JPS58132655A - Ultrasonic microscope - Google Patents

Abstract

PURPOSE:To perform an efficient work to set a sample, by holding a part of a sample, having an arbitrary shape, in parallel to a scanning surface of a sample table. CONSTITUTION:Holes 16, wherein a plurality of samples are attached, are provided in a sample holding plate 15 which is ground into a parallel plate. The plate 15 is placed on a surface of a stand 17 having a surface ground into a mirror surface, a sample 7 is placed in the hole 16, and if, after the sample 7 and the plate 15 are secured to each other with an adhesive 18, the plate 15 is turned over, the A-surface of the sample 7 is secured flush with the plate 15. If the sample 7 is attached to a sample table 14, it permits the scanning surface of the table 14 to easily coincide with an observing surface A of the sample 7 for securing.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an ultrasonic W4* mirror, particularly an ultrasonic microscope capable of completely polishing a given sample.

In recent years, it has become possible to generate and detect ultrahigh-frequency sound waves as high as IGH2, making it possible to achieve sound wavelengths of approximately 1 μm underwater, and as a result, it has become possible to obtain a sonic wave 1# device with a pan-sized resolution. . That is, a concave lens is used to create a focused f-beam, and a resolution of up to 1 μm is achieved.

A medical specialist will be placed in the beam to detect the ultrasound waves reflected by the sample and elucidate the elasticity of the thin region of the sample.
J12 mechanically scans the sample in two dimensions and displays the intensity of this signal as a brightness signal on a cathode ray tube, allowing the micro-a structure of the sample to be enlarged.

FIG. 1 is a diagram showing the main components of the ultrasound microscope. The focusing, transmission and reception of ultrasonic waves is performed by a spherical lens 1, and its structure consists of optically polishing one side of a material made of cylindrical fused silica, etc., and placing a piezoelectric thin film (ZnO) 2 on top of it with upper and lower electrodes 3. A pulse 5 generated from a pulse generator 4 is applied to the piezoelectric thin film 2 having a sandwich structure as described above to generate an ultrasonic wave 6tl. The other end has a diameter of 0.1 vmφ to 1. A concave L-shaped hemispherical hole of approximately Owφ is formed, and a medium (for example, water) 8 is filled between this hemispherical hole and the sample to transmit the ultrasonic waves 6 to the sample 7. .

Ultrasonic waves 6 generated by the piezoelectric thin film 2 propagate in the cylinder as plane waves. When this plane wave reaches the hemispherical hole, quartz (f-wave 6000 m/s) and water (sound speed 1500 m/s,
) A refraction effect occurs due to the difference in the sound speed between the sample 7 and the sample 7, and a focused ultrasonic wave 6 can be irradiated onto the surface of the sample 7. On the other hand, the ultrasonic waves reflected from the sample 7 are collected by a spherical lens and turned into plane waves with a phase adjustment of n1, reaching the piezoelectric thin film 2, where they are converted into an RF signal 9. This RF signal 9 is received by a receiver 1o, where it is diode-detected and converted into a video signal 11,
It is used as an input signal for the CRT display 12.

In the apparatus configured in this way, when the sample 7 is two-dimensionally scanned within the x-y plane by the sample stage drive power supply 13, the intensity of reflection from the sample surface as the sample scans changes two-dimensionally. Surface 1 surface pressure 2 is shown.

Generally speaking, a portion of ultrasonic waves is reflected by the surface of an object, but a large portion of the ultrasound waves enters the object, regardless of whether the object is optically transparent or not. , it returns as an echo reflecting differences in viscosity and defects. Ultrasonic microscopes can utilize this property to detect aspects inside a sample.

