JPS58139513A - Chip-shaped piezoelectric oscillating parts - Google Patents

Chip-shaped piezoelectric oscillating parts

Info

Publication number
JPS58139513A
JPS58139513A JP7952782A JP7952782A JPS58139513A JP S58139513 A JPS58139513 A JP S58139513A JP 7952782 A JP7952782 A JP 7952782A JP 7952782 A JP7952782 A JP 7952782A JP S58139513 A JPS58139513 A JP S58139513A
Authority
JP
Japan
Prior art keywords
insulator
piezoelectric
electrodes
electrode
chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7952782A
Other languages
Japanese (ja)
Other versions
JPH0155605B2 (en
Inventor
Isao Toyoshima
豊島 功
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP7952782A priority Critical patent/JPS58139513A/en
Publication of JPS58139513A publication Critical patent/JPS58139513A/en
Publication of JPH0155605B2 publication Critical patent/JPH0155605B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders; Supports
    • H03H9/10Mounting in enclosures
    • H03H9/1007Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1035Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/125Driving means, e.g. electrodes, coils
    • H03H9/13Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/132Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46Filters
    • H03H9/54Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/542Filters comprising resonators of piezoelectric or electrostrictive material including passive elements
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46Filters
    • H03H9/54Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56Monolithic crystal filters

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE:To obtain a chip-shaped piezoelectric oscillator which is capable of phase bonding, by forming a conducting film at a cut area of an insulated plate and then laminating it to a piezoelectric oscillating unit. CONSTITUTION:Conducting films 15a-15d including wall surfaces 14a-14d in the thickness direction of cut areas 13a-13d are formed at four corners of an insulator 11. At the same time, lead-out electrodes 17-20 are formed on the main surface of one side of a piezoelectric oscillating unit 12 having an approximately equal size to the insulator 11. The electrodes 17 and 18 serve as input terminals and the electrodes 19 and 20 as output terminals of a surface wave element 21 respectively. The electrodes 17-20 of the element 21 and the films 15-15d of the insulator 11 are soldered to the unit 12 by a deposition process. In such a way, a piezoelectric oscillating parts having high packing density can be obtained in mass production.

Description

【発明の詳細な説明】 本発明は板状の絶縁物と圧電振動ユニツ1〜とを積層し
たフェーズボンデングができるチップ状の圧電振動部品
に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a chip-shaped piezoelectric vibrating component that can be phase-bonded by laminating a plate-shaped insulator and piezoelectric vibrating units 1 to 1.

従来より、共振子、発振子、フィルタ、FMディスクリ
ミネータなどの圧電振動部品としては、各圧電振動ユニ
ットの使用振動モードの特徴により、比較的周波数が低
い数百に7の周波数帯のレラミツクフィルタでは、樹脂
等を箱体状に成型した竺装ケース内に圧電振動コーニツ
1〜を収容したクースタイプのものや、周波数が高い数
M +−17から数10M+−12の周波数帯のゼラミ
ックフィルタ(゛は、エネルギー閉じ込め形圧電振動ユ
ニツ1−の振!+l+ l区域を除いた区域に外装樹脂
を(+I Wさμにいわゆるディップ塗装形状のもの、
あるいは表面波索子ではディップ塗装形状もしくはハー
メブックシールドブースを有するものが一般に知られて
いるが、これら圧電振動部品はいずれもリード端子を右
りるリード端子タイプのものである。
Conventionally, piezoelectric vibrating parts such as resonators, oscillators, filters, and FM discriminators have been manufactured using relatively low frequency bands of seven to seven hundreds of frequencies, depending on the characteristics of the vibration mode of each piezoelectric vibrating unit. For filters, there are Koos type filters that house piezoelectric vibrators 1~ in a box-shaped box-shaped case made of resin, etc., and ceramic filters with a high frequency band of several M+-17 to several 10 M+-12. The filter (゛ is the vibration of the energy-trapped piezoelectric vibrating unit 1-!+l+ The outer resin is applied to the area excluding the l area (+I W, so-called dip-coated type,
Alternatively, surface wave probes having a dip-coated shape or a hermebook shield booth are generally known, but all of these piezoelectric vibrating components are of the lead terminal type in which a lead terminal is attached.

ところで、近年、電子機器の小形化に伴って電子部品実
装密度を高めるための種々の工夫がなされているが、」
−記のようなリード端子タイプのL[電振動部品では、
基本的には、圧電振動コニツ1〜を外装部材で被覆し、
該外装部材から複数本のリード端子を突出さけた構成を
有しているI、:め、形状が大きく実装密度が低くなる
欠点があつ1.:。
By the way, in recent years, with the miniaturization of electronic devices, various efforts have been made to increase the density of electronic component mounting.
-Lead terminal type L [for electro-vibration parts,
Basically, the piezoelectric vibrator 1~ is covered with an exterior member,
1. Having a configuration in which a plurality of lead terminals protrude from the exterior member has the disadvantage that the shape is large and the packaging density is low.1. :.

本発明は従来の圧電振動部品に831.jるト記事情に
鑑みてなされたムのであっ(、そのl]的は、II電振
動部品を量産に好適な構造でブッI化づるCとにより、
圧電振動部品をプリント基仮に1°1接取り付けるよう
にし、実装密度の向上を図るとどもに#AJ造1稈の簡
略化を図ることである。また、他の目的は、製造容易で
安価なチップ状圧電振動部品を提供覆ることである。
The present invention applies 831. The purpose of this project, which was made in view of the current situation, was to convert II electro-vibration parts into a structure suitable for mass production.
The purpose is to attach the piezoelectric vibrating component to the printed board with 1 degree 1 contact, and to improve the mounting density and to simplify the #AJ structure in one culm. Another object is to provide a chip-shaped piezoelectric vibrating component that is easy to manufacture and inexpensive.

