JPS58135632A - インジウム−アンチモン−ヒ素系化合物薄膜の製造方法 - Google Patents

インジウム−アンチモン−ヒ素系化合物薄膜の製造方法

Info

Publication number
JPS58135632A
JPS58135632A JP57018375A JP1837582A JPS58135632A JP S58135632 A JPS58135632 A JP S58135632A JP 57018375 A JP57018375 A JP 57018375A JP 1837582 A JP1837582 A JP 1837582A JP S58135632 A JPS58135632 A JP S58135632A
Authority
JP
Japan
Prior art keywords
thin film
antimony
deposited
arsenic
indium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57018375A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0247850B2 (enExample
Inventor
Keiji Kuboyama
久保山　啓治
Takeki Matsui
雄毅 松居
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Kasei Corp
Asahi Chemical Industry Co Ltd
Original Assignee
Asahi Chemical Industry Co Ltd
Asahi Kasei Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Chemical Industry Co Ltd, Asahi Kasei Kogyo KK filed Critical Asahi Chemical Industry Co Ltd
Priority to JP57018375A priority Critical patent/JPS58135632A/ja
Publication of JPS58135632A publication Critical patent/JPS58135632A/ja
Publication of JPH0247850B2 publication Critical patent/JPH0247850B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/002—Controlling or regulating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
  • Hall/Mr Elements (AREA)
JP57018375A 1982-02-08 1982-02-08 インジウム−アンチモン−ヒ素系化合物薄膜の製造方法 Granted JPS58135632A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57018375A JPS58135632A (ja) 1982-02-08 1982-02-08 インジウム−アンチモン−ヒ素系化合物薄膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57018375A JPS58135632A (ja) 1982-02-08 1982-02-08 インジウム−アンチモン−ヒ素系化合物薄膜の製造方法

Publications (2)

Publication Number Publication Date
JPS58135632A true JPS58135632A (ja) 1983-08-12
JPH0247850B2 JPH0247850B2 (enExample) 1990-10-23

Family

ID=11969960

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57018375A Granted JPS58135632A (ja) 1982-02-08 1982-02-08 インジウム−アンチモン−ヒ素系化合物薄膜の製造方法

Country Status (1)

Country Link
JP (1) JPS58135632A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61259583A (ja) * 1985-05-14 1986-11-17 Asahi Chem Ind Co Ltd 半導体磁電変換素子

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61259583A (ja) * 1985-05-14 1986-11-17 Asahi Chem Ind Co Ltd 半導体磁電変換素子

Also Published As

Publication number Publication date
JPH0247850B2 (enExample) 1990-10-23

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