The ultrasonic microscope with such % mold was opened and the sample t
- If the sample is to be fixed on the sample stage 14, the second method is
As shown in the figure (Jl), WR observation surface A of sample 7 is on sample stage 1.
It is desirable to fix it parallel to the x-y scanning plane B of 4. This is because if the observation plane of sample 7 is tilted with respect to scanning plane B of sample stage 14 as shown in Figure 2), the point where the focal plane crosses sample 7 is indicated by dotted line C. In order to observe the uniform depth from the surface A, it is easy to fix the sample 7 as shown in Fig. 2 (11). When trying to observe the A side, it is not easy to fix the sample stage 14 and the A side parallel to each other, so it is necessary to readjust the fixation several times to find the optimal conditions. This is the current situation, and it takes time to set up the sample.

The present invention was made in order to solve the above-mentioned problem of interpolation, and provides an optimal sample holding device for use on a sample stage of an ultrasonic microscope or the like.

FIG. 4 is a diagram showing the configuration of an embodiment of the present invention. The sample holding plate 15, which is polished into a parallel flat plate, is provided with holes 16tl for attaching a plurality of samples.

The procedure for fixing the sample 7 to the sample holding plate 15 will be described below. As shown in FIG. In this state, the sample 7f is placed in the hole 16 as shown in FIG. Next, as shown in Figure 5(C), adhesive 1
8 fixes the sample 7 and the sample holding plate 15. After the adhesive 18 has hardened, the sample holding plate 15t is turned over, so that the sample holding plate 15 and the A side of the sample 7 are fixed on the same plane as shown in FIG. 5(d).

If the sample 7 fixed to the sample holding plate 15 by the method described above is attached to the sample stand 14, the scanning surface of the sample stand 14 and the sample 7
It can be easily fixed in alignment with the observation surface A of the sample 7. If the sample holding plate 15 is used in this way, the shape of the sample 7 only needs to be flat on the observation surface. .

The method described above describes how to mount a sample when the surface of the sample 7 to be observed is flat, but this is not necessarily the case, and when the sample 7 has the shape shown in FIG. The observation surface of the sample 7 and the scanning surface of the sample stage 14 can be easily matched by the method described below.

That is, as shown in FIG. 7(a), the sample 7 is fixed in advance to the sample holding plate 15 with an adhesive 18. Next, as shown in Figure 7), when the sample holding plate 15 and the sample 7 are polished identically, the A side to be observed (for example, up to the position indicated by the dotted line in the figure) is polished parallel to the sample holding plate 15. Therefore, this result is the same as the situation described in FIG. 5(d).

FIG. 8(a) shows an embodiment in which a polishing device 19 (shown in FIG. 8) is further provided in a part of the ultrasonic microscope having the configuration shown in FIG.

With this configuration, if you want to observe a deeper part during observation, move the sample stage 14 to the polishing device 19, polish it to a predetermined thickness, and then return the sample stage 14 to the predetermined position. It is also possible to continue monitoring.

[Brief explanation of drawings]

Figure 1 is a schematic configuration diagram of the ultrasonic microscope, Figure 2 is a diagram showing the state of sample mounting, Figure 3 is a diagram showing the shape of the sample, Figure 4 is a diagram showing the structure of the sample holding plate, and Figure 5 is a diagram showing the structure of the sample holding plate. The figure is a diagram explaining the order of attaching the sample to the sample holding plate. Figures 6 and 7 are diagrams showing how to attach the sample when the surface is not flat. An example in which a sample polishing device is installed in the vicinity is ¥11 Fig. % 2 Fig. (α) 4 (b) Child 3 Fig. % 4 Fig. 5 Fig. (α) 6 (b) 17 (d)'7 No. 6 Figure'fi7 Figure (OL) -G (=ball T==rigid- δth mouth (0L) / 74 (8)

Claims (1)

[Claims] 1. An ultrasonic device consisting of a sound wave propagating body and a sound wave lens formed at the end of the propagating body and having a predetermined focal point, which photographs the sample using the disturbed sound waves emitted from the predetermined sample provided near the focal point. An ultrasonic microscope characterized by having a means for holding a part of an arbitrarily shaped sample parallel to the scanning plane of a sample stage.