このため、本発明は、カバーとなるべき少くとも一つの
板状の絶縁物の少くども2個所に切欠部を設け、これら
切欠部の少くとも上記絶縁物の厚み方向の壁面に夫々チ
ップ部品の外部接続端子電極となるべき導電膜を形成し
、上記絶縁物と圧電振動1ニツ1〜とを積層して該圧電
振動ユニットの引出し電極を」上記導電膜に電気的に接
続し一体化したチップ状圧電振動部品におい“C1スル
ーホールが形成された合成樹脂製基板を切断してできた
部分スルーホールを1記導電膜どして用いることを特徴
としている。
For this reason, the present invention provides notches in at least two places of at least one plate-shaped insulator that is to serve as a cover, and provides chip components on at least the wall surface of the insulator in the thickness direction of these notches. A chip in which a conductive film to be an external connection terminal electrode is formed, the above-mentioned insulating material and a piezoelectric vibration unit are laminated, and the extraction electrode of the piezoelectric vibration unit is electrically connected to the above-mentioned conductive film and integrated. In the piezoelectric vibrating component, a partial through hole formed by cutting a synthetic resin substrate in which a C1 through hole is formed is used as the conductive film.

以−ト、添付図面を参照して本発明の詳細な説明する。The present invention will now be described in detail with reference to the accompanying drawings.

第1図(a )おJ、び第1図(1))において、11
はプリント基板、スルーホールメッキ基板としてに<用
いられる合成樹脂H利からなる四角形の板状の絶縁物、
12は表面波素子を構成する圧電振動ユニットである。
In Figure 1 (a) and Figure 1 (1)), 11
is a rectangular plate-shaped insulator made of synthetic resin used as printed circuit boards and through-hole plated boards.
12 is a piezoelectric vibration unit that constitutes a surface wave element.

。 上記絶縁物11はその四隅に夫々−例として円弧状の切
欠き部13a 、13b 、 13c 、 i3dを有
し、これら切欠き部13a 、 13t]、13c 、
 13d (D上記絶縁物11の厚み方向の壁面14a
 、’141)、14c 、 14clおよび絶縁物1
1の面の上記切欠き部13a 、131.+ 、+3c
 、 13d近傍にわたって導電膜15a 、 i5b
 、 1!ic、15dを夫々形成している。
. The insulator 11 has circular arc-shaped notches 13a, 13b, 13c, i3d at its four corners, respectively, and these notches 13a, 13t], 13c,
13d (D Wall surface 14a in the thickness direction of the insulator 11
, '141), 14c, 14cl and insulator 1
The cutout portions 13a, 131. + , +3c
, conductive films 15a and i5b over the vicinity of 13d
, 1! ic and 15d, respectively.

一方、圧電振動ユニツ1へ12は」二記絶縁物11どほ
ぼ同一の寸法を有し、その一方の主面の四隅には一例と
して扇形の引出し電極17,18,19J>よび2oを
夫々形成している。
On the other hand, the piezoelectric vibration units 1 to 12 have almost the same dimensions as the two insulators 11, and fan-shaped extraction electrodes 17, 18, 19J and 2o are formed at the four corners of one main surface, respectively. are doing.

上記引出し電極17および18は夫々表面波(表面弾性
波)素子21の入力端子およびアース端子であり、上記
引出し電極19おにび2oは夫々上記表面波素子21の
2つの出ツノ端子である。
The extraction electrodes 17 and 18 are the input terminal and the ground terminal of the surface wave (surface acoustic wave) element 21, respectively, and the extraction electrodes 19 and 2o are the two prong terminals of the surface wave element 21, respectively.

上記圧電振動ユニット12には、その表面波素子21部
分の振動を保障するためにその一方の主面に四部22を
設けた上記絶縁物11を積層し、両者を接着剤で接着す
るとともに、表面波素子21の上記用3− 出し電極17,18.19および2oと、絶縁物11の
導電膜村ia、 15b、 15c、 1!idとをデ
ツプ法等により半田付け26シている。。
The piezoelectric vibrating unit 12 is laminated with the insulating material 11 having four parts 22 on one main surface thereof in order to ensure the vibration of the surface wave element 21 portion, and both are bonded with adhesive. The above three output electrodes 17, 18, 19 and 2o of the wave element 21, and the conductive film villages ia, 15b, 15c, 1! of the insulator 11. The id is soldered 26 times using the depth method or the like. .

上記のようにすれば、第2図に示すようなチップ状の弾
性表面波部品23を得ることができる。
By doing as described above, a chip-shaped surface acoustic wave component 23 as shown in FIG. 2 can be obtained.

」−記弾性表面波部品23をプリン1〜基板に実装する
場合には、第2図に示すように、プリント基板24の取
付位置に上記弾性表面波部品23を接着配置し、デツプ
法等により半田(=lけすると第3図に代表として引出
し電極19と導電膜15cについて示すように、上記引
出し電極17.18.19,20、導電膜15a、 1
5b、 15c、 15dおよびこれらに対応する4つ
の銅箔25の3者がそれぞれ相互に導通した状態で、上
記弾性表面波部品23がプリン1〜基板24に実装され
ることになる。
When mounting the surface acoustic wave component 23 on the printed circuit board 1 to the board, as shown in FIG. Solder (=1) As shown in FIG. 3 as a representative example of the extraction electrode 19 and the conductive film 15c, the extraction electrodes 17, 18, 19, 20, the conductive films 15a, 1
The surface acoustic wave component 23 is mounted on the printed circuit boards 1 to 24 in a state where the three copper foils 5b, 15c, 15d and the four copper foils 25 corresponding thereto are electrically connected to each other.

なお、上記弾性表面波部品23の弾性表面波素子12部
分をシールドする場合は、第4図および第5図に示すよ
うに、絶縁物11の使方の主面にシールド電極Sを形成
し、該シールド電極Sを導電膜15bを介して引出し電
極18(アース端子)に接続す4− ればよい。
In addition, when shielding the surface acoustic wave element 12 portion of the surface acoustic wave component 23, as shown in FIGS. 4 and 5, a shield electrode S is formed on the main surface of the insulator 11, The shield electrode S may be connected to the extraction electrode 18 (earth terminal) via the conductive film 15b.

