JPS5813483B2 - Oxygen recycling ozone generator - Google Patents

Oxygen recycling ozone generator

Info

Publication number
JPS5813483B2
JPS5813483B2 JP13028676A JP13028676A JPS5813483B2 JP S5813483 B2 JPS5813483 B2 JP S5813483B2 JP 13028676 A JP13028676 A JP 13028676A JP 13028676 A JP13028676 A JP 13028676A JP S5813483 B2 JPS5813483 B2 JP S5813483B2
Authority
JP
Japan
Prior art keywords
ozone
oxygen
adsorption tower
ozone generator
heat storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13028676A
Other languages
Japanese (ja)
Other versions
JPS5354192A (en
Inventor
小川周治
難波敬典
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP13028676A priority Critical patent/JPS5813483B2/en
Publication of JPS5354192A publication Critical patent/JPS5354192A/en
Publication of JPS5813483B2 publication Critical patent/JPS5813483B2/en
Expired legal-status Critical Current

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  • Oxygen, Ozone, And Oxides In General (AREA)

Description

【発明の詳細な説明】 この発明は酸素リサイクルオゾン発生装置の改良に関す
るものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improvement in an oxygen recycling ozone generator.

従来の酸素リサイクルオゾン発生装置の概略的な構成を
第1図に示す。
FIG. 1 shows a schematic configuration of a conventional oxygen recycling ozone generator.

第1図において、1はオゾン発生機、2は熱交換器、3
は冷凍機、4−1〜4−8は動作切換え用電磁弁、5−
1.5−2はオゾン吸着塔、6は原料酸素供給装置、7
は脱着用乾燥気体入口、8はオゾン含有気体出口である
In Figure 1, 1 is an ozone generator, 2 is a heat exchanger, and 3 is an ozone generator.
is a refrigerator, 4-1 to 4-8 are solenoid valves for operation switching, and 5-
1.5-2 is an ozone adsorption tower, 6 is a raw material oxygen supply device, 7
8 is a dry gas inlet for desorption, and 8 is an ozone-containing gas outlet.

なお、図中酸素リサイクル系統路は実締で、乾燥気体系
統路は破線で示す。
In the figure, the oxygen recycle system road is shown as actually closed, and the dry gas system road is shown as a broken line.

以下に第1図の従来の酸素リサイクルオゾン発生装置に
おいて、吸着塔5−1がオゾン吸着動作を、オゾン吸着
塔5−2がオゾン脱着動作を行なっている状態について
説明する。
In the following, a state in which the adsorption tower 5-1 performs an ozone adsorption operation and the ozone adsorption tower 5-2 performs an ozone desorption operation in the conventional oxygen recycling ozone generator shown in FIG. 1 will be described.

オゾン発生機1に供給された原料酸素は、オゾン発生機
1を通過する間に放電により一部がオゾンになり、オゾ
ン含有酸素(以下オゾン化酸素とする)として熱交換器
2に送られ冷凍機3からの冷媒によって冷却される。
While the raw material oxygen supplied to the ozone generator 1 passes through the ozone generator 1, part of it becomes ozone due to electric discharge, and is sent to the heat exchanger 2 as ozone-containing oxygen (hereinafter referred to as ozonized oxygen) and frozen. It is cooled by the refrigerant from machine 3.

冷却されたオゾン化酸素は電磁弁4−1を経てオゾン吸
着塔5−1に入り塔内の吸着剤を冷却すると共に冷却さ
れた吸着剤にオゾンを吸着させ、残りの酸素は電磁弁4
−2を介してオゾン発生機1にリサイクルされる。
The cooled ozonized oxygen enters the ozone adsorption tower 5-1 via the solenoid valve 4-1, cools the adsorbent in the tower, and causes the cooled adsorbent to adsorb ozone, and the remaining oxygen passes through the solenoid valve 4-1.
-2 to be recycled to the ozone generator 1.

ここでオゾンとして消費された酸素は原料酸素供給装置
6から補われる。
Here, the oxygen consumed as ozone is supplemented from the raw material oxygen supply device 6.

