JPS58130547A - 電気伝導性を有する炭化珪素基板への絶縁皮膜形成方法 - Google Patents

電気伝導性を有する炭化珪素基板への絶縁皮膜形成方法

Info

Publication number
JPS58130547A
JPS58130547A JP56209992A JP20999281A JPS58130547A JP S58130547 A JPS58130547 A JP S58130547A JP 56209992 A JP56209992 A JP 56209992A JP 20999281 A JP20999281 A JP 20999281A JP S58130547 A JPS58130547 A JP S58130547A
Authority
JP
Japan
Prior art keywords
silicon carbide
sintered body
coating
film
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56209992A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6410100B2 (enExample
Inventor
Akira Enomoto
亮 榎本
Hidetoshi Yamauchi
山内　英俊
Shoji Tanigawa
庄司 谷川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Ibigawa Electric Industry Co Ltd
Original Assignee
Ibiden Co Ltd
Ibigawa Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd, Ibigawa Electric Industry Co Ltd filed Critical Ibiden Co Ltd
Priority to JP56209992A priority Critical patent/JPS58130547A/ja
Priority to US06/451,940 priority patent/US4499147A/en
Publication of JPS58130547A publication Critical patent/JPS58130547A/ja
Priority to US06/858,834 priority patent/US4664946A/en
Publication of JPS6410100B2 publication Critical patent/JPS6410100B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W70/692—
    • H10W99/00—

Landscapes

  • Ceramic Products (AREA)
JP56209992A 1981-12-28 1981-12-28 電気伝導性を有する炭化珪素基板への絶縁皮膜形成方法 Granted JPS58130547A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP56209992A JPS58130547A (ja) 1981-12-28 1981-12-28 電気伝導性を有する炭化珪素基板への絶縁皮膜形成方法
US06/451,940 US4499147A (en) 1981-12-28 1982-12-21 Silicon carbide substrates and a method of producing the same
US06/858,834 US4664946A (en) 1981-12-28 1986-04-29 Silicon carbide substrates and a method of producing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56209992A JPS58130547A (ja) 1981-12-28 1981-12-28 電気伝導性を有する炭化珪素基板への絶縁皮膜形成方法

Publications (2)

Publication Number Publication Date
JPS58130547A true JPS58130547A (ja) 1983-08-04
JPS6410100B2 JPS6410100B2 (enExample) 1989-02-21

Family

ID=16582058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56209992A Granted JPS58130547A (ja) 1981-12-28 1981-12-28 電気伝導性を有する炭化珪素基板への絶縁皮膜形成方法

Country Status (1)

Country Link
JP (1) JPS58130547A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6330386A (ja) * 1986-07-23 1988-02-09 日本特殊陶業株式会社 反応焼結炭化珪素製耐熱部品の製造方法
JP2002231424A (ja) * 2001-01-31 2002-08-16 Kyocera Corp セラミックヒーターとその製造方法及びこれを用いたウエハ加熱装置
FR2942471A1 (fr) * 2009-02-24 2010-08-27 Saint Gobain Ct Recherches Piece ceramique revetue.
US8622439B2 (en) 2009-02-24 2014-01-07 Saint-Gobain Centre De Recherches Et D'etudes Europeen Compliant material
US9023288B2 (en) 2009-02-24 2015-05-05 Saint-Gobain Centre de Recheches et d'Etudes European Flush joint
US9133966B2 (en) 2009-02-24 2015-09-15 Saint-Gobain Centre De Recherches Et D'etudes Europeen Joining device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58101442A (ja) * 1981-12-11 1983-06-16 Hitachi Ltd 電気的装置用基板

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58101442A (ja) * 1981-12-11 1983-06-16 Hitachi Ltd 電気的装置用基板

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6330386A (ja) * 1986-07-23 1988-02-09 日本特殊陶業株式会社 反応焼結炭化珪素製耐熱部品の製造方法
JP2002231424A (ja) * 2001-01-31 2002-08-16 Kyocera Corp セラミックヒーターとその製造方法及びこれを用いたウエハ加熱装置
FR2942471A1 (fr) * 2009-02-24 2010-08-27 Saint Gobain Ct Recherches Piece ceramique revetue.
WO2010097764A1 (fr) * 2009-02-24 2010-09-02 Saint-Gobain Centre De Recherches Et D'etudes Europeen Piece ceramique revetue
US8622439B2 (en) 2009-02-24 2014-01-07 Saint-Gobain Centre De Recherches Et D'etudes Europeen Compliant material
US8992852B2 (en) 2009-02-24 2015-03-31 Saint-Gobain Centre De Recherches Et D'etudes Europeen Coated ceramic part
US9023288B2 (en) 2009-02-24 2015-05-05 Saint-Gobain Centre de Recheches et d'Etudes European Flush joint
US9133966B2 (en) 2009-02-24 2015-09-15 Saint-Gobain Centre De Recherches Et D'etudes Europeen Joining device

Also Published As

Publication number Publication date
JPS6410100B2 (enExample) 1989-02-21

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