」:記の如き構成を有するチップ状の弾性表面波部品2
3を得るには、第6図(a )に示すように、先ず、プ
リント基板月利、スルーボールメッキ基板材料としてよ
く用いられている合成樹脂J:りなる絶縁物母材31を
用意し、該絶縁物母材31に前後および左右の間隔が製
造する弾性表面波部品23の巾および長さに等しくなる
位置に例えば丸孔または縁部には半丸孔32.・・・、
32を設け、スルーボールメッキの手法により、第1図
に示すように、上記丸孔32.・・・、32の内壁面お
よびその両開口端面周縁部に電極膜33.・・・、33
を夫々形成するとともに四部22をたとえば切削するな
どして設け、また、好ましくは、圧電振動ユニット母材
34に接する側の開孔端面周縁部の電極を研摩除去する
”: Chip-shaped surface acoustic wave component 2 having the configuration as shown below.
3, as shown in FIG. 6(a), first prepare an insulating base material 31 made of synthetic resin J, which is often used as a material for printed circuit boards and through-ball plating boards. For example, a round hole or a semi-round hole 32 at the edge is formed in the insulator base material 31 at a position where the front-rear and left-right spacing is equal to the width and length of the surface acoustic wave component 23 to be manufactured. ...,
32, and as shown in FIG. 1, the round holes 32. . . , an electrode film 33 . ..., 33
The four portions 22 are provided, for example, by cutting, and preferably, the electrodes on the peripheral edge of the opening end surface on the side that contacts the piezoelectric vibration unit base material 34 are removed by polishing.

一方、第6図(b)に示すように、圧電材料を板状に成
型して焼成することにより圧電振動−1ニツト母材34
を形成し、印刷等の手法にまり、その一方の主面に上記
絶縁物母材旧の丸孔またμ半丸孔32に対応する位置に
円形または半円形の引出し電極相当部35.・・・、3
りを形成するとともにこれら引出し電極相当部35.・
・・ 、35に接続されるインターデジタル電極を設【
ノで弾性表面波部品21.・・・ 。
On the other hand, as shown in FIG. 6(b), the piezoelectric vibration-1 unit base material 34 is formed by molding the piezoelectric material into a plate shape and firing it.
A circular or semicircular extraction electrode corresponding portion 35. is formed on one main surface of the insulator base material at a position corresponding to the round hole or μ semicircular hole 32 of the insulator base material. ..., 3
These extraction electrode corresponding portions 35.・
..., set up an interdigital electrode connected to 35 [
Surface acoustic wave components 21. ....

21を形成する。Form 21.

次に、十記絶縁動用月31の丸孔または半丸孔32、・
・・ 、32と上記圧電振動Δニット母材34の引出し
電極相当部35.・・・、35どを夫々一致させて、こ
れら絶縁物母材31と圧電振動ユニット母材34とを接
着材(図示せず)により相Hに接着する。
Next, the round hole or semi-round hole 32 of the tenth insulating active month 31,
. . , 32 and a portion 35 corresponding to the extraction electrode of the piezoelectric vibration Δ knit base material 34. . . , 35 are aligned with each other, and the insulator base material 31 and the piezoelectric vibration unit base material 34 are bonded to the phase H using an adhesive (not shown).

上記状態で、絶縁物ffJ、 +431の丸孔または半
丸孔32、・・・、32および圧電振動コニツ1〜母材
34の引出し電極相当部35.・・・ 、35の中心を
通る線36.・・・ 。
In the above state, the insulator ffJ, +431 round or semi-round holes 32, . ..., a line 36. passing through the center of 35. ....

36.37.・・・、37に沿って上記絶縁物母材31
および圧電振動ユニツ1−1り材34を切断した後、上
記丸孔または半丸孔32.・・・、32に形成された電
極111J 33゜・・・ 、33が加工されてできた
導電膜15a〜15dと、引出し電極相当fiIX3 
!+ 、・・・、35が加工されてできた引出し電極1
7〜20とを半(+1付けすれば、第2図に示1弾性表
面波部品23を得ることができる。このようf、L u
 N方法(ま以下の実施例にも適用できる。
36.37. ..., the insulator base material 31 along 37
After cutting the material 34 of the piezoelectric vibration unit 1-1, the round or semi-round hole 32. ..., 32 electrodes 111J 33°..., conductive films 15a to 15d formed by processing 33, and fiIX3 corresponding to extraction electrodes
! + , ..., extraction electrode 1 made by processing 35
By adding half (+1) to 7 to 20, a surface acoustic wave component 23 shown in FIG. 2 can be obtained. In this way, f, Lu
N method (also applicable to the following examples).

上記のようにすれば、一枚の絶縁物母材31と一枚の圧
電振動ユニット母材34とを相互に接着して切断するだ
けで1人絹の弾性表面波部品23を天吊に生産すること
がで′きる。しかも、絶縁物母材31は市販されている
ものまたはそれに準じ“C製造と\れる11造容易で安
価なものを使用できる。
In the above manner, one person can produce a ceiling-mounted silk surface acoustic wave component 23 by simply gluing one insulator base material 31 and one piezoelectric vibration unit base material 34 together and cutting them. can do. Furthermore, the insulating base material 31 can be a commercially available material or a similar material that is easy to manufacture and inexpensive.