一方、乾燥気体系統(脱着系統)では、上記吸着塔5−
1の吸着動作中は、電磁弁4−7.4−8が開放、電磁
弁4−5.4−6が閉鎖されており乾燥気体が入口7か
ら電磁弁4−7を経てオゾン吸着塔5−2に入り、現段
階の前の段階で吸着塔5−1に吸着されているオゾンを
脱着しながら電磁弁4−8を介してオゾン含有気体とし
て出口8から使用個所に送られる。
On the other hand, in the dry gas system (desorption system), the adsorption tower 5-
During the adsorption operation in step 1, the solenoid valves 4-7, 4-8 are open, and the solenoid valves 4-5, 4-6 are closed, and dry gas flows from the inlet 7 through the solenoid valve 4-7 to the ozone adsorption tower 5. -2, and while desorbing the ozone adsorbed in the adsorption tower 5-1 in the previous stage, it is sent as an ozone-containing gas through the solenoid valve 4-8 to the point of use from the outlet 8.

吸着塔5−1内の吸着剤がオゾンを飽和近くまで吸着す
ると電磁弁操作によりオゾン吸着塔5−1はオゾン吸着
動作からオゾン脱着動作へ、吸着塔5−2はオゾン脱着
動作からオゾン吸着動作に切換えられる。
When the adsorbent in adsorption tower 5-1 adsorbs ozone to near saturation, the solenoid valve is operated so that ozone adsorption tower 5-1 changes from ozone adsorption operation to ozone desorption operation, and adsorption tower 5-2 changes from ozone desorption operation to ozone adsorption operation. can be switched to

上記オゾン吸着動作、脱着動作を交互に繰返すことによ
り連続的にオゾンを製造供給する。
By alternately repeating the ozone adsorption and desorption operations described above, ozone is continuously produced and supplied.

ところで、上記の従来の酸素リサイクルオゾン発生装置
は、装置を停止させる時、オゾン吸着塔内の吸着剤の温
度が上昇するため吸着剤に吸着されていたオゾンが脱着
し塔内の圧力上昇と共にオゾン濃度が高かまり、オゾン
の連鎖分解反応による爆発の危険が生ずる。
By the way, when the above-mentioned conventional oxygen recycling ozone generator is stopped, the temperature of the adsorbent in the ozone adsorption tower rises, so the ozone adsorbed by the adsorbent is desorbed, and as the pressure inside the tower increases, ozone is released. At high concentrations, there is a risk of explosion due to chain decomposition reactions of ozone.

従って、爆発を防止するため吸着されていたオゾンを系
外に排出する必要がある。
Therefore, in order to prevent an explosion, it is necessary to discharge the adsorbed ozone out of the system.

そのため、装置を再起動する際、吸着剤へオゾンを蓄積
させる準備期間を要し、定常動作に入るまで長時間を要
する欠点がある。
Therefore, when restarting the device, a preparation period is required for accumulating ozone in the adsorbent, and there is a drawback that it takes a long time to start steady operation.

この発明は上記のような従来のものの欠点に鑑みてなさ
れたもので、オゾン吸着塔に蓄熱作用を付加することに
より吸着剤にオゾンを吸着させた状態で長時間にわたり
安全に保つことのできる酸素リサイクルオゾン発生装置
を提供するものである。
This invention was made in view of the above-mentioned drawbacks of the conventional ones. By adding a heat storage function to the ozone adsorption tower, it is possible to safely keep ozone adsorbed on the adsorbent for a long time. The present invention provides a recycled ozone generator.

以下にこの発明による第2図の一実施例について説明す
る。
An embodiment of the present invention shown in FIG. 2 will be described below.

第2図において1〜4、および6〜8は従来のものと同
じである。
In FIG. 2, 1 to 4 and 6 to 8 are the same as the conventional one.

5’−1.5’−2は蓄熱作用を設けたオゾン吸着塔、
9は蓄熱体である0 この発明による酸素リサイクルオゾン発生装置の動作に
おいで、オゾンの吸脱着によるオゾンと酸素の分離およ
び分離された酸素のオゾン発生機1へのリサイクルにつ
いては従来と同じである。
5'-1.5'-2 is an ozone adsorption tower equipped with a heat storage function,
9 is a heat storage body 0 In the operation of the oxygen recycling ozone generator according to the present invention, the separation of ozone and oxygen by adsorption and desorption of ozone and the recycling of the separated oxygen to the ozone generator 1 are the same as conventional ones. .

しかし、熱交換器2で冷却されたオゾン化酸素は電磁弁
4−1を経て吸着塔5′−1に入り塔内の吸着剤のみな
らず蓄熱体9をも冷却し蓄冷熱を行なう。
However, the ozonized oxygen cooled by the heat exchanger 2 passes through the electromagnetic valve 4-1 and enters the adsorption tower 5'-1, cooling not only the adsorbent in the tower but also the heat storage body 9, thereby storing cold heat.

