JPS58138339U - ウエハ−の位置決め装置 - Google Patents

ウエハ−の位置決め装置

Info

Publication number
JPS58138339U
JPS58138339U JP3490182U JP3490182U JPS58138339U JP S58138339 U JPS58138339 U JP S58138339U JP 3490182 U JP3490182 U JP 3490182U JP 3490182 U JP3490182 U JP 3490182U JP S58138339 U JPS58138339 U JP S58138339U
Authority
JP
Japan
Prior art keywords
line
wafer
positioning device
guide pin
aligned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3490182U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6214692Y2 (enrdf_load_html_response
Inventor
永田　兼俊
勉 水村
Original Assignee
株式会社　東京精密
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社　東京精密 filed Critical 株式会社　東京精密
Priority to JP3490182U priority Critical patent/JPS58138339U/ja
Publication of JPS58138339U publication Critical patent/JPS58138339U/ja
Application granted granted Critical
Publication of JPS6214692Y2 publication Critical patent/JPS6214692Y2/ja
Granted legal-status Critical Current

Links

JP3490182U 1982-03-12 1982-03-12 ウエハ−の位置決め装置 Granted JPS58138339U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3490182U JPS58138339U (ja) 1982-03-12 1982-03-12 ウエハ−の位置決め装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3490182U JPS58138339U (ja) 1982-03-12 1982-03-12 ウエハ−の位置決め装置

Publications (2)

Publication Number Publication Date
JPS58138339U true JPS58138339U (ja) 1983-09-17
JPS6214692Y2 JPS6214692Y2 (enrdf_load_html_response) 1987-04-15

Family

ID=30046394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3490182U Granted JPS58138339U (ja) 1982-03-12 1982-03-12 ウエハ−の位置決め装置

Country Status (1)

Country Link
JP (1) JPS58138339U (enrdf_load_html_response)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5392667A (en) * 1977-01-25 1978-08-14 Tokyo Seimitsu Co Ltd Device for positioning wafer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5392667A (en) * 1977-01-25 1978-08-14 Tokyo Seimitsu Co Ltd Device for positioning wafer

Also Published As

Publication number Publication date
JPS6214692Y2 (enrdf_load_html_response) 1987-04-15

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