上述Li IC弾すり表面波部品のJ:うに、励(&ラ
ミ極が圧電板の一方表面にのみ形成される(9のは、引
出し電極を容易にチップ部品の外部接続端子電極どなる
べき導電膜に接続できるが、以下に1本へるような圧電
板の対向主表面に励振電極を設りた1−ネルギーとじこ
め形厚み振動モードを用いるバルク波部品では、−りの
励振電極の引出し電極は、チップ部品の外部接続端子電
極となるべき第1の導電11’Aに容易に接続できるが
、他方の1irl+嵌電極の引出し電極は何んらかの手
段を用いて圧電板を回り込んで前記第1の導電膜と同−
甲面にある第2の導電膜に接続してやらないとフェーズ
ボンデングできる構造にならない。以下にLネルギーど
じこ 7− め形バルク波部品で一ノI−ズボンデングするための対
策について述べる。
J of the above-mentioned Li IC surface wave component: uni, excitation (& laminate electrode is formed only on one surface of the piezoelectric plate (9) is a conductive film that should be used as an external connection terminal electrode of the chip component to easily connect the extraction electrode. However, in a bulk wave component using a 1-energy confinement type thickness vibration mode in which excitation electrodes are provided on the opposite main surfaces of a piezoelectric plate such as , it can be easily connected to the first conductive 11'A which is to be the external connection terminal electrode of the chip component, but the extraction electrode of the other 1irl+ fitting electrode goes around the piezoelectric plate using some means and connects to the Same as the first conductive film
Unless it is connected to the second conductive film on the back side, it will not be possible to create a structure that allows phase bonding. Below, we will discuss countermeasures for one-no I-bonding in L energy dojiko 7-me type bulk wave parts.

まず、バルク波]ネルキー閉じ込め形の二端子共振子に
本発明を適用した実施例を第8図、第9図および第10
図に承り、1 本実施例におい(は、第8図に示すように、圧電振動コ
ニツト41はLl−電基板42の一方の主面に形成した
円形の電8A43,44おにび上記圧電基板42の他方
の主面に上記電極43.44に対向ざゼC形成した円形
の電極45 、4Gを有Jる互いに独立して振動する二
端子共振子47.48を備え、これら二端子共振子47
.48の上記電極43,44、を方向性をなくして取り
扱いが便利になるよう圧電基板42の上記一方の主面の
一本の対角線」二の2つの隅部に形成した引出し電極4
9.50に夫々引き出すとともに、電極45と電極46
とを接続したものである。
First, an example in which the present invention is applied to a Nelky confinement type two-terminal resonator (bulk wave) is shown in FIGS. 8, 9, and 10.
1. In this embodiment, as shown in FIG. Two-terminal resonators 47 and 48 having circular electrodes 45 and 4G formed opposite to the electrodes 43 and 42 on the other main surface of 42 and vibrating independently of each other are provided, and these two-terminal resonators 47
.. The electrodes 43 and 44 of 48 are formed at two corners of one diagonal line on the one main surface of the piezoelectric substrate 42 in order to eliminate directionality and make handling convenient.
9. At the same time as pulling out the electrodes 45 and 46 respectively,
This is a connection between

上記圧電コニツ1〜41は、第10図に示すように、引
出し電極49と50との間に、二端子共振子47と48
とが直列に接続された回路構成を有するが、等測的には
一つの二端子共振子が構成される。このよ8− うな構成だと、両引出し電極49.50が圧電転轍42
の一面側に存在するので、上記圧電振!IJユニット4
1には、その上下から第1図(a )と全く同様の構成
を有する絶縁物11.11を、第9図に示ツ、」、うに
、積層して接着し、]−記引出し電極49おJ、び:)
0を夫々上記一方の絶縁物11の導電膜15b、 15
cに半田26で半田付りJれば、チップ状のバルク波[
ネルギー閉じ込め形の2@子共振子を得ることかできる
。この場合、電極45.46側の絶縁物11は、四部2
2を有するのみで隅部に切欠部を有しない普通の絶縁板
に置ぎ換えてもよい3.このことは、以−トの実施例に
も適用される。
As shown in FIG.
Although it has a circuit configuration in which the two terminals are connected in series, one two-terminal resonator is constructed isometrically. With this configuration, both extraction electrodes 49 and 50 are piezoelectric turns 42.
Since it exists on one side of the piezoelectric vibration mentioned above! IJ unit 4
Insulators 11 and 11 having exactly the same structure as in FIG. 1(a) are stacked and glued on top and bottom of the insulator 11 and 11 as shown in FIG. 9. Oh J, bi :)
0 to the conductive films 15b and 15 of the one insulator 11, respectively.
If solder J is soldered to c with solder 26, a chip-shaped bulk wave [
It is possible to obtain an energy-confined 2@son resonator. In this case, the insulator 11 on the electrode 45, 46 side has four parts 2
It may be replaced with an ordinary insulating plate having only 2.2 and no notches at the corners.3. This also applies to the following embodiments.

次に、三端子共撮子、1ニットを用いた場合ぐ、アース
側共通電極とその引出し電極間に二1ンYンサを介在さ
せることにより、アース側共通電極の引出し電極を、入
・出力電極の引出し電極が設置Jられている圧電木根面
側に設けたものについくのべる。
Next, when using a three-terminal common electrode with 1 nit, by interposing a 21-Y sensor between the ground side common electrode and its extraction electrode, the input/output electrode of the earth side common electrode can be connected to It is attached to the root side of the piezoelectric tree where the electrode extraction electrode is installed.

上記第8図から第10図の実施例において、第11図に
示すような電極構成を有する圧電振動−1−ツ1−51
を使用覆れば、第12図に示Jように、引出し電極52
,53が三端子j(振子540分割電極55.56に夫
々接線され、電極iI7と1−配圧端子共振子54の共
通電極58との間に1ンーVンリ゛C1が接続されたチ
ップ状のバルク波]−ネルギー閉じ込め形の三端子状振
子を得ることがCきる。このような構造だと、電極58
の引出し電極57が引出し電極52.53と同−面側に
位置づることになる。なお、電極57と対角位置にある
隅部にも同様な]ンデンリC1を構成すると、圧電振動
コニツ1〜51の方向性がなくなって取り扱いが便利で
ある。
In the embodiments shown in FIGS. 8 to 10 above, a piezoelectric vibration-1-2 1-51 having an electrode configuration as shown in FIG.
If you cover the extraction electrode 52 as shown in FIG.
, 53 are chip-shaped with three terminals j (the pendulum 540 is tangential to the divided electrodes 55 and 56, respectively, and a 1-V line C1 is connected between the electrode iI7 and the common electrode 58 of the 1-distribution terminal resonator 54). bulk wave] - It is possible to obtain an energy-confined three-terminal pendulum. With such a structure, the electrode 58
The extraction electrode 57 is located on the same side as the extraction electrodes 52 and 53. Note that if a similar corner C1 is formed at a corner diagonally opposite to the electrode 57, the piezoelectric vibrating parts 1 to 51 have no directionality, making handling convenient.