酸素リサイクルオゾン発生装置を停止する場合は、オゾ
ンを吸着させたままオゾン吸着塔5′−1.5’−2の
全ての電磁弁を閉鎖した状態で停止する0
上記のようにオゾン吸着塔5’−1.5’−2に蓄熱体
9を設けて通常動作時に蓄熱体9に蓄冷熱させているた
め、装置を停止させてもオゾン吸着塔5’−1.5’−
2は長時間にわたって保冷される。
When stopping the oxygen recycling ozone generator, close all solenoid valves of the ozone adsorption tower 5'-1.5'-2 while adsorbing ozone.
As mentioned above, since the heat storage body 9 is provided in the ozone adsorption tower 5'-1.5'-2 and cold heat is stored in the heat storage body 9 during normal operation, the ozone adsorption tower 5'-1 .5'-
2 is kept cold for a long time.

従って従来の酸素リサイクルオゾン発生装置にみられた
吸着剤の温度上昇に伴い脱着するオゾンによる爆発の危
険性は吸着されているオゾンを系外に排出することなく
防止できる。
Therefore, the risk of explosion due to ozone desorbed as the temperature of the adsorbent increases, which is seen in conventional oxygen recycling ozone generators, can be prevented without discharging the adsorbed ozone out of the system.

上記の理由により酸素リサイクルオゾン発生装置を再起
動する時にオゾンを吸着剤に蓄積する準備期間を要さず
に通常の動作状態に入ることが可能となった。
For the above reasons, when the oxygen recycling ozone generator is restarted, it is possible to enter the normal operating state without requiring a preparation period for accumulating ozone in the adsorbent.

さらに、突発的な事故、故障により装置が停止しても吸
着剤は保冷されるためオゾンによる爆発の危険性も防止
できる。
Furthermore, even if the equipment stops due to a sudden accident or failure, the adsorbent is kept cool, which prevents the risk of explosion due to ozone.

また、蓄熱体として単に顕熱量だけ利用するのでなく吸
着剤の作動温度より若干高い温度で相変化を生ずる蓄熱
材を利用することもできる。
In addition, instead of simply using the sensible heat amount as the heat storage material, it is also possible to use a heat storage material that undergoes a phase change at a temperature slightly higher than the operating temperature of the adsorbent.

第3図はこのような蓄熱材を用いたオゾン吸着塔の一例
を示す一部破断縦断面図で、図において10は例えばシ
リカゲルを用いた吸着剤、11は断熱容器である。
FIG. 3 is a partially cut away vertical cross-sectional view showing an example of an ozone adsorption tower using such a heat storage material. In the figure, 10 is an adsorbent using, for example, silica gel, and 11 is a heat insulating container.

例えば、吸着剤10を−60℃で作動させる場合には融
解温度が約−55℃である60〜65%エチレングリコ
ール水溶液を蓄熱体9として使用すると、蓄熱体9の潜
熱量をも利用できるので、蓄熱体9の容積を減少させ、
コンパクトなオゾン吸着塔が実現でき、しかも吸着剤1
0の温度も定常に保つことができる。
For example, when the adsorbent 10 is operated at -60°C, if a 60-65% ethylene glycol aqueous solution with a melting temperature of about -55°C is used as the heat storage body 9, the amount of latent heat of the heat storage body 9 can also be utilized. , reducing the volume of the heat storage body 9;
A compact ozone adsorption tower can be realized, and the adsorbent 1
The temperature of 0 can also be kept constant.

