JPS58138002A - 薄膜白金温度センサの製造方法 - Google Patents
薄膜白金温度センサの製造方法Info
- Publication number
- JPS58138002A JPS58138002A JP2145082A JP2145082A JPS58138002A JP S58138002 A JPS58138002 A JP S58138002A JP 2145082 A JP2145082 A JP 2145082A JP 2145082 A JP2145082 A JP 2145082A JP S58138002 A JPS58138002 A JP S58138002A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- temperature sensor
- pattern
- producing thin
- resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 title claims description 16
- 229910052697 platinum Inorganic materials 0.000 title claims description 8
- 238000000034 method Methods 0.000 title description 3
- 239000010409 thin film Substances 0.000 title description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 6
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 6
- 229920002120 photoresistant polymer Polymers 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 3
- QZPSXPBJTPJTSZ-UHFFFAOYSA-N aqua regia Chemical compound Cl.O[N+]([O-])=O QZPSXPBJTPJTSZ-UHFFFAOYSA-N 0.000 claims description 2
- 235000006693 Cassia laevigata Nutrition 0.000 claims 1
- 241000522641 Senna Species 0.000 claims 1
- 230000002776 aggregation Effects 0.000 claims 1
- 238000004220 aggregation Methods 0.000 claims 1
- 229940124513 senna glycoside Drugs 0.000 claims 1
- 239000002253 acid Substances 0.000 description 4
- 239000010408 film Substances 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- 241000272525 Anas platyrhynchos Species 0.000 description 1
- 241000473391 Archosargus rhomboidalis Species 0.000 description 1
- 241000252233 Cyprinus carpio Species 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000035935 pregnancy Effects 0.000 description 1
- 230000035807 sensation Effects 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
Landscapes
- Thermistors And Varistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2145082A JPS58138002A (ja) | 1982-02-12 | 1982-02-12 | 薄膜白金温度センサの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2145082A JPS58138002A (ja) | 1982-02-12 | 1982-02-12 | 薄膜白金温度センサの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58138002A true JPS58138002A (ja) | 1983-08-16 |
| JPH0330281B2 JPH0330281B2 (enrdf_load_stackoverflow) | 1991-04-26 |
Family
ID=12055297
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2145082A Granted JPS58138002A (ja) | 1982-02-12 | 1982-02-12 | 薄膜白金温度センサの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58138002A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0354801A (ja) * | 1989-07-21 | 1991-03-08 | Tdk Corp | 感温抵抗器の製造方法 |
| JP2018508781A (ja) * | 2015-03-03 | 2018-03-29 | 江▲蘇▼多▲維▼科技有限公司Ｍｕｌｔｉｄｉｍｅｎｓｉｏｎ Ｔｅｃｈｎｏｌｏｇｙ Ｃｏ．， Ｌｔｄ． | 銅熱抵抗薄膜温度センサチップおよびその製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56134702A (en) * | 1980-02-29 | 1981-10-21 | Leeds & Northrup Co | Thin film resistance thermometer having prescribed resistance temperature coefficient and method of producing same |
-
1982
- 1982-02-12 JP JP2145082A patent/JPS58138002A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56134702A (en) * | 1980-02-29 | 1981-10-21 | Leeds & Northrup Co | Thin film resistance thermometer having prescribed resistance temperature coefficient and method of producing same |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0354801A (ja) * | 1989-07-21 | 1991-03-08 | Tdk Corp | 感温抵抗器の製造方法 |
| JP2018508781A (ja) * | 2015-03-03 | 2018-03-29 | 江▲蘇▼多▲維▼科技有限公司Ｍｕｌｔｉｄｉｍｅｎｓｉｏｎ Ｔｅｃｈｎｏｌｏｇｙ Ｃｏ．， Ｌｔｄ． | 銅熱抵抗薄膜温度センサチップおよびその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0330281B2 (enrdf_load_stackoverflow) | 1991-04-26 |
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