このような、上記第8図から第12図の実施例は発振子
、FMディスクリミネータユニット、フィルタ等として
使用づることかできる。
The embodiments shown in FIGS. 8 to 12 can be used as oscillators, FM discriminator units, filters, etc.

また、第13図に示り゛ような電極構成を有する圧電振
動コニット61を使用寸−れば、第14図に示すように
、引出し電44762と(13との間に、三端子共振子
54、=1ンデンリーC4J3よび三端子共振子54′
、コンデンサC−1から4−1 ?)第12図と全く同
一構成を有Jる2組の回路をカスコードに接続するとと
もに、上記三端子Jし振子54′の分割電極の−lノど
11通電極との間にコンデンサC2を接続しlζジブツ
ブ状バルク波エネルギー閉じ込め形のフィルタを得る。
Moreover, if the piezoelectric vibrating conite 61 having the electrode configuration as shown in FIG. 13 is used, as shown in FIG. ,=1 C4J3 and three-terminal resonator 54'
, capacitor C-1 to 4-1? ) Two sets of circuits having exactly the same configuration as in Fig. 12 are connected in cascode, and a capacitor C2 is connected between the three-terminal terminal J and the -l node and the 11-conducting electrode of the divided electrode of the pendulum 54'. A jib-like bulk wave energy confinement type filter is obtained.

上記コンデンサC1の一方の電極64おj、びい、1一
つの]ンテンサC2の一方の電極65(よ上記フィルタ
の外部で相nに接続される。また、この像形例として、
第14図で点線で示したような接続を追7]11−する
ど、第13図示のものも方向性がなくな・〕で取り汲い
が便利である。
One electrode 64 of the capacitor C1 and one electrode 65 of the capacitor C2 are connected to the phase n outside the filter.
It is convenient to add connections such as those shown by dotted lines in FIG. 14, but the connection shown in FIG. 13 also has no directionality.

次に、非エネルギー閉じ込め形のフィルタに本発明を適
用した実施例を第15図、第16図(a )、(b)に
示1゜ 第15図において、71.71は非エネルギー閉じ込め
形の共振素子であって、これら共振素子71.74はそ
の各圧電基板72の一方の主面に分割型[173゜13
を形成するとともに、他方の主面に共通電極74を形成
し、上記分割型1ii 73,73の間に渦75を形成
して、長さ振動[−ドを利用するものである。
Next, an embodiment in which the present invention is applied to a non-energy trap type filter is shown in FIGS. 15, 16 (a) and (b).1 In FIG. These resonant elements 71 and 74 have a split type [173°13
At the same time, a common electrode 74 is formed on the other main surface, and a vortex 75 is formed between the split molds 1ii 73, 73 to utilize length vibration [-].

一方、76は共振素子71.71の取りfqlブ用のア
ルミ11− す等のセラミック又は合成樹脂製基板であって、該基板
76にはアース側となる引出し電極77を形成し、これ
ら引出し電極77」−には弾性を有する異方性又は等方
性導電性シー1〜78.78を間にして、上記共振素子
71.71を載置固定し、その共通電極74.74を上
記引出し?[B77に導通させている。
On the other hand, 76 is a substrate made of ceramic or synthetic resin such as aluminum 11- for the fql board of the resonant element 71. 77''-, the above-mentioned resonant element 71.71 is mounted and fixed with elastic anisotropic or isotropic conductive sheets 1 to 78.78 in between, and the common electrode 74.74 is placed and fixed on the above-mentioned drawer 77''. [Conducted to B77.

上記共振素子 71,71と基板76が、例えば第1図
(b)の圧電振動lニット12に相当する圧電振動コニ
ツ1〜を構成する。
The resonant elements 71, 71 and the substrate 76 constitute, for example, a piezoelectric vibrating unit 1 corresponding to the piezoelectric vibrating unit 12 shown in FIG. 1(b).

上記共振素子71.71の上には、弾性を有する異方導
電性シー1〜79.79を間にして、基本的に第1図(
a )と同様の構成を有する絶縁物11−を被せて、該
絶縁物11−と上記基板とを相互に接着している。
Above the resonant element 71.71, anisotropically conductive sheets 1 to 79.79 having elasticity are placed between them, basically as shown in FIG.
An insulator 11- having the same structure as in a) is placed over the insulator 11-, and the insulator 11- and the substrate are bonded to each other.

上記絶縁物11−は共振素子71.71を収容するため
の凹部22−.22− (一つの共通凹部であってもよ
い)を有し、これら四部22− .22′の内壁面には
、異方導電性シート 79.79を通して、共振素子7
1.71の各一方の分割電極73.73を相互に導通さ
せる接続電極80を形成する一方、共振素子71 、7
112− の各他方の分割電極73.73を夫々導電1!415a
、IMに導通させる接続電極81.81を形成Lノでい
る。
The insulator 11- has a recess 22-. for accommodating the resonant element 71.71. 22- (which may be one common recess), and these four parts 22-. Anisotropically conductive sheets 79 and 79 are passed through the inner wall surface of the resonant element 7.
A connecting electrode 80 is formed that connects each one of the divided electrodes 73 and 73 of 1.71 to each other, while the resonant elements 71 and 7
112- The other divided electrodes 73 and 73 are respectively conductive 1!415a
, connection electrodes 81 and 81 are formed to conduct to the IM.

