fm, and if it is longer than that, only the image of penumbra B will be projected, making it impossible to obtain the desired resolution.

For example, in the case of an IC, the bonding wire is several tens of μm
The typical value is 30 .mu.m, and on the other hand, the size of the X-ray tube focal point is about SOO .mu.m even if it is small, so it is mJ (cm), and the closest distance is within 3 cx.

In the present invention, the object can be placed almost closely in the image pickup tube, and the number of wood carvings can be increased and the penumbra B can be reduced, so that high resolution can be obtained.

FIG. 1 shows another configuration example of a stereoscopic optical system that can be used in the present invention, and is one that uses the so-called polarization method. This is done by combining the images from the image regenerator t12 via the polarizing plates U' and V' and using the -7ξ roller 15, and viewing the left and right isthmus images with the left and right eyes using polarized glasses USv. Perform stereoscopic viewing.

As described above, the present invention irradiates the subject with X-rays from two different angles and uses an image pickup tube placed close to the subject to
By extracting two X-ray images, storing this image information in a storage device, and playing them back simultaneously for observation using a stereoscopic optical system, it is possible to easily conduct three-dimensional observation and inspection of the internal structure of small objects. be able to.

[Brief explanation of drawings]

Fig. 1 is a plot explanatory diagram showing the configuration of an embodiment of the present invention, Fig. 3 is an explanatory diagram of photographing conditions according to the present invention, and Fig. μ is an explanatory diagram of another stereoscopic optical system that can be used in the present invention. It is a diagram. -9-'...X-ray tube, j...subject,
・・Bōni Regenerator, 1 Ko, /3, /44 River Mirror, 15 River Half Mirror-0 A... Wood carving, B... Penumbra, C... Purgatory surface,
Dm...Object dimension, Dx...X-ray tube focal length, F
m...Distance between subject and continuous image plane, Fx...Xll1I
Tube focus → i-plane distance, E...object, M...memory, T...xH tube focus. Applicant's agent Kiyoshi Inomata

Claims (1)

[Claims] An X-ray source that irradiates the subject with X-rays, an imaging tube that is placed within a close range of the subject and takes out X images for each of the two corners of the mosquito subject, and two X-rays from the imaging tube.
A storage device that separately stores line image information, two video players that separately play back two pieces of video information from this storage device, and a stereoscopic optical system device that simultaneously observes each image of these video players. An X-ray 3D image observation device equipped with