JPS58135465U - surface treatment equipment - Google Patents
surface treatment equipmentInfo
- Publication number
- JPS58135465U JPS58135465U JP3061282U JP3061282U JPS58135465U JP S58135465 U JPS58135465 U JP S58135465U JP 3061282 U JP3061282 U JP 3061282U JP 3061282 U JP3061282 U JP 3061282U JP S58135465 U JPS58135465 U JP S58135465U
- Authority
- JP
- Japan
- Prior art keywords
- surface treatment
- treatment equipment
- chemical solution
- face
- polyhedral blocks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の揮発性液体シール方式を説明す説明図で
ある。第２図は本考案の１実施例を示すエツチング処理
装置の要部斜視図である。第３図は第２図のエツチング
処理装置の平面図である。
第４図はシールブロックの斜視図である。第５図はシー
ルブロックの他の実施例を示す斜視図である。
４・・・・・・槽、５・・・・・・エツチング液、６・
・・・・・シールブロック。FIG. 1 is an explanatory diagram illustrating a conventional volatile liquid sealing method. FIG. 2 is a perspective view of essential parts of an etching processing apparatus showing one embodiment of the present invention. 3 is a plan view of the etching apparatus shown in FIG. 2. FIG. FIG. 4 is a perspective view of the seal block. FIG. 5 is a perspective view showing another embodiment of the seal block. 4... Tank, 5... Etching liquid, 6...
... Seal block.
Claims (1)
複数の多面体ブロックを浮遊させ、前記多面体ブロック
を相互に面間接合することにより前記化学溶液表面を略
々密閉状態としたことを特徴とする表面処理装置。A plurality of polyhedral blocks are suspended in the chemical solution in a tank containing a chemical solution for surface treatment, and the surface of the chemical solution is brought into a substantially sealed state by joining the polyhedral blocks face-to-face with each other. surface treatment equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3061282U JPS58135465U (en) | 1982-03-03 | 1982-03-03 | surface treatment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3061282U JPS58135465U (en) | 1982-03-03 | 1982-03-03 | surface treatment equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58135465U true JPS58135465U (en) | 1983-09-12 |
| JPS6233016Y2 JPS6233016Y2 (en) | 1987-08-24 |
Family
ID=30042318
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3061282U Granted JPS58135465U (en) | 1982-03-03 | 1982-03-03 | surface treatment equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58135465U (en) |
-
1982
- 1982-03-03 JP JP3061282U patent/JPS58135465U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6233016Y2 (en) | 1987-08-24 |
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