上記のようにすれば、共振素子71.71の月′f1i
 i、を板72.72は弾性を有する導電性シート18
と79との間に指示固定され、その振動が保障される一
方、取り付けの方向性をなくするために、その他方の分
割電極73.73は」−記異方導電竹シー1〜79を通
して導電膜15a、15dに夫々引き出され、まIこ、
共通電極74.74も1−記導雷ヤ[シート 78.7
8を通して、引出し電極77から」−記導電lX15a
、15dとは異なる位置に形成された導電膜151)、
1!icに引き出される。
By doing as above, the moon'f1i of the resonant element 71.71
i, the plate 72, 72 is an elastic conductive sheet 18;
and 79 to ensure its vibration, while the other divided electrode 73. It is drawn out to the membranes 15a and 15d, respectively, and
Common electrode 74.74 also has 1-recording lightning conductor [sheet 78.7
8, from the extraction electrode 77 - conductive lX15a
, a conductive film 151) formed at a different position from 15d,
1! It is pulled out to IC.

上記第15図の実施例において、絶縁物11′側の異方
導電性シート79を使用けずに、例えば第16図(a 
)および第16図(b)に夫々示すように、ボンデング
ワイヤ90を使用して、上記他方の分割電極73.73
を上記導電膜15a、15dに導通させるようにしても
よい。
In the embodiment shown in FIG. 15, the anisotropically conductive sheet 79 on the insulator 11' side cannot be used, for example, as shown in FIG.
) and FIG. 16(b), using the bonding wire 90, the other divided electrode 73, 73
may be electrically connected to the conductive films 15a and 15d.

上記のようにして、非エネルギー閉じ込め形の単一振動
モードを用いた三端子形の共振子を一段に縦続接続した
フィルタもデツプ化することができる。縦続接続覆る段
数は(■意である。また、−個の非エネルギー閉じ込め
形の単一振動モードを用いた二端子ヌは三端子形の発振
子やFMディスクリミネータにも適用できる。使用モー
ドや非エネルギー閉じ込め形の振動素子の種類も上記に
限定されないこと(まいうまでもない。
As described above, a filter in which three-terminal resonators using a non-energy-confined single vibration mode are connected in cascade can also be made into a deep filter. The number of stages to be covered in cascade is (■).In addition, the two-terminal type using a non-energy-confined single vibration mode can also be applied to a three-terminal type oscillator and FM discriminator.Usage mode It goes without saying that the types of vibration elements of non-energy trapping type are not limited to those mentioned above.

なd3、最後に、エネルギー閉じ込め形であって、従来
リードを(=J tJ ′C使用していた圧電振動コニ
ツ]−を用いで、本発明を実施づる場合について述べて
おく。第17図(51、この場合の基本的な圧電振動−
Jニラ1〜を示”Jo図において101は圧電基板、1
02.1034よ一対の励振電極、1(14,105は
一本の対角練土にお(プる圧電11板101の隅部の表
側、裏側にそれぞれ設置また引出し電極である。この圧
電振動コニットには、その上下から絶縁物11.11を
第18図に示すように積層して接着し、引出し電極10
4とこれに接触Jる導電膜15aを半田付けするととも
に、引出し電極105とこれに接触する下側の絶縁物1
1の導電膜15Cを半III (j tJする。同時に
、]字状金属クリップ106を下側の絶縁物11の導電
膜15C1上側の絶縁物11の導電膜15(1間に(、
ロッわ/ご1〕して、両者を半田(=I Lt ifる
。このよう/J構造(、:よって、両励振電慟+(12
,103が+側の絶縁物+ l f7)導電膜15a、
15[1にそれぞれ導通することにイする。
d3.Finally, we will discuss the case where the present invention is implemented using an energy confinement type piezoelectric vibrator that uses a conventional lead (= J tJ 'C). Fig. 17 ( 51. Basic piezoelectric vibration in this case-
In the figure, 101 is a piezoelectric substrate, 1
02.1034, a pair of excitation electrodes, 1 (14, 105 are pull-out electrodes installed on the front and back sides of the corners of the piezoelectric 11 plate 101, respectively) on one diagonal clay. Insulators 11 and 11 are laminated and glued from above and below as shown in FIG.
4 and the conductive film 15a in contact with it, and the lead electrode 105 and the lower insulator 1 in contact with it.
1 conductive film 15C of the upper insulator 11. At the same time, the ]-shaped metal clip 106 is inserted between
1] and solder both of them (= I Lt if. Like this / J structure (,: Therefore, both excitation voltage + (12
, 103 is an insulator on the + side +l f7) Conductive film 15a,
15[1] respectively.

]字状金属クリップにかえでワイ17(゛接続を11つ
でもよい。また、電極を圧電基板の側面M tf)わ1
!たり、圧電基板の隅部に孔を設置ノで電極躾を11う
成したりして]字状金属クリップや97170機能をも
たけ′Cもよい。そして、このような構造は、1述のよ
うな二端子形共振子のみならず、三端子形の共振子やフ
ィルタ等の圧電振動−]ニツ]゛・を用いたものにも適
用できる。
]-shaped metal clip with a wire 17 (11 connections may also be made. Also, connect the electrode to the side surface of the piezoelectric substrate M tf) 1
! Alternatively, holes may be provided in the corners of the piezoelectric substrate to form electrode holes to provide a shape metal clip or 97170 function. Such a structure can be applied not only to the two-terminal resonator as described above, but also to three-terminal resonators, filters, and other devices using piezoelectric vibration.

