JPS58137781A - 薄膜型固体ｘ線センサ− - Google Patents
薄膜型固体ｘ線センサ−Info
- Publication number
- JPS58137781A JPS58137781A JP57019752A JP1975282A JPS58137781A JP S58137781 A JPS58137781 A JP S58137781A JP 57019752 A JP57019752 A JP 57019752A JP 1975282 A JP1975282 A JP 1975282A JP S58137781 A JPS58137781 A JP S58137781A
- Authority
- JP
- Japan
- Prior art keywords
- particles
- ray
- ray sensor
- thin film
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 8
- 239000002245 particle Substances 0.000 claims abstract description 27
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims abstract description 12
- 238000001514 detection method Methods 0.000 claims description 15
- 239000007787 solid Substances 0.000 claims description 2
- 210000003323 beak Anatomy 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 11
- 229910021417 amorphous silicon Inorganic materials 0.000 abstract description 5
- 230000000737 periodic effect Effects 0.000 abstract description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract 1
- 229910052739 hydrogen Inorganic materials 0.000 abstract 1
- 239000001257 hydrogen Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 description 6
- 239000000126 substance Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- RPPBZEBXAAZZJH-UHFFFAOYSA-N cadmium telluride Chemical compound [Te]=[Cd] RPPBZEBXAAZZJH-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000295 emission spectrum Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 208000032843 Hemorrhage Diseases 0.000 description 1
- 208000006011 Stroke Diseases 0.000 description 1
- 238000001467 acupuncture Methods 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000002189 fluorescence spectrum Methods 0.000 description 1
- 150000007857 hydrazones Chemical class 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 210000001259 mesencephalon Anatomy 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- WCPAKWJPBJAGKN-UHFFFAOYSA-N oxadiazole Chemical compound C1=CON=N1 WCPAKWJPBJAGKN-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 210000004872 soft tissue Anatomy 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- AAAQKTZKLRYKHR-UHFFFAOYSA-N triphenylmethane Chemical compound C1=CC=CC=C1C(C=1C=CC=CC=1)C1=CC=CC=C1 AAAQKTZKLRYKHR-UHFFFAOYSA-N 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/2018—Scintillation-photodiode combinations
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Light Receiving Elements (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Measurement Of Radiation (AREA)
- Apparatus For Radiation Diagnosis (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57019752A JPS58137781A (ja) | 1982-02-12 | 1982-02-12 | 薄膜型固体ｘ線センサ− |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57019752A JPS58137781A (ja) | 1982-02-12 | 1982-02-12 | 薄膜型固体ｘ線センサ− |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58137781A true JPS58137781A (ja) | 1983-08-16 |
| JPH0463555B2 JPH0463555B2 (enrdf_load_stackoverflow) | 1992-10-12 |
Family
ID=12008066
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57019752A Granted JPS58137781A (ja) | 1982-02-12 | 1982-02-12 | 薄膜型固体ｘ線センサ− |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58137781A (enrdf_load_stackoverflow) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5886359A (en) * | 1996-06-13 | 1999-03-23 | Eastman Kodak Company | X-ray dectector, detection assembly, and method |
| WO2004077098A1 (ja) * | 2003-02-27 | 2004-09-10 | Kabushiki Kaisha Toshiba | Ｘ線検出器とそれを用いたｘ線検査装置 |
| EP1184683A4 (en) * | 2000-03-28 | 2012-08-22 | Toshiba Kk | X-RAY PLAN DETECTOR |
| EP2739701B1 (en) | 2011-08-02 | 2016-02-10 | Vieworks Co. Ltd. | A novel composition for radiation imaging detector and a radiation imaging detector comprising the same |
| CN106784061A (zh) * | 2016-12-28 | 2017-05-31 | 中国科学院长春光学精密机械与物理研究所 | 一种紫外探测器及其制备方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018151233A (ja) * | 2017-03-13 | 2018-09-27 | 株式会社東芝 | 放射線測定装置 |
-
1982
- 1982-02-12 JP JP57019752A patent/JPS58137781A/ja active Granted
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5886359A (en) * | 1996-06-13 | 1999-03-23 | Eastman Kodak Company | X-ray dectector, detection assembly, and method |
| EP1184683A4 (en) * | 2000-03-28 | 2012-08-22 | Toshiba Kk | X-RAY PLAN DETECTOR |
| WO2004077098A1 (ja) * | 2003-02-27 | 2004-09-10 | Kabushiki Kaisha Toshiba | Ｘ線検出器とそれを用いたｘ線検査装置 |
| JPWO2004077098A1 (ja) * | 2003-02-27 | 2006-06-08 | 株式会社東芝 | Ｘ線検出器とそれを用いたｘ線検査装置 |
| US7282717B2 (en) | 2003-02-27 | 2007-10-16 | Kabushiki Kaisha Toshiba | X-ray detector and X-ray examination apparatus using it |
| EP2739701B1 (en) | 2011-08-02 | 2016-02-10 | Vieworks Co. Ltd. | A novel composition for radiation imaging detector and a radiation imaging detector comprising the same |
| CN106784061A (zh) * | 2016-12-28 | 2017-05-31 | 中国科学院长春光学精密机械与物理研究所 | 一种紫外探测器及其制备方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0463555B2 (enrdf_load_stackoverflow) | 1992-10-12 |
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