以上詳述したように、この発明ではオゾン発生機とこの
オゾン発生機から得られるオゾン化酸素の内のオゾンを
乾燥気体に接触させるための吸着剤を有するオゾン吸着
塔とオゾンを吸着された酸素を再びオゾン発生機ヘリサ
イクルする酸素リサイクル系統とからなる装置において
、上記オゾン吸着塔に蓄熱装置を設けたので、オゾン吸
着塔の吸着剤にオゾンを吸着させた状態で長時間安全に
保持できるとともに、装置を一時停止した後、再起動す
る際の準備期間を少くしもしくは無くすることができる
As described in detail above, the present invention includes an ozone generator, an ozone adsorption tower having an adsorbent for bringing ozone of the ozonized oxygen obtained from the ozone generator into contact with dry gas, and an ozone adsorption tower that has an ozone adsorbed In a device consisting of an oxygen recycling system that recycles ozone to an ozone generator, the ozone adsorption tower is equipped with a heat storage device, so ozone can be safely maintained for a long time while adsorbed on the adsorbent of the ozone adsorption tower. , the preparation period for restarting the device after it is temporarily stopped can be reduced or eliminated.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、従来の酸素リサイクルオゾン発生装置を示す
構成図、第2図はこの発明による酸素リサイクルオゾン
発生装置の一実施例の構成図、第3図はこの発明に用い
るオゾン吸着塔の一例を示す一部破断縦断面図である。 図において、1.はオゾン発生機、2は熱交換器、3は
冷凍機、4−1〜4−8は動作切換用電磁弁、5−1.
5−2.5’−1.5’−2はオゾン吸着塔、6は原料
酸素供給装置、7は乾燥気体入口、8は処理済のオゾン
含有気体出口、9は蓄熱体、10は吸着剤、11は断熱
容器である。 なお、図中同一符号は同一、または相当部分を示す。
Fig. 1 is a block diagram showing a conventional oxygen recycling ozone generator, Fig. 2 is a block diagram of an embodiment of the oxygen recycling ozone generator according to the present invention, and Fig. 3 is an example of an ozone adsorption tower used in the present invention. FIG. In the figure, 1. 2 is an ozone generator, 2 is a heat exchanger, 3 is a refrigerator, 4-1 to 4-8 are operation switching solenoid valves, 5-1.
5-2.5'-1.5'-2 is an ozone adsorption tower, 6 is a raw material oxygen supply device, 7 is a dry gas inlet, 8 is a treated ozone-containing gas outlet, 9 is a heat storage body, 10 is an adsorbent , 11 is a heat insulating container. Note that the same reference numerals in the figures indicate the same or corresponding parts.

Claims (1)

【特許請求の範囲】 1 酸素を原料としてオゾンを発生するオゾン発生機、
このオゾン発生機から得られ冷却されたオゾン含有酸素
中のオゾンを吸着する吸着剤を有するオゾン吸着塔、オ
ゾン脱着用乾燥気体を上記オゾン吸着塔へ送大してオゾ
ンを取出す乾燥気系統路、及び上記オゾン吸着塔におい
て分離された酸素を上記オゾン発生機ヘリサイクルする
酸素リサイクル系統路を有するものにおいて、上記オゾ
ン吸着塔の温度変化を抑制する蓄熱装置を備えたことを
特徴とする酸素リサイクルオゾン発生装置。 2 蓄熱装置に吸着塔の作動温度より若干高い温度で相
変化を生ずる蓄熱材を用いたことを特徴とする特許請求
の範囲第1項記載の酸素リサイクルオゾン発生装置。 3 蓄熱装置にエチレングリコール水溶液を蓄熱材とし
て用いたことを特徴とする特許請求の範囲第1項もしく
は第2項記載の酸素リサイクルオゾン発生装置。
[Claims] 1. An ozone generator that generates ozone using oxygen as a raw material;
an ozone adsorption tower having an adsorbent for adsorbing ozone in the cooled ozone-containing oxygen obtained from the ozone generator; a dry air system line for sending ozone desorption dry gas to the ozone adsorption tower to extract ozone; An oxygen recycling ozone generator having an oxygen recycling system for recycling the oxygen separated in the ozone adsorption tower to the ozone generator, characterized in that it is equipped with a heat storage device that suppresses temperature changes in the ozone adsorption tower. . 2. The oxygen recycling ozone generator according to claim 1, wherein the heat storage device uses a heat storage material that undergoes a phase change at a temperature slightly higher than the operating temperature of the adsorption tower. 3. The oxygen recycling ozone generator according to claim 1 or 2, characterized in that the heat storage device uses an ethylene glycol aqueous solution as a heat storage material.
JP13028676A 1976-10-28 1976-10-28 Oxygen recycling ozone generator Expired JPS5813483B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13028676A JPS5813483B2 (en) 1976-10-28 1976-10-28 Oxygen recycling ozone generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13028676A JPS5813483B2 (en) 1976-10-28 1976-10-28 Oxygen recycling ozone generator

Publications (2)

Publication Number Publication Date
JPS5354192A JPS5354192A (en) 1978-05-17
JPS5813483B2 true JPS5813483B2 (en) 1983-03-14

Family

ID=15030673

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13028676A Expired JPS5813483B2 (en) 1976-10-28 1976-10-28 Oxygen recycling ozone generator

Country Status (1)

Country Link
JP (1) JPS5813483B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2580271B1 (en) * 1985-04-16 1994-07-08 Air Liquide OZONE PRODUCTION PROCESS

Also Published As

Publication number Publication date
JPS5354192A (en) 1978-05-17

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