以上、詳細に説明したことから6明らかなJ、うに、本
発明は、少くとも2個所に切り欠き部をKQけでその部
分に導電膜を形成した絶縁板をF「型振動ユニットに積
層してその引出し電極を十−記)9電膜に導通ざゼるこ
とにより圧電振動部品をチップ化する場合、絶縁板とし
て合成樹脂からなる1−)のを用い、導電膜もこの合成
樹脂板に設【ノたスルーホールメッキ部分を分割してな
るものを用いるの 15− 乙゛、■=−組の絶縁物母材と圧電振動ユニットffJ
材を積層して切断づるだけで容易に大間の圧電振動部品
を得ることがでさる、■製造工程が簡単であることによ
り、価格が安く、不良品の発生が少く、製品としノでの
信頼性も向」−覆る、■リード線のないチップ形状化さ
れた抵抗やコンデンサと同様構造であるためプリン1〜
基板等の回路基板等への実装が容易である、■導電膜を
ス、ルーホールメッキの手法にJ:り容易に形成するこ
とができる、等その効果は非常に人である、といった効
果に加え、製造容易でより安価にできるといった効果も
有し、この種チップ状圧電振動部品の実用化に多大の貢
献をづる発明である。
From the above detailed explanation, it is clear that the present invention is based on an insulating plate with cutouts formed in at least two places and a conductive film formed thereon, which is laminated on an F" type vibration unit. When making a piezoelectric vibrating component into a chip by connecting the extraction electrode to a conductive film, the insulating plate 1-) made of synthetic resin is used, and the conductive film is also attached to this synthetic resin plate. [Insulator base material and piezoelectric vibrating unit ffJ are used.
It is possible to easily obtain Oma's piezoelectric vibrating parts by simply laminating materials and cutting them. ■The simple manufacturing process results in low prices, fewer defective products, and reliable products. ■It has the same structure as chip-shaped resistors and capacitors without lead wires, so
Its effects are very unique, such as easy mounting on circuit boards, etc., and easy formation of conductive films using through-hole plating techniques. In addition, this invention has the advantage of being easy to manufacture and can be made at a lower cost, making a great contribution to the practical application of this type of chip-shaped piezoelectric vibrating component.

なお、第2、第3、第5、第9、第15、第16(b)
、第18の各図は、各部の接続関係を明確にするための
もので、断面は適宜適当な箇所であるので、いわゆる断
面図とは異なることをことわってあく。
In addition, 2nd, 3rd, 5th, 9th, 15th, 16th (b)
, No. 18 are for clarifying the connection relationships between the various parts, and the cross sections are shown at appropriate locations, so please note that they are different from so-called cross-sectional views.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(a )は本発明に係る圧電振動部品の−16− 実施例の絶縁物の斜視図、第1図(り)は第1図<a 
>の圧電振動部品の圧電振動コ、ニラ1−の斜視図、第
2図は第1図(a)および第1図(1))の絶縁物と圧
電振動ユニットを使用した圧電振動部品の構造説明図、
第3図は第2図のロー電振動部品の回路基板への取イ1
説明図、第4図は第1図(a>の絶縁物にシールド電極
を設けた絶縁物の斜視図、第5図は第4図の絶縁物を使
用した1に型振動部品の構造説明図、第6図(a )は
絶縁動用Hの斜視図、第6図(b)は圧電振動ユニツl
へ1蛙Hの斜睨図、第7図は第6図(a )の絶縁物母
材の断面図、第8図はバルク波エネルギー閉じ込め形の
端子共振子の圧電振動ユニットの斜視図、第9図はパル
波エネルギー閉じ込め形の二端子共振子の構造説明図、
第10図は第9図の共振子の等価回路図、第11図はバ
ルク波エネルギー閉じ込め形の二端子共振子の圧電振動
丁7ニツ1〜の斜視図、第12図は第11図の等価回路
図、第13図はバルク波エネルギー閉じ込め形のフィル
タの圧電振動−1ニツI−の斜視図、第14図は第13
図の等価回路図、第15図は非1゛ネルギー閉じ込め形
のフィルタの構造説明図、第16図(a )および第1
6図(b)は夫々第15図のフィルタの変形例の圧電振
動コニットの平面図およびフィルタの構造説明図、第1
7図はエネルギー閉じ込め形の共振子の圧電振動ユニッ
トの斜視図、第18図は、第11図示のユニットを用い
た共振子のM4造説明図である。 11.11−・・・・・・絶縁物、12・・・・・・圧
電振動」ニット、13 ・= ・・・切欠き部、15a
、 1511.15c、 15d ・・−=−導電膜、
17.18,19.20・・・・・・引出し電極、26
・・・・・・半田、31・・・・・・絶縁物f?)材、
34・・・・・・圧電振動ユニット母材、41.51.
61・・・・・・圧電振動ユニット、71・・・・・・
共振素子、76・・・・・・基数。 特  許  出  願  人 株式会社村田製作所 19− 第1口 (^) 刑2凹 躬乙図 ((1) 躬7図 躬3図 給 メ0 図 4デ                 Δ1り菊rt
cn 葡lz図 笥13図 (θ) (I:))
FIG. 1(a) is a perspective view of the insulator of the -16- embodiment of the piezoelectric vibrating component according to the present invention, and FIG.
Figure 2 is a perspective view of the piezoelectric vibrating part of the piezoelectric vibrating part shown in Fig. Explanatory diagram,
Figure 3 shows the installation of the low-voltage vibration components shown in Figure 2 onto the circuit board 1.
4 is a perspective view of an insulator in which a shield electrode is provided on the insulator shown in FIG. , Fig. 6(a) is a perspective view of the insulating dynamic unit H, and Fig. 6(b) is a piezoelectric vibration unit l.
Fig. 7 is a cross-sectional view of the insulator base material of Fig. 6 (a), Fig. 8 is a perspective view of the piezoelectric vibration unit of the terminal resonator of the bulk wave energy confinement type, and Fig. 7 is a perspective view of Frog H. Figure 9 is an explanatory diagram of the structure of a two-terminal resonator with pulse wave energy confinement.
Fig. 10 is an equivalent circuit diagram of the resonator shown in Fig. 9, Fig. 11 is a perspective view of a piezoelectric vibrating unit 7 of a bulk wave energy confinement type two-terminal resonator, and Fig. 12 is an equivalent circuit diagram of the resonator shown in Fig. 11. The circuit diagram, Fig. 13 is a perspective view of the piezoelectric vibration of the bulk wave energy confinement type filter -1Nitsu I-, and Fig. 14 is the perspective view of the
Fig. 15 is an explanatory diagram of the structure of a non-1 energy confinement type filter, Fig. 16 (a) and Fig. 1
6(b) is a plan view of a piezoelectric vibrating conite of a modified example of the filter shown in FIG. 15, an explanatory view of the structure of the filter, and a first
FIG. 7 is a perspective view of a piezoelectric vibration unit of an energy trap type resonator, and FIG. 18 is an explanatory diagram of an M4 structure of a resonator using the unit shown in FIG. 11. 11.11-...Insulator, 12...Piezoelectric vibration knit, 13...=...Notch, 15a
, 1511.15c, 15d...-=-conductive film,
17.18, 19.20... Extraction electrode, 26
...Solder, 31...Insulator f? ) material,
34...Piezoelectric vibration unit base material, 41.51.
61...Piezoelectric vibration unit, 71...
Resonant element, 76... Radix. Patent applicant Murata Manufacturing Co., Ltd. 19- 1st entry (^) 2nd dent 3rd figure ((1) 7th figure 3rd figure figure 4th figure Δ1 Rigiku rt
cn Fig. 13 (θ) (I:))

Claims (1)

【特許請求の範囲】[Claims] スルーホールが形成された合成樹脂製木根を切断してで
きた部分スルーボールと、圧電振動Jニラ1−の引出し
電極とを電気的に接続刃るととtプに前記基板と圧電振
動ユニットとを積層固定し/jことを特徴とするチップ
状圧電振動部品。
A partial through ball made by cutting a synthetic resin tree root with a through hole formed therein, and a lead electrode of the piezoelectric vibrating chive 1- are electrically connected with the blade and the substrate and the piezoelectric vibrating unit are connected to each other. A chip-shaped piezoelectric vibrating component characterized by laminating and fixing /j.
JP7952782A 1982-05-11 1982-05-11 Chip-shaped piezoelectric oscillating parts Granted JPS58139513A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7952782A JPS58139513A (en) 1982-05-11 1982-05-11 Chip-shaped piezoelectric oscillating parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7952782A JPS58139513A (en) 1982-05-11 1982-05-11 Chip-shaped piezoelectric oscillating parts

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2146182A Division JPS58138115A (en) 1982-02-12 1982-02-12 Chip-shaped piezoelectric oscillating component

Publications (2)

Publication Number Publication Date
JPS58139513A true JPS58139513A (en) 1983-08-18
JPH0155605B2 JPH0155605B2 (en) 1989-11-27

Family

ID=13692451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7952782A Granted JPS58139513A (en) 1982-05-11 1982-05-11 Chip-shaped piezoelectric oscillating parts

Country Status (1)

Country Link
JP (1) JPS58139513A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6082832U (en) * 1983-11-15 1985-06-08 松下電器産業株式会社 Filter package
JPS62109420A (en) * 1985-11-07 1987-05-20 Alps Electric Co Ltd Surface acoustic wave element
US4736128A (en) * 1986-01-28 1988-04-05 Alps Electric Co., Ltd. Surface acoustic wave device
JPS63174338A (en) * 1987-01-14 1988-07-18 Nec Corp Manufacture of one-chip-type saw device
US4795934A (en) * 1984-02-20 1989-01-03 British Telecommunication, Plc Mounting of saw devices
JPH0349308A (en) * 1989-07-17 1991-03-04 Murata Mfg Co Ltd Surface acoustic wave filter
US5453652A (en) * 1992-12-17 1995-09-26 Matsushita Electric Industrial Co., Ltd. Surface acoustic wave device with interdigital transducers formed on a holding substrate thereof and a method of producing the same
US6404110B1 (en) * 1997-05-16 2002-06-11 Murata Manufacturing Co., Ltd Surface acoustic wave element having a bump electrode and surface acoustic wave device comprising the same
DE10016064B4 (en) * 1999-04-02 2006-05-11 Murata Mfg. Co., Ltd., Nagaokakyo Substrate, single substrate and method of making the same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5472696A (en) * 1977-11-21 1979-06-11 Citizen Watch Co Ltd Package for super miniature size piezoelectric oscillator
JPS5661820A (en) * 1979-10-25 1981-05-27 Matsushima Kogyo Co Ltd Quartz oscillator
JPS5717124A (en) * 1980-07-05 1982-01-28 Tdk Electronics Co Ltd Capacitor and method of producing same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5472696A (en) * 1977-11-21 1979-06-11 Citizen Watch Co Ltd Package for super miniature size piezoelectric oscillator
JPS5661820A (en) * 1979-10-25 1981-05-27 Matsushima Kogyo Co Ltd Quartz oscillator
JPS5717124A (en) * 1980-07-05 1982-01-28 Tdk Electronics Co Ltd Capacitor and method of producing same

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6082832U (en) * 1983-11-15 1985-06-08 松下電器産業株式会社 Filter package
US4795934A (en) * 1984-02-20 1989-01-03 British Telecommunication, Plc Mounting of saw devices
US5035035A (en) * 1984-02-20 1991-07-30 British Telecommunications Plc Method of mounting saw devices
JPS62109420A (en) * 1985-11-07 1987-05-20 Alps Electric Co Ltd Surface acoustic wave element
US4736128A (en) * 1986-01-28 1988-04-05 Alps Electric Co., Ltd. Surface acoustic wave device
JPS63174338A (en) * 1987-01-14 1988-07-18 Nec Corp Manufacture of one-chip-type saw device
JPH0349308A (en) * 1989-07-17 1991-03-04 Murata Mfg Co Ltd Surface acoustic wave filter
US5453652A (en) * 1992-12-17 1995-09-26 Matsushita Electric Industrial Co., Ltd. Surface acoustic wave device with interdigital transducers formed on a holding substrate thereof and a method of producing the same
US6404110B1 (en) * 1997-05-16 2002-06-11 Murata Manufacturing Co., Ltd Surface acoustic wave element having a bump electrode and surface acoustic wave device comprising the same
DE10016064B4 (en) * 1999-04-02 2006-05-11 Murata Mfg. Co., Ltd., Nagaokakyo Substrate, single substrate and method of making the same

Also Published As

Publication number Publication date
JPH0155605B2 (en) 1989-11-27

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